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公开(公告)号：US06728091B2
公开(公告)日：2004-04-27
申请号：US10157774
申请日：2002-05-29
IPC分类号： H02N1300
CPC分类号： H01L21/6833 , Y10T279/23 , Y10T428/31663 , Y10T428/31721 , Y10T428/31938
摘要： An electrostatic adsorption device has a dielectric layer, electrodes, a cooling member and an insulating adhesive. The dielectric layer is made of a ceramic dielectric material and has an adsorption face and a back face. The electrodes are provided on the back face of the dielectric layer and gaps are defined between the portions of the electrodes. The insulating adhesive is provided between the back face of the dielectric layer and the cooling member. The insulating adhesive covers the electrodes and the back face and is provided in the gaps.
摘要翻译： 静电吸附装置具有电介质层，电极，冷却构件和绝缘粘合剂。 电介质层由陶瓷电介质材料制成，具有吸附面和背面。 电极设置在电介质层的背面，间隙限定在电极部分之间。 绝缘粘合剂设置在电介质层的背面和冷却部件之间。 绝缘粘合剂覆盖电极和背面并设置在间隙中。
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公开(公告)号：US07763831B2
公开(公告)日：2010-07-27
申请号：US11939760
申请日：2007-11-14
CPC分类号： H05B3/143 , H01L21/67103
摘要： A heating device has a ceramic base with a heating surface, and a heating body embedded in the ceramic base. The heating device includes a thermal conductive member positioned between the heating surface and the heating body in the ceramic base. The thermal conductive member has a thermal conductivity that is higher than the ceramic base and as such, the heating device achieves superior temperature uniformity of a heated object particularly in a semiconductor device manufacturing process.
摘要翻译： 加热装置具有带有加热面的陶瓷基体和埋在陶瓷基体中的加热体。 加热装置包括位于陶瓷基体内的加热面与加热体之间的导热部件。 导热部件的导热率高于陶瓷基体，因此加热装置特别是在半导体器件制造工序中，能够实现加热对象的优异的温度均匀性。
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公开(公告)号：US07679034B2
公开(公告)日：2010-03-16
申请号：US11406900
申请日：2006-04-19
申请人： Yoshinobu Goto , Hideyoshi Tsuruta
发明人： Yoshinobu Goto , Hideyoshi Tsuruta
CPC分类号： H01L21/67103 , H01L21/68792
摘要： The power-supplying member comprises: a first rod-shaped member connected to at least one of a heating resistor and an electrode; a second rod-shaped member connected to a power supply; and a thermal-function member, which is disposed between the first rod-shaped member and the second rod-shaped member, and which has a smaller axial cross section area and a larger surface area as compared to the first and second rod-shaped members.
摘要翻译： 供电构件包括：连接到加热电阻器和电极中的至少一个的第一棒状构件; 连接到电源的第二杆状构件; 以及热功能部件，其设置在所述第一杆状部件和所述第二杆状部件之间，并且与所述第一和第二杆状部件相比具有较小的轴向截面面积和较大的表面积 。
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公开(公告)号：US07403386B2
公开(公告)日：2008-07-22
申请号：US11449551
申请日：2006-06-08
CPC分类号： H01L21/67109 , H01L21/6831
摘要： An electrostatic chuck includes; a base made of ceramics, in which an electrode generating electrostatic attractive force is embedded; a cooling member which contains metal; a bonding material which bonds the base and the cooling member to each other; a gas providing passage which penetrates the base, the bonding material, and the cooling member; and an engagement member and a bolt member, which are fixing members mechanically fixing the base and the cooling member to each other.
摘要翻译： 静电卡盘包括： 由陶瓷制成的基体，其中嵌入产生静电吸引力的电极; 含有金属的冷却构件; 将基部和冷却部件彼此接合的接合材料; 穿过基座，接合材料和冷却构件的气体供给通道; 以及作为将基座和冷却构件彼此机械地固定的固定构件的接合构件和螺栓构件。
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公开(公告)号：US07189946B2
公开(公告)日：2007-03-13
申请号：US11102462
申请日：2005-04-08
申请人： Yoshinobu Goto , Hideyoshi Tsuruta
发明人： Yoshinobu Goto , Hideyoshi Tsuruta
CPC分类号： H01L21/67103
摘要： A substrate heating device is provided, including a ceramic base plate having a heating surface on which a substrate is placed, resistance heating elements buried in the ceramic base plate corresponding to a plurality of zones into which the heating surface is divided, terminals respectively connected to the resistance heating elements, and lead wires respectively connected to the terminals and wired on an outer surface of the ceramic base plate other than the heating surface.
摘要翻译： 提供了一种基板加热装置，包括：陶瓷基板，其具有放置有基板的加热面;电阻加热元件，埋入陶瓷基板中，与加热面分割成多个区域对应，端子分别与 电阻加热元件和分别连接到端子并且接合在除了加热表面之外的陶瓷基板的外表面上的引线。
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公开(公告)号：US07126093B2
公开(公告)日：2006-10-24
申请号：US11064406
申请日：2005-02-23
申请人： Yoshinobu Goto , Hideyoshi Tsuruta
发明人： Yoshinobu Goto , Hideyoshi Tsuruta
CPC分类号： H01L21/67103 , H05B3/143
摘要： An object of the present invention is to provide a heating system having a ceramic heater and a supporting member supporting the back face of the heater, so that the cost of the supporting member can be reduced, the design change of the heater is made easier and excellent flatness of the heating face on use can be maintained. The heating system has a ceramic substrate 1 having a heating face 1a and a back face 1b, a heating means 4 for generating heat from the heating face 1a of the substrate 1, a metal supporting member 6 supporting the back face 1b of the substrate 1, and a heat insulating plate 5 provided between the back face 1b of the substrate 1 and the supporting member 6.
摘要翻译： 本发明的目的是提供一种加热系统，其具有陶瓷加热器和支撑加热器背面的支撑部件，从而可以减少支撑部件的成本，使得加热器的设计变化更容易， 可以保持使用时的加热面的良好的平坦度。 加热系统具有陶瓷基板1，其具有加热面1a和背面1b，用于从基板1的加热面1a产生热量的加热装置4，支撑背面1b的金属支撑部件6 以及设置在基板1的背面1b和支撑部件6之间的绝热板5。
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公开(公告)号：US20060186109A1
公开(公告)日：2006-08-24
申请号：US11064406
申请日：2005-02-23
申请人： Yoshinobu Goto , Hideyoshi Tsuruta
发明人： Yoshinobu Goto , Hideyoshi Tsuruta
IPC分类号： H05B3/68
CPC分类号： H01L21/67103 , H05B3/143
摘要： An object of the present invention is to provide a heating system having a ceramic heater and a supporting member supporting the back face of the heater, so that the cost of the supporting member can be reduced, the design change of the heater is made easier and excellent flatness of the heating face on use can be maintained. The heating system has a ceramic substrate 1 having a heating face 1a and a back face 1b, a heating means 4 for generating heat from the heating face 1a of the substrate 1, a metal supporting member 6 supporting The back face 1b of the substrate 1, and a heat insulating plate 5 provided between the back face 1b of the substrate 1 and the supporting member 6.
摘要翻译： 本发明的目的是提供一种加热系统，其具有陶瓷加热器和支撑加热器背面的支撑部件，从而可以减少支撑部件的成本，使得加热器的设计变化更容易， 可以保持使用时的加热面的良好的平坦度。 加热系统具有具有加热面1a和背面1b的陶瓷基板1，用于从基板1的加热面1a产生热量的加热装置4，支撑背面1b的金属支撑部件6 以及设置在基板1的背面1b和支撑部件6之间的绝热板5。
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公开(公告)号：US07060945B2
公开(公告)日：2006-06-13
申请号：US10945269
申请日：2004-09-20
申请人： Nobuyuki Kondou , Hideyoshi Tsuruta
发明人： Nobuyuki Kondou , Hideyoshi Tsuruta
IPC分类号： H05B3/68
CPC分类号： H05B3/143
摘要： A substrate heater is provided including a plate-shaped ceramic base having a first side defining a convex heating surface on at least a portion of which a substrate is placed, a resistance-heating element embedded in the ceramic base, and a tubular member joined to a central portion on an opposed second side of the ceramic base. The convex heating surface has a central portion and a peripheral portion, wherein the height of the heating surface decreases from the central portion toward the peripheral portion thereof.
摘要翻译： 提供一种基板加热器，其包括：板状陶瓷基体，其具有在其至少一部分上放置基板的第一侧限定凸形加热表面，嵌入陶瓷基底中的电阻加热元件和连接到 陶瓷基体的相对的第二侧上的中心部分。 凸形加热面具有中央部和周边部，其中，加热面的高度从中央部朝向周缘部减小。
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公开(公告)号：US20050006374A1
公开(公告)日：2005-01-13
申请号：US10884294
申请日：2004-07-02
IPC分类号： H05B3/06 , F27B17/00 , F27D5/00 , H01L21/00 , H01L21/02 , H01L21/683 , H05B3/14 , H05B3/74 , F27D11/00 , H05B3/68
CPC分类号： H01L21/67103 , F27B17/0025 , F27D5/0037 , H05B3/143
摘要： An object of the present invention is to provide a practical and low-cost method of reducing cold spots generated on the heating face of a ceramic susceptor and the temperature distribution on the heating face when the supporting portion is joined with the susceptor at the back face and is fitted to a chamber through a cooling system. A supporting portion 6 is joined with the back face of a ceramic susceptor. An inner space 6f separated from atmosphere in a chamber is formed. A cooling system is provided between the supporting portion 6 and chamber. Thermal control portions 12A and 12B are provided between the cooling system and supporting body 6 for reducing thermal conduction from the susceptor to the cooling system.
摘要翻译： 本发明的目的是提供一种实用且低成本的方法，当将支撑部分与基座在背面接合时，减少在陶瓷基座的加热面上产生的冷点和加热面上的温度分布 并通过冷却系统安装到腔室。 支撑部6与陶瓷基座的背面接合。 形成与室内的气氛分离的内部空间6f。 在支撑部分6和室之间设置冷却系统。 热控制部12A和12B设置在冷却系统和支撑体6之间，用于减少从基座到冷却系统的热传导。
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公开(公告)号：US06608745B2
公开(公告)日：2003-08-19
申请号：US09756555
申请日：2001-01-08
IPC分类号： H02N1300
CPC分类号： H01L21/6833
摘要： An electrostatic chuck includes a chuck body, an insulating layer formed on a surface of the chuck body and having an installation surface on which a wafer is to be installed, an inner electrode installed inside the insulating-layer, and projections projecting from the installation surface and having contact surfaces to which the wafer is to contact. A back side gas is flown into a space defined by the installation surface, the projections and the wafer, heat is supplied to the wafer, and heat of the wafer is conducted to the electrostatic chuck through the projections and the back side gas. The total area of the contact surfaces of the projections is not more than 1% of the area of the inner electrode, and the height of the projections are not less than 1 &mgr;m and not more than 10 &mgr;m.
摘要翻译： 静电卡盘包括卡盘主体，形成在卡盘主体的表面上并具有安装表面的绝缘层，安装在其上的晶片的安装表面，安装在绝缘层内部的内部电极和从安装表面突出的突起 并具有与晶片接触的接触表面。 背面气体流入由安装表面，突起和晶片限定的空间中，将热量供应到晶片，并且通过突起和背侧气体将晶片的热量传导到静电卡盘。 突起的接触表面的总面积不大于内部电极的面积的1％，突起的高度不小于1mum且不大于10um。
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