公开(公告)号：US07416474B2

公开(公告)日：2008-08-26

申请号：US11680237

申请日：2007-02-28

申请人： Shouichi Terada ,  Tsuyoshi Mizuno ,  Takeshi Uehara

发明人： Shouichi Terada ,  Tsuyoshi Mizuno ,  Takeshi Uehara

IPC分类号： B24B49/00

CPC分类号： H01L21/31051 ,  B24B29/005 ,  H01L21/02065

摘要： The present invention is a planarization apparatus for planarizing a coating film applied on a substrate before the coating film is hardened, including a contact body such as a brush or sponge brought into contact with a front surface of the coating film on the substrate; and a contact body drive mechanism for pressing the contact body against the front surface of the coating film and moving the contact body along the front surface of the coating film. The contact body is pressed against the coating film before it is hardened, and moved along the front surface of the coating film, whereby the coating film can be planarized to a predetermined film thickness. According to the present invention, the coating film can be planarized without using the CMP apparatus.

摘要翻译： 本发明是一种平面化装置，用于在涂膜硬化之前对施加在基板上的涂膜进行平面化，包括与基板上的涂膜的前表面接触的刷子或海绵等接触体; 以及接触体驱动机构，用于将接触体压靠在涂膜的前表面上，并使接触体沿着涂膜的前表面移动。 接触体在硬化之前被压在涂膜上，并且沿着涂膜的前表面移动，从而使涂膜平坦化成预定的膜厚度。 根据本发明，涂膜可以在不使用CMP装置的情况下进行平面化。

公开(公告)号：US07322496B2

公开(公告)日：2008-01-29

申请号：US10550862

申请日：2004-06-25

申请人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

发明人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

IPC分类号： C21C5/44

CPC分类号： B22D41/28 ,  B22D41/26

摘要： In a rotary nozzle brick body formed into a substantially egg-like shape in it's plan view, the present invention secures a contact area of a nozzle portion and improves a configuration factor which considerably affecting the durability of the body. A rotary nozzle brick body is characterized in that the external shape in plan view is comprised of first circular portions (G), second circular portions (H), third circular portions (K), and tangent lines connecting the first circular portions and third circular portions so that a substantially elliptical shape is formed by increasing the circular portion and shortening the tangent lines, instead of a substantially egg-like shape having long tangent lines. Since the substantially elliptical shape is formed by reducing the linear portion of the brick body in it's plan view while the shape is expanded circularly, the contact area is maintained even if the sliding plate brick is rotated up to it's full-opened state, thereby eliminating a fear that molten steel or the like may leak.

摘要翻译： 在平面图中形成为大致卵状的旋转喷嘴砖体中，本发明确保了喷嘴部的接触面积，并且提高了对身体的耐久性有显着影响的构造因素。 旋转喷嘴砖体的特征在于，平面图中的外形由第一圆形部分（G），第二圆形部分（H），第三圆形部分（K）和连接第一圆形部分和第三圆形部分 部分使得通过增加圆形部分并缩短切线而形成大致椭圆形状，而不是具有长切线的基本上卵形。 由于通过在形状圆形膨胀的同时在其平面图中减小砖体的直线部分而形成大致椭圆形状，所以即使滑板砖转动到其全开状态，仍保持接触面积，从而消除 担心钢水等会泄漏。

公开(公告)号：US07290685B2

公开(公告)日：2007-11-06

申请号：US11152209

申请日：2005-06-15

申请人： Tomohiro Yotabun ,  Tsuyoshi Mizuno ,  Tsuyoshi Yoshida

发明人： Tomohiro Yotabun ,  Tsuyoshi Mizuno ,  Tsuyoshi Yoshida

IPC分类号： B22D41/30

CPC分类号： B22D41/28

摘要： It is an object to form a plate for a sliding nozzle apparatus in a shape for decreasing extreme erosion and extend durability of the plate to enable cost reduction, the sliding-nozzle plate having dimensions (unit length is mm) as indicated in following equations: a dimension from the center position X of the nozzle hole to a closest end of the plate for the sliding nozzle in the longitudinal direction is a sum of a dimension “b” from the center position X to an ideal circle with the position X as the center and a dimension “d” from the ideal circle to the closest end in the longitudinal direction, a dimension from the center position X and to a center position Y is a dimension S of the stroke, and a dimension from the center position Y to a closest end of the plate for the sliding nozzle in the longitudinal direction is a dimension “c”, where b: a+30˜40, c: 0.75a+20˜30, d:0.5a, S:2a+m, and m:15˜35.

摘要翻译： 本发明的目的是形成滑动喷嘴装置的板，其具有减小极限侵蚀的形状并延长板的耐用性，以便降低成本，滑动喷嘴板的尺寸（单位长度为mm）如下面所示： 从喷嘴孔的中心位置X到纵向的滑动板的最近端的尺寸是从中心位置X到理想圆的尺寸“b”与位置X为 中心和从理想圆到纵向最近端的尺寸“d”，从中心位置X到中心位置Y的尺寸是行程的尺寸S，以及从中心位置Y到 用于滑动喷嘴的纵向方向的最靠近的端部是尺寸“c”，其中b：a + 30〜40，c：0.75a + 20〜30，d：0.5a，S：2a + m， m：15〜35。

公开(公告)号：US20070224918A1

公开(公告)日：2007-09-27

申请号：US11680237

申请日：2007-02-28

申请人： Shouichi Terada ,  Tsuyoshi Mizuno ,  Takeshi Uehara

发明人： Shouichi Terada ,  Tsuyoshi Mizuno ,  Takeshi Uehara

IPC分类号： B24B49/00

CPC分类号： H01L21/31051 ,  B24B29/005 ,  H01L21/02065

摘要： The present invention is a planarization apparatus for planarizing a coating film applied on a substrate before the coating film is hardened, including a contact body such as a brush or sponge brought into contact with a front surface of the coating film on the substrate; and a contact body drive mechanism for pressing the contact body against the front surface of the coating film and moving the contact body along the front surface of the coating film. The contact body is pressed against the coating film before it is hardened, and moved along the front surface of the coating film, whereby the coating film can be planarized to a predetermined film thickness. According to the present invention, the coating film can be planarized without using the CMP apparatus.

摘要翻译： 本发明是一种平面化装置，用于在涂膜硬化之前对施加在基板上的涂膜进行平面化，包括与基板上的涂膜的前表面接触的刷子或海绵等接触体; 以及接触体驱动机构，用于将接触体压靠在涂膜的前表面上，并使接触体沿着涂膜的前表面移动。 接触体在硬化之前被压在涂膜上，并且沿着涂膜的前表面移动，从而使涂膜平坦化成预定的膜厚度。 根据本发明，涂膜可以在不使用CMP装置的情况下进行平面化。

公开(公告)号：US20060273499A1

公开(公告)日：2006-12-07

申请号：US10550862

申请日：2004-06-25

申请人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

发明人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

IPC分类号： C21C5/44

CPC分类号： B22D41/28 ,  B22D41/26

摘要： In a rotary nozzle brick body formed into a substantially egg-like shape in its plan view, the present invention secures a contact area of a nozzle portion and improves a configuration factor which considerably affecting the durability of the body. A rotary nozzle brick body is characterized in that the external shape in plan view is comprised of first circular portions (G), second circular portions (H), third circular portions (K) and tangent lines connecting the first circular portions and the third circular portions so that a substantially elliptical shape is formed by increasing the circular portions and shortening the tangent lines, instead of a substantially egg-like shape having long tangent lines. Since the substantially elliptical shape is formed by reducing the linear portion of the brick body in its plan view while the shape is expanded circularly, the contact area is maintained even if the sliding plate brick is rotated up to its full-opened state, thereby eliminating a fear that molten steel or the like may leak.

摘要翻译： 本发明在俯视图中形成为大致卵形的旋转喷嘴砖体中，确保了喷嘴部的接触面积，并提高了对身体的耐久性产生显着影响的构成因素。 旋转喷嘴砖体的特征在于，平面图中的外形由第一圆形部分（G），第二圆形部分（H），第三圆形部分（K）和连接第一圆形部分和第三圆形部分 部分使得通过增加圆形部分并缩短切线而形成大致椭圆形状，而不是具有长切线的大致卵形。 由于通过在形状圆形膨胀的同时在其平面图中减小砖体的直线部分而形成大致椭圆形状，所以即使滑板砖转动到其全开状态，仍保持接触面积，从而消除 担心钢水等会泄漏。