公开(公告)号：US08684014B2

公开(公告)日：2014-04-01

申请号：US12849357

申请日：2010-08-03

申请人： Yoshifumi Amano ,  Tsuyoshi Mizuno

发明人： Yoshifumi Amano ,  Tsuyoshi Mizuno

IPC分类号： B08B3/04

CPC分类号： H01L21/67051 ,  H01L21/6708 ,  H01L21/67109

摘要： Disclosed is a liquid processing apparatus and a liquid processing method, which can process an entire wafer at a sufficiently high temperature and can sufficiently suppress adhesion of particles on a surface of the wafer, when the peripheral portion of the wafer is processed. The liquid processing apparatus includes a holding part to hold the substrate, a rotation driving part to rotate the holding part, and a shield unit. The shield unit includes an opposed plate opposed to the substrate held by the holding part, a heating part to heat the substrate through the opposed plate, and a heated gas supplying part to supply heated gas to a surface of the substrate held by the holding part.

摘要翻译： 公开了一种液体处理装置和液体处理方法，其可以在足够高的温度下处理整个晶片，并且可以充分地抑制晶片的周边部分处理颗粒在晶片表面上的粘附。 液体处理装置包括用于保持基板的保持部分，旋转驱动部分以使保持部分旋转，以及屏蔽单元。 屏蔽单元包括与由保持部保持的基板相对的相对板，通过相对板加热基板的加热部分和加热气体供应部分，以将加热气体供应到由保持部分保持的基板的表面 。

公开(公告)号：US20120067846A1

公开(公告)日：2012-03-22

申请号：US13223543

申请日：2011-09-01

申请人： Tsuyoshi Mizuno ,  Hiromitsu Namba ,  Yuichiro Morozumi ,  Shingo Hishiya ,  Katsushige Harada ,  Fumiaki Hayase

发明人： Tsuyoshi Mizuno ,  Hiromitsu Namba ,  Yuichiro Morozumi ,  Shingo Hishiya ,  Katsushige Harada ,  Fumiaki Hayase

IPC分类号： C23F1/00 ,  C23F1/08

CPC分类号： C23F1/08 ,  H01L21/02087 ,  H01L21/0209 ,  H01L21/6708 ,  H01L21/68785 ,  H01L21/68792

摘要： Disclosed is a method for processing a substrate including a first process and a second process. The first process comprises supporting the substrate formed with a titanium-containing film on its front surface and rear surface by a support unit which is rotatably installed; rotating the substrate along with the support unit; and supplying a first processing liquid containing hydrofluoric acid to the rear surface of the substrate thereby processing the rear surface of the substrate with the first processing liquid. The second process comprises supplying a second processing liquid containing ammonia hydrogen peroxide mixture to the rear surface of the substrate after the first process is completed, thereby processing the rear surface of the substrate with the second processing liquid.

摘要翻译： 公开了一种用于处理包括第一工艺和第二工艺的衬底的方法。 第一种方法包括通过可旋转地安装的支撑单元在其前表面和后表面上支撑由含钛膜形成的基板; 与支撑单元一起旋转基板; 并将含有氢氟酸的第一处理液体供给到所述基板的后表面，由此用所述第一处理液处理所述基板的后表面。 第二种方法包括在第一工艺完成之后，将含有氨过氧化氢混合物的第二处理液体供应到衬底的后表面，由此用第二处理液处理衬底的后表面。

公开(公告)号：US07322496B2

公开(公告)日：2008-01-29

申请号：US10550862

申请日：2004-06-25

申请人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

发明人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

IPC分类号： C21C5/44

CPC分类号： B22D41/28 ,  B22D41/26

摘要： In a rotary nozzle brick body formed into a substantially egg-like shape in it's plan view, the present invention secures a contact area of a nozzle portion and improves a configuration factor which considerably affecting the durability of the body. A rotary nozzle brick body is characterized in that the external shape in plan view is comprised of first circular portions (G), second circular portions (H), third circular portions (K), and tangent lines connecting the first circular portions and third circular portions so that a substantially elliptical shape is formed by increasing the circular portion and shortening the tangent lines, instead of a substantially egg-like shape having long tangent lines. Since the substantially elliptical shape is formed by reducing the linear portion of the brick body in it's plan view while the shape is expanded circularly, the contact area is maintained even if the sliding plate brick is rotated up to it's full-opened state, thereby eliminating a fear that molten steel or the like may leak.

摘要翻译： 在平面图中形成为大致卵状的旋转喷嘴砖体中，本发明确保了喷嘴部的接触面积，并且提高了对身体的耐久性有显着影响的构造因素。 旋转喷嘴砖体的特征在于，平面图中的外形由第一圆形部分（G），第二圆形部分（H），第三圆形部分（K）和连接第一圆形部分和第三圆形部分 部分使得通过增加圆形部分并缩短切线而形成大致椭圆形状，而不是具有长切线的基本上卵形。 由于通过在形状圆形膨胀的同时在其平面图中减小砖体的直线部分而形成大致椭圆形状，所以即使滑板砖转动到其全开状态，仍保持接触面积，从而消除 担心钢水等会泄漏。

公开(公告)号：US07290685B2

公开(公告)日：2007-11-06

申请号：US11152209

申请日：2005-06-15

申请人： Tomohiro Yotabun ,  Tsuyoshi Mizuno ,  Tsuyoshi Yoshida

发明人： Tomohiro Yotabun ,  Tsuyoshi Mizuno ,  Tsuyoshi Yoshida

IPC分类号： B22D41/30

CPC分类号： B22D41/28

摘要： It is an object to form a plate for a sliding nozzle apparatus in a shape for decreasing extreme erosion and extend durability of the plate to enable cost reduction, the sliding-nozzle plate having dimensions (unit length is mm) as indicated in following equations: a dimension from the center position X of the nozzle hole to a closest end of the plate for the sliding nozzle in the longitudinal direction is a sum of a dimension “b” from the center position X to an ideal circle with the position X as the center and a dimension “d” from the ideal circle to the closest end in the longitudinal direction, a dimension from the center position X and to a center position Y is a dimension S of the stroke, and a dimension from the center position Y to a closest end of the plate for the sliding nozzle in the longitudinal direction is a dimension “c”, where b: a+30˜40, c: 0.75a+20˜30, d:0.5a, S:2a+m, and m:15˜35.

摘要翻译： 本发明的目的是形成滑动喷嘴装置的板，其具有减小极限侵蚀的形状并延长板的耐用性，以便降低成本，滑动喷嘴板的尺寸（单位长度为mm）如下面所示： 从喷嘴孔的中心位置X到纵向的滑动板的最近端的尺寸是从中心位置X到理想圆的尺寸“b”与位置X为 中心和从理想圆到纵向最近端的尺寸“d”，从中心位置X到中心位置Y的尺寸是行程的尺寸S，以及从中心位置Y到 用于滑动喷嘴的纵向方向的最靠近的端部是尺寸“c”，其中b：a + 30〜40，c：0.75a + 20〜30，d：0.5a，S：2a + m， m：15〜35。

公开(公告)号：US20060273499A1

公开(公告)日：2006-12-07

申请号：US10550862

申请日：2004-06-25

申请人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

发明人： Tomohiro Yotabunn ,  Tsuyoshi Mizuno ,  Hideto Takasugi ,  Tsuneo Kondo ,  Hisao Inubushi

IPC分类号： C21C5/44

CPC分类号： B22D41/28 ,  B22D41/26

摘要： In a rotary nozzle brick body formed into a substantially egg-like shape in its plan view, the present invention secures a contact area of a nozzle portion and improves a configuration factor which considerably affecting the durability of the body. A rotary nozzle brick body is characterized in that the external shape in plan view is comprised of first circular portions (G), second circular portions (H), third circular portions (K) and tangent lines connecting the first circular portions and the third circular portions so that a substantially elliptical shape is formed by increasing the circular portions and shortening the tangent lines, instead of a substantially egg-like shape having long tangent lines. Since the substantially elliptical shape is formed by reducing the linear portion of the brick body in its plan view while the shape is expanded circularly, the contact area is maintained even if the sliding plate brick is rotated up to its full-opened state, thereby eliminating a fear that molten steel or the like may leak.

摘要翻译： 本发明在俯视图中形成为大致卵形的旋转喷嘴砖体中，确保了喷嘴部的接触面积，并提高了对身体的耐久性产生显着影响的构成因素。 旋转喷嘴砖体的特征在于，平面图中的外形由第一圆形部分（G），第二圆形部分（H），第三圆形部分（K）和连接第一圆形部分和第三圆形部分 部分使得通过增加圆形部分并缩短切线而形成大致椭圆形状，而不是具有长切线的大致卵形。 由于通过在形状圆形膨胀的同时在其平面图中减小砖体的直线部分而形成大致椭圆形状，所以即使滑板砖转动到其全开状态，仍保持接触面积，从而消除 担心钢水等会泄漏。