公开(公告)号：US4039829A

公开(公告)日：1977-08-02

申请号：US686298

申请日：1976-05-14

申请人： Yasuo Kato ,  Masahide Okumura ,  Hideo Todokoro

发明人： Yasuo Kato ,  Masahide Okumura ,  Hideo Todokoro

IPC分类号： G01N23/225 ,  G01B15/00 ,  G01C11/00 ,  G01C11/26 ,  H01J37/26 ,  H01J37/28 ,  H04N13/00 ,  G01N23/00 ,  G21K7/00 ,  H04N9/54 ,  H04N9/60

CPC分类号： G01B15/00 ,  H01J37/28 ,  H04N13/00 ,  H04N13/0438

摘要： Apparatus capable of tridimensionally measuring the distance between two arbitrary points on the surface of a sample is disclosed. In apparatus wherein the surface of the sample to be observed is scanned with an energized beam, wherein a secondary radiation emitted from the sample is detected and wherein a sample image is displayed by making the detected signal a video signal, two sample images obtained by changing-over the incident angle of the beam on the sample surface are displayed, whereby the stereoscopic viewing of the sample surface is enabled. In this invention, there is added means for superposing and displaying marks at two positions of both the sample images as correspond to two arbitrary points on the sample surface and for automatically calculating the tridimensional distance between the two points on the sample surface on the basis of positioning signals of the marks.