公开(公告)号：US20060209285A1

公开(公告)日：2006-09-21

申请号：US11416110

申请日：2006-05-03

申请人： Takeshi Shirai

发明人： Takeshi Shirai

IPC分类号： G03B27/42

CPC分类号： G03F7/70341 ,  G03F7/70316 ,  G03F7/70875 ,  G03F7/70958 ,  G03F7/70983

摘要： A liquid immersion exposure apparatus includes a projection optical system (PL) which projects an image of a pattern onto a substrate (W) and a unit (5) which supplies a liquid (7) between an optical element (4) at the end of the projection optical system (PL) and the substrate (W). A corrosion-resistant film composed of an oxide is formed on the surface of the optical element (4) to prevent corrosion by the liquid (7). Consequently, a desired performance of the projection optical system can be secured for a long time even where a full field exposure in the step-and-repeat manner or a scanning exposure in the step-and-scan manner is performed in a liquid-immersion state.

摘要翻译： 液浸曝光装置包括投影光学系统（PL），该投影光学系统将图案的图像投影到基板（W）上;以及单元（5），该单元（5）在液晶（7）的端部的光学元件 投影光学系统（PL）和基板（W）。 在光学元件（4）的表面上形成由氧化物构成的耐腐蚀膜，以防止液体（7）的腐蚀。 因此，即使在步进扫描方式中的全场曝光或以扫描方式进行的扫描曝光在液浸中进行，也可以长时间确保投影光学系统的期望性能 州。

公开(公告)号：US5963365A

公开(公告)日：1999-10-05

申请号：US871612

申请日：1997-06-10

申请人： Takeshi Shirai

发明人： Takeshi Shirai

IPC分类号： G02B1/11 ,  G02B1/115 ,  G03F7/20 ,  G02B5/28

CPC分类号： G03F7/70575 ,  G02B1/115 ,  G03F7/70191 ,  G03F7/70308

摘要： Anti-reflective coatings for use on an optical substrate are disclosed having a low reflectance over a broad band of wavelengths in the ultraviolet range and exhibiting excellent "laser durability." The anti-reflective coatings comprise a layer of high-refractive index material situated between at least two layers of low-refractive index material. The layers of high- and low-refractive index material are laminated onto an optical substrate, such as glass or quartz. The anti-reflective coating minimizes the loss of light due to flares, ghosts, etc. Additionally, reflections are reduced over a broad range of incidence angles.

摘要翻译： 公开了一种在光学基片上使用的抗反射涂层，其在紫外线范围内的宽波长波段具有低反射率，并表现出优异的“激光耐久性”。 抗反射涂层包括位于至少两层低折射率材料之间的高折射率材料层。 将高折射率材料和低折射率材料层层压到诸如玻璃或石英的光学基底上。 抗反射涂层使由于耀斑，鬼影等引起的光的损失最小化。此外，在宽的入射角范围内减少了反射。

公开(公告)号：US5588433A

公开(公告)日：1996-12-31

申请号：US571103

申请日：1995-12-12

申请人： Takeshi Shirai ,  Wataru Yagi

发明人： Takeshi Shirai ,  Wataru Yagi

IPC分类号： G01B17/00 ,  A61B8/00 ,  A61B8/06 ,  G01B17/06 ,  G06T5/20

CPC分类号： G06T5/20

摘要： There is provided an ultrasonic diagnostic apparatus in which ultrasonic waves are transmitted and received in directions each along the associated one of a plurality of scan lines extending in a depth direction within the subject to obtain received signals, and data representative of displacement of the respective pixel points along each scan line within the subject are evaluated on the basis of the thus obtained received signals, thereby displaying an image based on the data representative of the displacement. According to the ultrasonic diagnostic apparatus, color data of a pixel train involved in the presence of displacement (color-displayed) appearing continuously by less than N pixels (typically, one pixel to two or three pixels at most) is replaced by data representative of the absence of the displacement (not color-displayed).

摘要翻译： 提供了一种超声波诊断装置，其中超声波沿着沿着在对象内的深度方向延伸的多条扫描线中的相关联的一条扫描线的方向被发送和接收，以获得接收信号，并且表示各个像素的位移的数据 基于由此获得的接收信号来评估对象内每个扫描线的点，从而基于表示位移的数据显示图像。 根据超声波诊断装置，通过少于N个像素（通常为1个以上，2个以下或3个以下的像素）出现的位移（彩色显示）存在的像素列的颜色数据由代表 没有位移（不是彩色显示）。

公开(公告)号：US5510708A

公开(公告)日：1996-04-23

申请号：US326616

申请日：1994-10-20

申请人： Takeshi Shirai ,  Andrzej M. Pawlak ,  Alan H. Green

发明人： Takeshi Shirai ,  Andrzej M. Pawlak ,  Alan H. Green

IPC分类号： B60T8/171 ,  G01P3/488 ,  B60T8/32

CPC分类号： G01P3/488 ,  B60T8/171

摘要： A variable reluctance rotation sensor comprising a flux member having a ferromagnetic pole piece formed of a cylindrical center portion interposed between a first and second end portion. Each of the end portions have a respective surface which contains elongated teeth, similarly separated by slots as teeth on the periphery of a toothed wheel. The cylindrical center portion is positioned with respect to the toothed wheel such that the toothed surfaces of the first and second end portions are positioned adjacent the periphery of the toothed wheel comprising the teeth and slots, the magnetic flux member and toothed wheel defining an air gap. The sensor further comprises permanent magnets which establish main flux loops traversing the air gap, and leakage flux loops linking an electrical coil wound about the cylindrical center portion. As the toothed wheel is rotated, the magnitude of the main flux loops vary in relation to the varying air gap. The leakage flux loops, in turn, vary in relation to the varying main flux loops, the varying leakage flux loops being linked to the electrical coil and resulting in a sinusoidal output voltage signal proportional to the varying leakage flux loops. Each cycle of the output signal corresponds to a predetermined incremental angular rotation of the toothed wheel.

摘要翻译： 一种可变磁阻旋转传感器，包括具有铁磁极片的磁通构件，所述铁磁极片由插入在第一和第二端部之间的圆柱形中心部分形成。 每个端部具有相应的表面，该表面包含细长的齿，其类似地由齿形的齿周边上的齿分隔开。 圆柱形中心部分相对于齿轮定位，使得第一和第二端部的齿形表面邻近包括齿和狭槽的齿轮的周边定位，磁通部件和齿轮限定气隙 。 该传感器还包括永久磁铁，其建立横过气隙的主通量回路，以及连接围绕圆柱形中心部分缠绕的电线圈的漏磁通回路。 当齿轮旋转时，主通量环的大小相对于变化的空气间隙而变化。 漏磁通环路又相对于变化的主磁通环路变化，变化的漏磁通回路与电线圈相连，并产生与变化的漏磁通回路成比例的正弦输出电压信号。 输出信号的每个周期对应于齿轮的预定的增量角旋转。

公开(公告)号：US5385410A

公开(公告)日：1995-01-31

申请号：US938083

申请日：1992-08-31

申请人： Takeshi Shirai ,  Andrzej M. Pawlak

发明人： Takeshi Shirai ,  Andrzej M. Pawlak

IPC分类号： F16C33/78 ,  G01P3/44 ,  F16C33/00

CPC分类号： F16C33/78 ,  F16C41/007 ,  G01P3/443

摘要： An integral variable reluctance sensor and bearing grease seal assembly (sensor assembly) has at least one magnet and an annular wire coil secured at the interior of a housing which seals an annular space between a dynamic inner race and a static outer race. The sensor assembly is characterized by a relatively large flux change and resulting large peak to peak periodic output due to exploitation of the outer race and housing as high permeance flux paths in the sensor magnetic circuit and an additive arrangement of plural magnets. Sensor output signal strength is variable in step with the number of magnets and output variations due to air gap variations are minimized by symmetrical distribution of the same. The sensor assembly is further characterized by a single dynamic seal and no moving parts.

摘要翻译： 一体积可变磁阻传感器和轴承油脂密封组件（传感器组件）具有固定在壳体内部的至少一个磁体和环形线圈线圈，其密封动态内圈和静态外圈之间的环形空间。 传感器组件的特征在于相对较大的磁通量变化，并且由于外圈和壳体作为传感器磁路中的高磁通通路和多个磁体的添加装置而被开发，从而产生了大的峰值到峰值的周期性输出。 传感器输出信号强度随着磁体数量的变化而变化，并且由于气隙变化引起的输出变化由于其对称分布而被最小化。 传感器组件的特征还在于单个动态密封件，没有移动部件。