公开(公告)号：US20220020622A1

公开(公告)日：2022-01-20

申请号：US17305545

申请日：2021-07-09

Applicant: Tokyo Electron Limited

Inventor： Takehiro SHINDO

IPC: H01L21/677 ,  H01L21/68

Abstract: A substrate transport system for transporting a substrate in a vacuum atmosphere includes a vacuum chamber, inside of which is configured to be capable of being set to a vacuum atmosphere, a transport arm provided inside the vacuum chamber and configured to hold and transport the substrate, a horizontal movement mechanism configured to move the transport arm in a horizontal direction inside the vacuum chamber, a horizontal duct arm mechanism including therein an accommodation portion having a normal pressure atmosphere, the horizontal duct arm mechanism being configured to be extendable/contractible as the transport arm moves horizontally, a vertical movement mechanism configured to move the transport arm in a vertical direction inside the vacuum chamber, and a vertical duct arm mechanism including therein an accommodation portion having a normal pressure atmosphere, the vertical duct arm mechanism being configured to be extendable/contractible as the transport arm moves vertically.

公开(公告)号：US20210252695A1

公开(公告)日：2021-08-19

申请号：US17173781

申请日：2021-02-11

Applicant: TOKYO ELECTRON LIMITED

Inventor： Takehiro SHINDO

IPC: B25J9/00 ,  B25J9/16 ,  H01L21/677 ,  B25J13/08

Abstract: A teaching method for a transfer mechanism is provided. The teaching method includes (a) placing a first substrate or an edge ring on a fork of the transfer mechanism, transferring the first substrate or the edge ring to a target position, and placing the first substrate or the edge ring onto the target position; (b) placing a second substrate having a position detection sensor on the fork, and transferring the second substrate to a position directly above or below the target position; (c) detecting an amount of deviation between the first substrate or the edge ring and the target position using the position detection sensor of the second substrate; and (d) correcting transfer position data of the transfer mechanism for the first substrate or the edge ring to be transferred next, based on the detected amount of deviation.

公开(公告)号：US20160011587A1

公开(公告)日：2016-01-14

申请号：US14794893

申请日：2015-07-09

Applicant: TOKYO ELECTRON LIMITED

Inventor： Masahiro DOGOME ,  Hiroshi IKARI ,  Toshiaki TOYOMAKI ,  Genichi NANASAKI ,  Takehiro SHINDO

IPC: G05B19/418

CPC classification number: G05B19/4189 ,  B25J11/0095 ,  B25J19/0066 ,  B25J21/00 ,  B65G47/91 ,  G05B2219/45031 ,  G05B2219/45054 ,  H01L21/67766 ,  H01L21/68 ,  Y02P90/083 ,  Y02P90/28

Abstract: Provided is a conveyance robot replacement apparatus used for replacing a conveyance robot installed in an atmosphere conveyance chamber of a semiconductor manufacturing apparatus in order to convey a substrate. The conveyance robot replacement apparatus includes a positioning unit configured to determine a position of the conveyance robot replacement apparatus with respect to the atmospheric conveyance chamber, a holding unit configured to suspend the conveyance robot to be supported, a guide portion configured to guide advancing and retreating into and from the atmospheric conveyance chamber of the holding unit by being engaged with the positioning unit, a position adjustment unit configured move the holding unit in each of the longitudinal direction, the horizontal direction, and the vertical direction to adjust a position of the holding unit, and a connecting component connectable to the holding unit as well as the conveyance robot.

Abstract translation: 提供一种输送机器人更换装置，其用于更换安装在半导体制造装置的气氛输送室中的输送机器人，以便输送基板。 所述输送机器人更换装置包括定位单元，所述定位单元构造为确定所述输送机器人更换装置相对于所述大气输送室的位置;保持单元，其构造成将所述运送机器人悬挂在被支撑体上;引导部，其构造成引导前进和后退 通过与所述定位单元接合而进入和离开所述保持单元的大气输送室，所述位置调整单元构造成在所述纵向方向，水平方向和垂直方向中的每一个中移动所述保持单元，以调整所述保持单元的位置 单元，以及可连接到保持单元和输送机器人的连接部件。