Abstract:
Plural patterns of cell projections made in an aperture are stored in a register. Cells in designed data are compared with the cell projections stored in the register by an interlayer operation, to judge whether or not a cell which coincides with any one of the cells in the designed data is present among the patterns of the cell projections stored in the register. In the case that the judgement that the coinciding cell is present is given, the coinciding cell projection is e acted and outputted as data for direct-writing. In the case that the judgement that no coinciding cell is present is given, if a cell whose reference frequency is over a given value is present, this cell is extracted and registered as a new cell projection.
Abstract:
Disclosed is a method for making a partial full-wafer pattern for charged particle beam lithography based on circuit design data. This method has the steps of: conducting the interlayer operation between the circuit design data of a pattern of lithographed layer and the circuit design data of a pattern of base layer underlying the lithographed layer to extract a product-set pattern; and making data of partial full-wafer pattern by setting the product-set pattern to be a target region of partial full-wafer pattern.
Abstract:
A method of extracting data of at least one aperture mask pattern from design data which includes write-required patterns and repeating units, so that boundary lines of the at least one aperture mask pattern are different from boundary lines of the repeating unit on the design data and so that the at least one aperture mask pattern completely includes at least one of the write-required patterns without partially or incompletely including the write-required pattern.
Abstract:
In a beam exposure system, a beam is irradiated onto a mask unit, and the beam passed through the mask unit is deflected and is irradiated onto a target. The mask unit includes a polygonal hollowed holder and a plurality of masks. The holder is formed by mask mounting plates each having apertures for mounting the masks, and frames each having an aperture for passing the beam therethough.
Abstract:
Low cost construction of a steering apparatus is provided that is capable of protecting an operator's knees 28 during an automobile collision. A tilted plate 30 is arranged below and behind a bottom end section of a housing 21 which is a component of an electric power assist mechanism 20 connected to a front end section of a steering column 9. In case that the automobile is in a collision, automobile equipment 29 that moves forward under pressure from the driver's knees hits against a bottom surface of the tilted plate. This allows the impact energy to be absorbed by the elasticity or deformation of the tilted plate 30 during impact, and after impact as well, the automobile equipment 29 to move in a direction along the bottom surface of the tilted plate.
Abstract:
In an image stabilization control circuit of an image-capturing device, a gyro-equalizer (24) is used to integrate an angular velocity signal corresponding to vibration, and determine a required magnitude of displacement of a lens. The gyro-equalizer (24) integrates the angular velocity signal from a gyro-sensor (12) using an integration circuit (46) (LPF), and converts the result into an angular signal. A direct-current component of the angular signal is removed using a centering circuit (52) (HPF). Excessive phase delay of the angular signal on a high-frequency side caused by a phase characteristic of the gyro-sensor (12) is compensated by a phase lead compensation circuit (50) composed of a high-boost filter, and the phase delay of the angular signal with respect to the angular velocity signal is brought nearer to 90° by an integration process.
Abstract:
A image stabilization control circuit for an image capturing device, wherein a gyro-equalizer (24) integrates an angular velocity signal from a gyro-sensor (12) in an integration circuit (46). The integration circuit (46) is composed of a low-boost filter (LBF), and a phase delay in a target compensation region is set to a value appropriate for an integration process. Furthermore, a characteristic whereby the LBF reduces the phase delay at higher frequencies is used, compensation is applied to the excess phase delay of the angular signal in the high-frequency region brought about by the effect of the phase delay generated in the high-frequency region by the output signal of the gyro-sensor (12), and the phase delay in the high-frequency region is brought nearer to 90 degrees. This allows the accuracy of the process for determining the required displacement magnitude of a lens to be increased.
Abstract:
In an image stabilization control circuit of an image-capturing device, a gyro-equalizer (24) is used to integrate an angular velocity signal corresponding to vibration, and determine a required magnitude of displacement of a lens. The gyro-equalizer (24) integrates the angular velocity signal from a gyro-sensor (12) using an integration circuit (46) (LPF), and converts the result into an angular signal. A direct-current component of the angular signal is removed using a centering circuit (52) (HPF). Excessive phase delay of the angular signal on a high-frequency side caused by a phase characteristic of the gyro-sensor (12) is compensated by a phase lead compensation circuit (50) composed of a high-boost filter, and the phase delay of the angular signal with respect to the angular velocity signal is brought nearer to 90° by an integration process.
Abstract:
In a telescopic shaft for vehicle steering, assembled in a steering shaft of a vehicle and including a male shaft and a female shaft so fitted as to be mutually incapable of rotating but mutually slidable, at least one set of torque transmission members are disposed in at least one set of accommodating portions formed in an outer peripheral surface of the male shaft and in an inner peripheral surface of the female shaft, and at least the one set of torque transmission members are cylindrical members that gradually decrease in their diameters toward end portions in an axial direction.
Abstract:
A surface hardening treatment is applied to an inner peripheral surface of a female shaft 2, thereby forming a hard layer Ha thereon. Surface harness of the hard layer is 400 Hv or more. The thickness of the hard layer Ha is 10 μm to 100 μm, and for example gas nitrocarburizing treatment is performed as the surface hardening treatment. A surface hardening treatment is also applied to an outer surface of each cylindrical member 8 by a heat treatment, thereby forming a hard layer Hb thereon. With this construction, the inner peripheral surface of the female shaft is prevented from deformation and wear under a high contact pressure, so that the smooth sliding movement can be obtained.