摘要:
The present invention aims to provide a surface acoustic wave (SAW) device including at least two interdigital transducer (IDT) electrodes placed with a predetermined space therebetween on a piezoelectric substrate with improved passband characteristics without increasing the device size. The device includes IDT electrodes 2 and 3 placed with a predetermined space therebetween on a main surface of a piezoelectric substrate 1 and satisfies the formula: 0
摘要:
A surface acoustic wave filter (cascaded dual mode SAW filter) includes three IDT electrodes disposed adjacent to each other along the propagation direction of a surface wave on a piezoelectric substrate and two primary-tertiary longitudinally-coupled dual mode SAW fliers cascaded and constructed by arranging grating reflectors on both sides of three IDT electrodes. At least a pair of electrode fingers are thinned out from the IDT electrodes disposed outside, and floating electrodes are then disposed.
摘要:
[Problem] To provide a method of manufacturing a piezoelectric oscillator capable of preventing poor DLD characteristics that tend to occur in the piezoelectric oscillator including a piezoelectric resonator element and an IC chip that are sealed in the same package. [Means to Solve the Problem]A step of chemically polishing a surface without an integrated circuit of a silicon wafer 31 (step S2), a step of cleaning the silicon wafer 31 (step S3), a step of cutting the silicon wafer 31 into individual pieces of IC chip 6 (step S5), a step of bonding the IC chip 6 facing downwards in a recessed section of an insulating container, a step of mounting a piezoelectric resonator element in the insulating container, and a step of sealing with metal cover are included.
摘要:
A surface acoustic wave device has a piezoelectric substrate and an IDT formed on the piezoelectric substrate, and uses an excited wave as an SH wave. The piezoelectric substrate is a quartz plate in which a cut angle θ of a rotated Y-cut quartz substrate is set in the range of −65°≦θ≦−51° in a counter-clockwise direction from a crystal Z-axis and the propagation direction of a surface acoustic wave is set in the range (90°±5°) with respect to a crystal X-axis. The IDT is made of Ta or an alloyed metal containing Ta as the main component.
摘要:
An angular velocity detection apparatus (i.e., physical quantity detection apparatus) includes a gyro sensor element (i.e., physical quantity detection element) that allows an angular velocity detection signal that corresponds to the magnitude of an angular velocity (i.e., physical quantity) and a leakage signal of vibrations based on a drive signal (square-wave voltage signal) to flow through a detection electrode, a driver circuit that generates the drive signal, a synchronous detection circuit that performs a synchronous detection process on a detection target signal that includes the angular velocity detection signal and the leakage signal based on a detection signal that is synchronized with the drive signal, and a phase change circuit that changes a relative timing of at least one of a rising edge and a falling edge of the detection signal with respect to the detection target signal based on a control signal so that at least part of the leakage signal is output by the synchronous detection process.
摘要:
It is possible to reduce the size of a surface acoustic wave resonator by enhancing the Q value. In a surface acoustic wave resonator in which an IDT having electrode fingers for exciting surface acoustic waves is formed on a crystal substrate, a line occupying ratio is defined as a value obtained by dividing the width of one electrode finger by the distance between the center lines of the gaps between one electrode finger and the electrode fingers adjacent to both sides thereof, and the IDT includes a region formed by gradually changing the line occupying ratio from the center to both edges so that the frequency gradually becomes lower from the center to both edges than the frequency at the center of the IDT.
摘要:
A laminated wave plate that corresponds to a plurality of wavelengths including at least two wavelengths of λA and λB, and includes a first wave plate disposed on an incident side and a second wave plate disposed on an emitting side, the first wave plate and the second wave plate being laminated in such a manner that their optical axes are intersected each other, includes the following equations from (1) to (5): ΓA1=360°+360°×2NA (1); ΓA2=180°+360°×NA (2); ΓB1=360°×2NB (3); ΓB2=360°×NB (4); and NB=(ΔnB/ΔnA)×(λA/λB)×(0.5+NA) (5), in which ΓA1 is a phase difference of the wavelength λA at the first wave plate, ΓA2 is a phase difference of the wavelength λA at the second wave plate, ΓB1 is a phase difference of the wavelength λB at the first wave plate, ΓB2 is a phase difference of the wavelength λB at the second wave plate, θ1 is an in-plane azimuth of the first wave plate, θ2 is an in-plane azimuth of the second wave plate, ΔnA is a birefringent difference that is a difference (neA−noA) between a normal ray refractive index noA and an abnormal ray refractive index neA of the wavelength λA, and ΔnB is a birefringent difference that is a difference (neB−noB) between a normal ray refractive index noB and an abnormal ray refractive index neB of the wavelength λB, under conditions of θ1=−21°, and θ2=45°.
摘要:
A piezoelectric device includes: a container; a piezoelectric resonator element accommodated in the container; a circuit element accommodated in the container so as not to overlap with the piezoelectric resonator element in a plan view; and a mounting stage to which the piezoelectric resonator element is fixed. The mounting stage is fixed inside the container.
摘要:
First and a second wave plates using quartz crystal having birefringence are laminated together in such a manner that their optical axes intersect to form a laminated wave plate functioning as a half-wave plate as a whole. Phase differences of the first and the second wave plates relative to an ordinary ray and an extraordinary ray with respect to a predetermined wavelength λ are set to be Γ1 and Γ2, an order of a high-mode order is set to be a natural number n, whereby the high-order mode laminated half-wave plate is formed so as to satisfy: Γ1=180°+360°×n; and Γ2=180°+360°×n.
摘要:
A pressure sensor includes: a housing; an attachment having a pressure input orifice communicating with an interior of the housing; a first diaphragm that seals an opening of the pressure input orifice of the attachment, an external surface of the first diaphragm being a pressure receiving surface; a force transmitting member having an end which is coupled approximately perpendicular to a main surface of the first diaphragm, the main surface being opposite from the pressure receiving surface; a swing arm which is joined to the force transmitting member and is held to a retainer at a pivoting point as a fulcrum; and a pressure sensing element having a first end coupled to the retainer and a second end coupled to the swing arm, so that a displacement direction of the force transmitting member is the same direction as a line joining the first end and the second end. In this pressure sensor, the force transmitting member, the swing arm, the pressure sensing element, and the retainer are housed inside the housing, and the retainer is fixed to an inner wall of the housing.