公开(公告)号：US5313487A

公开(公告)日：1994-05-17

申请号：US887770

申请日：1992-05-22

Applicant: Shuichi Fujikawa ,  Mitsuo Inoue ,  Yukio Sato ,  Haruhiko Nagai

Inventor： Shuichi Fujikawa ,  Mitsuo Inoue ,  Yukio Sato ,  Haruhiko Nagai

IPC: H01S3/0977 ,  H01S3/097

CPC classification number: H01S3/0977 ,  H01S3/09775

Abstract: At least two types of preionization systems are provided at a backside of one of a pair of primary electrodes which are disposed in a spaced opposed relation with respect to each other for causing a large area, spatially uniform main discharge in a laser gas therebetween. This improves efficiency and stability in laser oscillations under repeated operations at a high rate of tens to hundreds of shots per second. In addition, without using the laser output power, the preionization timing is controlled such that an optimal preionization timing is realized. The optimal preionization timing is determined on the basis of a minimum discharge starting voltage between the primary electrodes or a minimum required time from the time of applying a high voltage between said first and second primary electrodes until the time the main discharge commences.

Abstract translation: 在一对主电极之一的背面设置至少两种类型的预电离系统，这些主电极相对于彼此以间隔开的相对关系设置，以在它们之间的激光气体中引起大面积的空间均匀的主放电。 这样可以在每秒数十到数百次的高速率重复操作下提高激光振荡的效率和稳定性。 此外，在不使用激光输出功率的情况下，控制预定时定时，从而实现最佳的初步化定时。 基于初级电极之间的最小放电起始电压或从在所述第一和第二主电极之间施加高电压直到主放电开始时的最小所需时间来确定最佳预电离定时。

公开(公告)号：US3522466A

公开(公告)日：1970-08-04

申请号：US3522466D

申请日：1968-07-29

Applicant: TAKEO KAMEGAYA ,  NAOYUKI TAKAMURA ,  MITSUO INOUE ,  AKIRA SOMEYA ,  TSUNEKAZU HASHIMOTO

Inventor： KAMEGAYA TAKEO ,  TAKAMURA NAOYUKI ,  INOUE MITSUO ,  SOMEYA AKIRA ,  HASHIMOTO TSUNEKAZU

IPC: H01J61/067 ,  H01J17/06 ,  H01J61/08

CPC classification number: H01J61/0672