Abstract:
A slurry composition includes about 4.25 to about 18.5 weight percent of an abrasive, about 80 to about 95 weight percent of deionized water, and about 0.05 to about 1.5 weight percent of an additive. The slurry composition may further include a surfactant. In a polishing method using the slurry composition, a polysilicon layer may be rapidly polished, and also dishing and erosion of the polysilicon layer may be suppressed.
Abstract:
A slurry composition includes about 4.25 to about 18.5 weight percent of an abrasive, about 80 to about 95 weight percent of deionized water, and about 0.05 to about 1.5 weight percent of an additive. The slurry composition may further include a surfactant. In a polishing method using the slurry composition, a polysilicon layer may be rapidly polished, and also dishing and erosion of the polysilicon layer may be suppressed.
Abstract:
A three-dimensional display device includes an image display portion for time-sharing a left eye image and a right eye image, and a parallax barrier for separating the left and right eye images provided from the image display portion into a direction of a left eye and a right eye of a user, respectively, by using a first and a second electrode set.A method includes applying a first driving voltage to the first electrode set during a first period, and applying a second driving voltage to the second electrode set during a second period. The second driving voltage has a level different from that of the first driving voltage.