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46 条记录 (耗时 0.026 秒)

    Wafer retention device
    45.
    发明授权
    Wafer retention device 失效
    晶圆保持装置

    公开(公告)号：US4898639A

    公开(公告)日：1990-02-06

    申请号：US338056

    申请日：1989-04-14

    申请人： Rolf Moe ,  David J. Correia ,  Michael Downs

    发明人： Rolf Moe ,  David J. Correia ,  Michael Downs

    IPC分类号： H01L21/00 ,  H01L21/67

    CPC分类号： H01L21/67028 ,  H01L21/67

    摘要： A wafer retention arrangement is disclosed for use with wafer stripping machines and the like which include a housing and a turret rotatably coupled to the housing for rotation about a selected axis, the turret being formed with a plurality of pockets that are adapted to retain a wafer. The wafer retention arrangement for each pocket includes a plurality of clips disposed about the periphery of the pocket to support a retained wafer. A latching mechanism cooperates with the support means to hold the wafer within the pocket. The latching mechanism is pivotally mounted to the turret for rotation about an axis that is substantially parallel to the surface of a wafer held within its associated pocket. The pivot point about which the latch mechanism rotates is substantially adjacent the edge of the wafer but spaced apart from the wafer plane. The latch mechanism includes a cam follower portion for engaging the actuator, a wafer engaging portion for pressing against the side of a wafer carried by the associated pocket, and biasing means for urging the cam follower towards the engagement position. The clips and the latching mechanism cooperate to hold wafers of various sizes. An actuator mechanisms carried by the housing is arranged to independently pivot the latching arrangement from an engagement position suitable for contacting a wafer carried by its associated pocket to a disengaged position free from contacting the wafer.

    摘要翻译： 公开了一种与晶片剥离机等一起使用的晶片保持装置，其包括可旋转地联接到壳体的壳体和转台，用于围绕选定的轴线旋转，转塔形成有多个凹坑，其适于保持晶片 。 每个凹槽的晶片保持装置包括围绕凹槽的周边设置的多个夹子以支撑保留的晶片。 闩锁机构与支撑装置配合以将晶片保持在口袋内。 闩锁机构枢转地安装到转台，用于围绕基本上平行于保持在其相关联的口袋内的晶片的表面的轴线旋转。 闩锁机构旋转的枢转点基本上与晶片的边缘相邻但与晶片平面间隔开。 闩锁机构包括用于接合致动器的凸轮从动部分，用于压靠由相关联的凹部承载的晶片侧的晶片接合部分和用于将凸轮从动件朝向接合位置推压的偏压装置。 夹子和闩锁机构协作以保持各种尺寸的晶片。 由壳体承载的致动器机构被布置成独立地将闩锁装置从接合位置枢转，该接合位置适于将由其相关联的袋携带的晶片接触到脱离位置，而不与晶片接触。