公开(公告)号：US4746800A

公开(公告)日：1988-05-24

申请号：US910101

申请日：1986-09-22

申请人： Jan Van Eijk ,  Marinus A. Van Den Brink ,  Johannes M. M. Van Kimmenade ,  Hubert A. M. Neilen

发明人： Jan Van Eijk ,  Marinus A. Van Den Brink ,  Johannes M. M. Van Kimmenade ,  Hubert A. M. Neilen

IPC分类号： G03F9/00 ,  B23Q1/00 ,  B23Q1/36 ,  B23Q1/48 ,  G03F7/20 ,  G03F9/02 ,  H01L21/027 ,  H01L21/30 ,  H01L21/68 ,  G21K5/10

CPC分类号： G03F7/70716 ,  B23Q1/36

摘要： A positioning device for manipulation of objects, provided with an object holder (5) which is rotatable about an axis of rotation (.theta.) by means of a .theta.-manipulator and is displaceable by translation along a Z-axis coinciding with the axis of rotation (.theta.) by means of a Z-manipulator. The two manipulators are coupled to each other by means of a separator (17, 153) in such a manner that the .theta.-movement and the Z-movement are independent of each other. The positioning device is particularly suitable for manipulation of objects in the submicron range, such as takes place, for example, in optical lithographic devices according to the invention.