System and method for wet cleaning a semiconductor wafer
    43.
    发明授权
    System and method for wet cleaning a semiconductor wafer 失效
    用于湿式清洗半导体晶片的系统和方法

    公开(公告)号:US07306002B2

    公开(公告)日:2007-12-11

    申请号:US10336631

    申请日:2003-01-04

    IPC分类号: B08B3/12

    摘要: A system and method for cleaning a substrate, such as a semiconductor wafer, utilizes a rotatable wafer supporting assembly with a cylindrical body to provide stability for the substrate being cleaned, even at high rotational speeds. The rotatable wafer supporting assembly may include wafer holding mechanisms with pivotable confining members that are configured to hold the substrate using centrifugal force when the wafer supporting assembly is rotated. In an embodiment, the cleaning system may include a positioning system operatively connected to an acoustic transducer to provide meaningful control of the acoustic energy applied to a surface of the substrate by selectively changing the distance between the acoustic transducer and the substrate surface so that the substrate can be cleaned more effectively.

    摘要翻译: 用于清洁诸如半导体晶片的衬底的系统和方法利用具有圆柱形主体的可旋转晶片支撑组件来提供即使在高转速下被清洁衬底的稳定性。 可旋转晶片支撑组件可以包括具有可枢转的限制构件的晶片保持机构,其被配置为当晶片支撑组件旋转时使用离心力来保持衬底。 在一个实施例中,清洁系统可以包括可操作地连接到声换能器的定位系统,以通过选择性地改变声换能器和衬底表面之间的距离来提供施加到衬底表面的声能的有意义的控制,使得衬底 可以更有效地清洗。

    Auto mode detection circuit in liquid crystal display
    46.
    发明授权
    Auto mode detection circuit in liquid crystal display 有权
    液晶显示器中的自动模式检测电路

    公开(公告)号:US06288713B1

    公开(公告)日:2001-09-11

    申请号:US09209718

    申请日:1998-12-11

    IPC分类号: G09G500

    CPC分类号: G09G5/008 G09G5/006

    摘要: An auto mode detection circuit in LCDS which detects a vertical synchronous signal provided to a liquid crystal display module (LCM) and selects the operation mode of LCDs with the detection result, comprising: clock signal generation for receiving a main clock signal to generate a clock signal; vertical synchronous signal detection means for detecting the vertical synchronous signal to generate a detection signal whenever a desired number of the clock signals are provided from the clock signal generation means; selection signal generation means for receiving the detection signal from the vertical synchronous signal detection means to generate a mode selection signal; and mode selection means for receiving the mode selection signal from the selection signal generation means to select one of a first signal for the first mode and a second signal for the second mode.

    摘要翻译: 一种LCDS中的自动模式检测电路,其检测提供给液晶显示模块(LCM)的垂直同步信号,并选择具有检测结果的LCD的操作模式,包括:时钟信号产生,用于接收主时钟信号以产生时钟 信号; 垂直同步信号检测装置,用于当从时钟信号产生装置提供期望数量的时钟信号时,检测垂直同步信号以产生检测信号; 选择信号发生装置,用于从垂直同步信号检测装置接收检测信号以产生模式选择信号; 以及模式选择装置,用于从选择信号发生装置接收模式选择信号,以选择第一模式的第一信号和第二模式的第二信号中的一个。