公开(公告)号：US20050181572A1

公开(公告)日：2005-08-18

申请号：US10778618

申请日：2004-02-13

Applicant: Tracy Verhoeven ,  Richard Ruby

Inventor： Tracy Verhoeven ,  Richard Ruby

IPC: H01L21/20 ,  H01L21/30 ,  H01L21/46 ,  H03H3/02 ,  H03H9/05 ,  H03H9/17

CPC classification number: H03H9/0542 ,  H03H3/02 ,  H03H9/173 ,  H03H2003/021

Abstract: A method for acoustically isolating an acoustic resonator comprises: providing a substrate; forming a porous region in the substrate; forming the acoustic resonator on the porous region; and removing the porous region from the substrate. The removing forms a cavity that separates a portion of the acoustic resonator from the substrate. By using the techniques described herein, it is possible to form an acoustic resonator on a substrate and to form a cavity between the acoustic resonator and the substrate without depositing sacrificial material.

Abstract translation: 用于声学隔离声谐振器的方法包括：提供衬底; 在所述基板中形成多孔区域; 在所述多孔区域上形成所述声共振器; 以及从所述基底去除所述多孔区域。 去除形成将声谐振器的一部分与基板分离的空腔。 通过使用本文描述的技术，可以在衬底上形成声谐振器并在声谐振器和衬底之间形成空腔，而不沉积牺牲材料。