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公开(公告)号：US20130119504A1
公开(公告)日：2013-05-16
申请号：US13810814
申请日：2011-07-06
IPC分类号： H01L37/00
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译： 本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。 为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部）的氧化硅膜4上 选自硅，氧和惰性元素如氩或氮中的至少一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。
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公开(公告)号：US08104355B2
公开(公告)日：2012-01-31
申请号：US12707438
申请日：2010-02-17
申请人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01L9/02
CPC分类号： G01N27/18 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01P5/10
摘要： A measurement element includes a semiconductor substrate with electrical insulating film formed thereon. A resistor formed on the electrical insulating film constitutes a heater; and a cavity is formed by removing a portion of the semiconductor substrate that corresponds to a region where a body part of the resistor is formed. The region where the body part of the resistor is formed is formed into a thin wall part by the cavity, and an opening and a slit is formed in a portion of the thin wall part in such a manner as to penetrate the thin wall part in the thickness direction. The measurement element has a film formed covering the region of the opening or slit.
摘要翻译： 测量元件包括其上形成有电绝缘膜的半导体衬底。 形成在电绝缘膜上的电阻构成加热器; 并且通过去除对应于形成有电阻体的主体部分的区域的半导体衬底的一部分来形成空腔。 电阻体的主体部分形成的区域通过空腔形成为薄壁部分，并且在薄壁部分的一部分中形成开口和狭缝，以便穿透薄壁部分 厚度方向。 测量元件具有覆盖开口或狭缝的区域的膜。
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公开(公告)号：US20100077851A1
公开(公告)日：2010-04-01
申请号：US12512512
申请日：2009-07-30
申请人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01F1/692
CPC分类号： G01F1/6845
摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
摘要翻译： 在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。 在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。 在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置， 电阻丝或电阻温度检测器线。
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公开(公告)号：US20140190239A1
公开(公告)日：2014-07-10
申请号：US14239851
申请日：2011-09-20
申请人： Rintaro Minamitani
发明人： Rintaro Minamitani
IPC分类号： G01N33/00
CPC分类号： G01N33/0004 , G01N17/002 , G01N17/006 , G01N17/043 , G01N17/046
摘要： An object of the present invention is to provide a corrosive environment monitoring apparatus and a corrosive environment monitoring method for evaluating the corrosiveness of an ambient environment simply and accurately in a short time period.The corrosive environment monitoring apparatus (1) of this invention has at least one vent duct (3a, 3b, 3c) in which specimens (2a, 2b, 2c) are installed so that the corrosiveness of the ambient environment is measured from the corroded conditions of the specimens (2a, 2b, 2c). The regions of the specimens (2a, 2b, 2c) in one vent duct (3a, 3b, 3c), which are subject to measurement, are made of the same metallic material. If a plurality of vent ducts (3a, 3b, 3c) are provided, these vent ducts (3a, 3b, 3c) are arranged in parallel with one another.
摘要翻译： 本发明的目的是提供一种用于在短时间内简单且准确地评价周围环境的腐蚀性的腐蚀性环境监测装置和腐蚀性环境监测方法。 本发明的腐蚀性环境监测装置（1）具有至少一个排放管道（3a，3b，3c），其中安装有试样（2a，2b，2c），以便从腐蚀条件测量周围环境的腐蚀性 的试样（2a，2b，2c）。 在一个通风管道（3a，3b，3c）中的待测量的试样（2a，2b，2c）的区域由相同的金属材料制成。 如果设置有多个通风管道（3a，3b，3c），则这些通风管道（3a，3b，3c）彼此平行地布置。
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公开(公告)号：US08723287B2
公开(公告)日：2014-05-13
申请号：US13810814
申请日：2011-07-06
IPC分类号： H01L31/058
CPC分类号： H01L37/00 , B81C1/00793 , G01F1/6845 , G01F1/692
摘要： An object of the present invention is to provide a thermal airflow sensor that prevents moisture absorption by a silicon oxide film formed closest to a surface (formed to be located on an uppermost portion), and that reduces a measuring error. In order to attain the foregoing object, the thermal airflow sensor according to the present invention applies an ion implantation to a silicon oxide film 4, formed closest to a surface (formed to be located on an uppermost portion), by using an atom or molecule selected from at least any one of silicon, oxygen, and an inert element such as argon or nitrogen, in order to increase a concentration of an atom contained in the silicon oxide film 4 more than that before the ion implantation.
摘要翻译： 本发明的目的是提供一种热气流传感器，其防止由最靠近表面（形成在最上部的部分）形成的氧化硅膜吸湿，并且减少了测量误差。 为了实现上述目的，根据本发明的热气流传感器通过使用原子或分子将离子注入施加到最靠近表面（形成在最上部）的氧化硅膜4上 选自硅，氧和惰性元素如氩或氮中的至少一种，以便增加氧化硅膜4中包含的原子的浓度比离子注入之前的浓度更高。
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