公开(公告)号：US07436573B2

公开(公告)日：2008-10-14

申请号：US11181079

申请日：2005-07-13

Applicant: Jonathan C. Doan ,  Satyadev R. Patel ,  Robert M. Duboc, Jr.

Inventor： Jonathan C. Doan ,  Satyadev R. Patel ,  Robert M. Duboc, Jr.

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/0833 ,  Y10T29/49155

Abstract: A micromirror device and a method of making the same are disclosed herein. The micromirror device comprises a mirror plate, hinge, and post each having an electrically conductive layer. One of the hinge, mirror plate, and post further comprises an electrically insulating layer. To enable the electrical connections between the conducting layers of the hinge, mirror plate, and post, the insulating layer is patterned.

Abstract translation: 本文公开了一种微镜器件及其制造方法。 微镜装置包括各自具有导电层的镜板，铰链和柱。 铰链，镜板和柱中的一个还包括电绝缘层。 为了实现铰链，镜板和柱的导电层之间的电连接，绝缘层被图案化。

公开(公告)号：US06849471B2

公开(公告)日：2005-02-01

申请号：US10402789

申请日：2003-03-28

Applicant: Satyadev R. Patel ,  Jonathan C. Doan

Inventor： Satyadev R. Patel ,  Jonathan C. Doan

IPC: B81B7/00 ,  B81C20060101 ,  B81C1/00 ,  H01L21/00 ,  H01L21/76

CPC classification number: B81C1/00793 ,  B81B2201/042 ,  B81C2201/053

Abstract: A method for processing microelectromechanical devices is disclosed herein. The method prevents the diffusion and interaction between sacrificial layers and structure layers of the microelectromechanical devices by providing selected barrier layers between consecutive sacrificial and structure layers.

公开(公告)号：US06804039B1

公开(公告)日：2004-10-12

申请号：US10692386

申请日：2003-10-22

Applicant: Jonathan C. Doan ,  Satyadev R. Patel

Inventor： Jonathan C. Doan ,  Satyadev R. Patel

IPC: G02F2600

CPC classification number: B81B3/0035 ,  B81B2201/042 ,  G02B26/0833

Abstract: A method and an improved multilayer hinge structure for use in a micromirror device for a spatial light modulator are provided herein. The micromirror device presents a conductive, composite torsion hinge with improved mechanical reliability, achieved by optimizing the geometry of the hinge, which minimizes the amount of residual twist, fixed torsional stiffness and fixed rate of plastic deformation in the mechanically undesirable hinge element. A method and its alternatives are disclosed herein by the present invention for manufacturing such multilayer hinge structure.

Abstract translation: 本文提供了一种用于空间光调制器的微反射镜装置中的方法和改进的多层铰链结构。 微反射镜装置呈现出具有改善的机械可靠性的导电复合扭转铰链，其通过优化铰链的几何形状而实现，其最大限度地减少机械不需要的铰链元件中的残余扭曲量，固定的扭转刚度和固定的塑性变形速率。 本发明公开了一种制造这种多层铰链结构的方法及其替代方案。