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公开(公告)号：US08105952B2
公开(公告)日：2012-01-31
申请号：US12222916
申请日：2008-08-19
申请人： Naoko Kihara , Hiroyuki Hieda , Yoshiyuki Kamata
发明人： Naoko Kihara , Hiroyuki Hieda , Yoshiyuki Kamata
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： G11B5/82 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G11B5/855
摘要： A pattern forming method is provided, which includes forming, above a substrate, a layer of a diblock copolymer composition containing at least PS and PEO, subjecting the layer to phase separation to obtain a phase-separated layer, thereby forming an easy-to-etch region constituted by PS and having a cylindrical or lamellar configuration extending in a first direction, forming an imprinting resist layer on the phase-separated layer, subjecting the imprinting resist layer to imprinting to form, on the imprinting resist layer, an uneven pattern consisting of projections and recesses extending in a second direction intersecting with the first direction, selectively removing, from the imprinting resist layer, the recesses, thereby leaving only the projections and, at the same time, selectively removing the PS from the phase-separated layer to obtain an etching resistive pattern containing PEO, and etching the substrate using, as a mask, not only the projections but also the etching resistive pattern.
摘要翻译： 提供了图案形成方法，其包括在基底上形成含有至少PS和PEO的二嵌段共聚物组合物层，使该层相分离以获得相分离层，由此形成易于 蚀刻区域由PS构成并且具有在第一方向上延伸的圆柱形或层状结构，在相分离层上形成刻印抗蚀剂层，使压印抗蚀剂层压印以在压印抗蚀剂层上形成不均匀图案，该不均匀图案包括 在与第一方向相交的第二方向上延伸的突起和凹部，从压印抗蚀剂层选择性地去除凹部，从而仅留下突起，并且同时从相分离层选择性地去除PS 获得含有PEO的蚀刻电阻图案，并且使用不仅突起而且还具有抗蚀刻性，作为掩模来蚀刻基板 ve模式。
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42.发明申请METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM AND MAGNETIC RECORDING MEDIUM 失效制造磁记录介质和磁记录介质的方法公开(公告)号：US20120009439A1
公开(公告)日：2012-01-12
申请号：US13236726
申请日：2011-09-20
IPC分类号： G11B5/74
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming protruded magnetic patterns on a substrate, depositing a nonmagnetic material in recesses between the magnetic patterns and on the magnetic patterns, and etching back the nonmagnetic material using an oxygen-containing etching gas while reforming a surface of the nonmagnetic material.
摘要翻译： 根据一个实施例，一种制造磁记录介质的方法包括在基片上形成突出的磁图案，在非磁性材料之间的磁性图案之间的凹槽中和非磁性材料上沉积非磁性材料，并使用含氧蚀刻 气体同时重整非磁性材料的表面。
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公开(公告)号：US08049993B2
公开(公告)日：2011-11-01
申请号：US12076004
申请日：2008-03-12
摘要： A magnetic recording medium includes: a substrate; a recording layer that is formed on the substrate to have a grooved pattern; and a protection layer formed on the recording layer to fill in the grooved pattern, wherein the recording layer is defined to have a servo portion that retains servo data and a recording track portion that retains recording data, and wherein a first film thickness of the protection layer at the servo portion is larger than a second film thickness of the protection layer at the recording track portion by a thickness that is in a range from 1 nm to 10 nm.
摘要翻译： 磁记录介质包括：基板; 在所述基板上形成有凹槽图案的记录层; 以及形成在所述记录层上以填充所述带槽图案的保护层，其中所述记录层被限定为具有保持伺服数据的伺服部分和保留记录数据的记录轨道部分，并且其中所述保护层的第一膜厚度 伺服部分的层位于记录磁道部分处的保护层的第二膜厚度大于1nm至10nm范围内的厚度。
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44.发明授权Method of manufacturing discrete track recording medium and discrete track recording medium 失效离散轨道记录介质和离散轨道记录介质的制造方法公开(公告)号：US07927467B2
公开(公告)日：2011-04-19
申请号：US12400446
申请日：2009-03-09
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a discrete track recording medium includes forming protruded magnetic patterns on a substrate, and repeating processes of depositing a nonmagnetic material so as to be filled in recesses between the magnetic patterns and etching back the nonmagnetic material two or more times with rotating the substrate in a plane thereof by an angle less than one revolution.
摘要翻译： 根据一个实施例，制造离散轨道记录介质的方法包括在基板上形成突出的磁图案，并且重复沉积非磁性材料以便填充在磁性图案之间的凹部中并且蚀刻非磁性材料2或 更多次，使基板在其平面内以小于一转的角度旋转。
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公开(公告)号：US07898768B2
公开(公告)日：2011-03-01
申请号：US11724328
申请日：2007-03-15
IPC分类号： G11B5/82
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/59655 , G11B5/743 , G11B5/855
摘要： A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要翻译： 图案化介质具有基板，并且在基板上的磁记录层包括突出的磁图案和填充在突出磁图案之间的非磁性材料。 在图案化介质中，深度Db和深度Da被定义为Db是从磁图案的表面到填充在彼此相邻的磁图案之间的第一中心部分的非磁性材料的表面的深度 交叉轨道方向或向下轨道方向，并且Da是从磁图案的表面到填充在由磁图案包围的部分中的第二中心部分中的非磁性材料的表面的深度，具有如下关系： 深度Da大于深度Db。
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46.发明申请公开(公告)号：US20110000880A1
公开(公告)日：2011-01-06
申请号：US12882113
申请日：2010-09-14
IPC分类号： B29C59/02
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成抗蚀剂，将压模压印到抗蚀剂上以转印突起和凹陷的图案，以及在不覆盖图案的区域中部分蚀刻磁记录层 通过使用He和N2的混合气体的离子束蚀刻用作掩模的抗蚀剂以及修改磁记录层的剩余部分留下厚度减小的非磁性层。
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47.发明申请公开(公告)号：US20100247974A1
公开(公告)日：2010-09-30
申请号：US12801299
申请日：2010-06-02
申请人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
发明人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
IPC分类号： G11B5/706
摘要： It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
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48.发明申请Method for manufacturing glass stamper, glass stamper, and method for manufacturing magnetic recording medium 审中-公开制造玻璃压模，玻璃压模的方法以及制造磁记录介质的方法公开(公告)号：US20100237040A1
公开(公告)日：2010-09-23
申请号：US12659818
申请日：2010-03-22
申请人： Yoshiyuki Kamata , Akira Kikitsu
发明人： Yoshiyuki Kamata , Akira Kikitsu
CPC分类号： G11B3/70 , B82Y10/00 , C03B11/082 , G11B5/743 , G11B5/746 , G11B5/82 , G11B5/855 , G11B5/865
摘要： A method for manufacturing a glass stamper includes the following steps. First, a diamond film is formed on a substrate. A resist is applied onto the diamond film and a pattern is formed by performing electron beam lithography and development. The diamond film is etched with any one of oxygen and Ar gas using the pattern on the resist as a mask, thereby transferring the pattern to the diamond film. The resist and the substrate are removed to fabricate a diamond mold. Then, a glass stamper is manufactured by glass molding using the diamond mold.
摘要翻译： 一种制造玻璃压模的方法包括以下步骤。 首先，在基板上形成金刚石膜。 将抗蚀剂施加到金刚石膜上，并通过进行电子束光刻和显影形成图案。 使用抗蚀剂上的图案作为掩模，用氧气和Ar气体中的任何一种蚀刻金刚石膜，从而将图案转移到金刚石膜。 去除抗蚀剂和基材以制造金刚石模具。 然后，使用金刚石模具通过玻璃成型制造玻璃压模。
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公开(公告)号：US20100166415A1
公开(公告)日：2010-07-01
申请号：US12653568
申请日：2009-12-16
申请人： Yoshiyuki Kamata
发明人： Yoshiyuki Kamata
CPC分类号： H04N5/2254 , G03B11/043
摘要： A lens barrier device includes: a plurality of barrier blades disposed in an oscillatible manner in front of an imaging lens positioned in closest proximity to a subject side in an imaging optical system; and an oscillating mechanism that allows the plurality of barrier blades to oscillate so as to form a fully closed state in which an optical path of the imaging optical system is fully closed and a fully opened state in which the optical path is fully opened by the barrier blades. The oscillating mechanism includes a drive ring that is provided in an inversely rotatable manner within a predetermined angular range about an optical axis of the imaging optical system and allows the plurality of barrier blades to oscillate back and forth to form the fully closed state and the fully opened state by rotating forward and backward.
摘要翻译： 透镜屏障装置包括：以成像光学系统位于最靠近被摄体侧的成像透镜的前方摆动地配置的多个屏障片; 以及振荡机构，其允许所述多个屏障叶片振荡以形成完全关闭状态，其中所述成像光学系统的光路完全关闭，并且所述光路被所述屏障完全打开的完全打开状态 刀片。 振荡机构包括驱动环，该驱动环以相对可旋转的方式设置在围绕成像光学系统的光轴的预定角度范围内，并允许多个屏障叶片来回摆动以形成完全关闭状态 通过向前和向后旋转打开状态。
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公开(公告)号：US07740767B2
公开(公告)日：2010-06-22
申请号：US11472525
申请日：2006-06-22
IPC分类号： B44C1/22 , B05D5/12 , B05D1/32 , B05D1/02 , H01L21/306
摘要： According to one embodiment, a method for manufacturing a patterned media includes forming patterns of a magnetic layer having protrusions and recesses corresponding to tracks, servo zones or data zones on a substrate having a center hole, and spraying gas flow produced by diffusing a liquid gas toward the center hole of the substrate before or after forming the patterns of the magnetic layer.
摘要翻译： 根据一个实施例，一种用于制造图案化介质的方法包括形成具有与具有中心孔的基板上的轨道，伺服区或数据区对应的突起和凹部的磁性层的图案，并且喷射通过扩散液体气体而产生的气流 在形成磁性层的图案之前或之后朝向基板的中心孔。
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