公开(公告)号：US20070230722A1

公开(公告)日：2007-10-04

申请号：US11651024

申请日：2007-01-09

申请人： Mitsuyoshi Mori ,  Daisuke Ueda

发明人： Mitsuyoshi Mori ,  Daisuke Ueda

IPC分类号： H04R25/00

CPC分类号： H04R19/016 ,  H01G7/021

摘要： An electret condenser microphone (ECM) forms an air-gap capacitor structure in which an upper electrode and a lower electrode are opposed to each other with its hollow portion interposed therebetween, and an electret film made of a charge retention material is formed between the electrodes. The ECM is formed continuously with a semiconductor substrate, and the electret film is made of an amorphous perfluoropolymeric resin. The electret film made of such a material can be formed on the substrate by spin coating. This facilitates reducing the thickness of the electret film. In addition, the film can be easily etched by a fluorine based gas used in a semiconductor process. This permits fine patterning, resulting in the reduced area of a condenser.

摘要翻译： 驻极体电容式麦克风（ECM）形成气隙电容器结构，其中上电极和下电极彼此相对并且其中空部分彼此相对，并且在电极之间形成由电荷保持材料制成的驻极体膜 。 ECM与半导体衬底连续形成，驻极体膜由无定形全氟聚合物树脂制成。 由这种材料制成的驻极体膜可以通过旋涂形成在基板上。 这有助于减小驻极体膜的厚度。 此外，可以通过半导体工艺中使用的氟基气体容易地蚀刻该膜。 这允许精细图案化，导致冷凝器的面积减小。