公开(公告)号：US5520744A

公开(公告)日：1996-05-28

申请号：US245241

申请日：1994-05-17

申请人： Kazonori Fujikawa ,  Masato Tanaka ,  Yusuke Muraoka

发明人： Kazonori Fujikawa ,  Masato Tanaka ,  Yusuke Muraoka

IPC分类号： B08B3/10 ,  B08B3/04 ,  F26B5/04 ,  H01L21/00 ,  H01L21/304 ,  H01L21/306 ,  B08B15/00

CPC分类号： H01L21/02052 ,  H01L21/67028 ,  Y10S134/902

摘要： Deionized water is supplied into a rinsing bath from its bottom portion and overflows from the upper portion of the rinsing bath to form an upflow of deionized water in the rinsing bath. A substrate is rinsed by being immersed in the upflow of deionized water. After rinsing, the substrate is removed from deionized water, and at this tim the surroundings of the substrate are supplied with vapor of an organic solvent soluble in water which serves to lower surface tension of deionized water to the substrate. Thereafter, the substrate is dried in a sealed chamber that is evacuated and the surroundings of the substrate are reduced in pressure. As a result, during drying the substrate surface after rinsing same with deionized water, it is possible to reduce adhesion of particles to the substrate surface, and to dry the substrate surface rapidly without heating the substrate.

摘要翻译： 去离子水从其底部供应到漂洗浴中，并从漂洗浴的上部溢出，以在冲洗浴中形成去离子水的向上流。 通过浸入去离子水的向上流中冲洗基底。 漂洗后，从去离子水中除去基材，此时基材的周围环境可供应可溶于水的有机溶剂的蒸气，用于降低去离子水对基材的表面张力。 此后，将衬底在被抽空的密封室中干燥，并且衬底的周围压力降低。 结果，在用去离子水冲洗基板表面之后，可以减少颗粒对基板表面的粘附，并且能够快速干燥基板表面而不加热基板。

公开(公告)号：US5251011A

公开(公告)日：1993-10-05

申请号：US927872

申请日：1992-08-10

申请人： Nariaki Fujiwara ,  Tokaji Shibahara

发明人： Nariaki Fujiwara ,  Tokaji Shibahara

IPC分类号： G02B7/32 ,  G02B7/34 ,  G01B11/14

CPC分类号： G02B7/34 ,  G02B7/32

摘要： Light emitted from a light source (1) reaches a sample surface (2) via an objective lens (6). An edge (7a) of a louver (7) is located at a a position which is conjugate with a predetermined reference position across the objective lens. When the sample surface is displaced from the reference position, light reflected from the sample surface impinges upon the louver is reflected therefrom and is then detected by a photo-sensor (8). When the surface coincides with the reference position, the light does not reach the photo-sensor. Thus, a displacement of the sample surface from the reference point can be detected by monitoring output signals from the photo-sensor.

摘要翻译： 从光源（1）发射的光通过物镜（6）到达样品表面（2）。 百叶窗（7）的边缘（7a）位于与物镜横跨预定基准位置共轭的位置。 当样品表面从参考位置移位时，从样品表面反射的光照射在百叶窗上的光被反射，然后由光电传感器（8）检测。 当表面与基准位置重合时，光不会到达光电传感器。 因此，可以通过监视来自光电传感器的输出信号来检测样品表面与参考点的位移。

公开(公告)号：US4679071A

公开(公告)日：1987-07-07

申请号：US919254

申请日：1986-10-15

申请人： Osamu Kitagawa

发明人： Osamu Kitagawa

IPC分类号： B41F33/00 ,  G03F9/00 ,  H04N1/50 ,  H04N1/46

CPC分类号： B41F33/0081 ,  G03F9/00 ,  H04N1/504

摘要： A method of recording register marks by a color scanner for the respective color separation pictures, wherein the register marks are produced by positive and negative linear pictures, or alternatively, by positive linear picture having omitted portions, thereby performing the registering work in an exact and efficient manner.

摘要翻译： 一种通过用于各色分离图像的彩色扫描器记录对准标记的方法，其中，所述对准标记由正线性图像和负线性图像产生，或者替代地，通过具有省略部分的正线性图像进行，从而以精确和 有效的方式。

公开(公告)号：US4626902A

公开(公告)日：1986-12-02

申请号：US602468

申请日：1984-04-20

申请人： Mitsuhiko Yamada

发明人： Mitsuhiko Yamada

IPC分类号： H04N1/387 ,  H04N1/405 ,  H04N1/41 ,  H04N1/46 ,  H04N1/40

CPC分类号： H04N1/4055

摘要： To improve the quality of border pixels located between pictorial components, between a pictorial component and a rule component or between a pictorial component and a screen tint component in an image reproduction system, each border pixel is recorded using image data contained in selected pixels that surround the border pixel being reproduced. Which ones of the surrounding pixels are selected are determined by a digital word associated with the border pixel.

摘要翻译： 为了提高图像部件之间，图形部件和规则部件之间或图像再现系统中的图形部件和屏幕色调分量之间的边界像素的质量，使用包围在围绕着所选择的像素的图像数据来记录每个边界像素 边框像素被再现。 选择周围像素中的哪一个由与边界像素相关联的数字字来确定。

公开(公告)号：US4496956A

公开(公告)日：1985-01-29

申请号：US399526

申请日：1982-07-19

申请人： Ikuo Mitsuka

发明人： Ikuo Mitsuka

IPC分类号： G01D9/42

CPC分类号： G01D9/42

摘要： An aperture mask for use in the recording section of an image scanning and recording system is disclosed. The aperture mask defines a pair of apertures, preferably of identical size and shape, in alignment with the optical path of a light beam for exposing a recording material, and the pair of apertures being arranged in spaced apart relation at a predetermined distance.

摘要翻译： 公开了一种用于图像扫描和记录系统的记录部分中的孔径掩模。 孔径掩模限定一对孔，其优选地具有与用于曝光记录材料的光束的光路对准的大小和形状相同的孔，并且一对孔以预定距离间隔设置。

公开(公告)号：US4476601A

公开(公告)日：1984-10-16

申请号：US463423

申请日：1983-02-03

申请人： Masahiko Oka

发明人： Masahiko Oka

IPC分类号： B08B1/00 ,  B08B1/02 ,  B08B1/04 ,  B08B3/02 ,  B08B11/00 ,  H01L21/00 ,  H01L21/304 ,  A46B13/02

CPC分类号： H01L21/67046 ,  B08B1/007 ,  B08B1/04 ,  B08B11/00 ,  B08B3/02

摘要： A washing apparatus constructed for using a plurality of types of brushes, in a manner such that a brush is supported on an end of a swing lever, and with an object to be washed being washed by rotating the brush in contact with said object. The washing apparatus is characterized so that when a hard brush is used the swing lever is fixed. However when a soft brush is used the brush is constrained by applying to said lever a load which is balanced by, or is a little less than the weight of said brush.

摘要翻译： 一种洗涤装置，其构造为使用多种类型的刷子，以使得刷子支撑在摆动杆的端部上，并且通过旋转与所述物体接触的刷子来清洗被清洗物品。 洗涤装置的特征在于，当使用硬刷时，摆动杆被固定。 然而，当使用软刷时，通过向所述杠杆施加平衡于或稍小于所述刷的重量的载荷来限制刷子。