Condenser microphone
    51.
    发明申请
    Condenser microphone 审中-公开
    冷凝器麦克风

    公开(公告)号:US20070230722A1

    公开(公告)日:2007-10-04

    申请号:US11651024

    申请日:2007-01-09

    IPC分类号: H04R25/00

    CPC分类号: H04R19/016 H01G7/021

    摘要: An electret condenser microphone (ECM) forms an air-gap capacitor structure in which an upper electrode and a lower electrode are opposed to each other with its hollow portion interposed therebetween, and an electret film made of a charge retention material is formed between the electrodes. The ECM is formed continuously with a semiconductor substrate, and the electret film is made of an amorphous perfluoropolymeric resin. The electret film made of such a material can be formed on the substrate by spin coating. This facilitates reducing the thickness of the electret film. In addition, the film can be easily etched by a fluorine based gas used in a semiconductor process. This permits fine patterning, resulting in the reduced area of a condenser.

    摘要翻译: 驻极体电容式麦克风(ECM)形成气隙电容器结构,其中上电极和下电极彼此相对并且其中空部分彼此相对,并且在电极之间形成由电荷保持材料制成的驻极体膜 。 ECM与半导体衬底连续形成,驻极体膜由无定形全氟聚合物树脂制成。 由这种材料制成的驻极体膜可以通过旋涂形成在基板上。 这有助于减小驻极体膜的厚度。 此外,可以通过半导体工艺中使用的氟基气体容易地蚀刻该膜。 这允许精细图案化,导致冷凝器的面积减小。