Abstract:
A method and system for reduction or mitigation of metal contamination of polycrystalline silicon are disclosed. A conveyance device comprising a flexible synthetic resin tube having an inner surface at least partially coated with an inner layer comprising elastomeric microcellular polyurethane is disclosed for use in fluidized bed reactor operations associated with manufacture and product handling procedures for ultra pure granular polysilicon. Use of the conduit to effect passage of the polysilicon mitigates foreign metal contact contamination from sources otherwise typically present in such manufacturing units.
Abstract:
Embodiments of a reaction chamber liner for use in a heated silicon deposition reactor are disclosed. The liner has an upper portion, a mid portion comprising a material other than a stainless steel alloy, and a lower portion comprising a martensitic stainless steel alloy. The liner's upper portion may have a composition substantially similar to the lower portion.