公开(公告)号：US20070170361A1

公开(公告)日：2007-07-26

申请号：US11616660

申请日：2006-12-27

申请人： Hiroto Honda ,  Ikuo Fujiwara ,  Masahiro Kuwata ,  Kei Masunishi

发明人： Hiroto Honda ,  Ikuo Fujiwara ,  Masahiro Kuwata ,  Kei Masunishi

IPC分类号： G01J5/00

CPC分类号： G01J5/10 ,  G01J5/02 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/20 ,  G01J5/24 ,  H01L2924/0002 ,  H01L2924/00

摘要： An infrared ray detection device has a detection cell which has a thermoelectric converting part and an infrared ray absorption layer formed via a space on a semiconductor substrate, a first wiring part formed on the semiconductor substrate, and a supporting part, the detection cell being formed via the space on the semiconductor substrate and supports the detection cell. The supporting part includes a plurality of supporting legs which have a second wiring part electrically connecting the first wiring part to the detection cell and an insulating part covering a surrounding are of the second wiring part, and at least one connection part made of an insulating material connecting the plurality of supporting legs to each other.

摘要翻译： 一种红外线检测装置具有检测单元，其具有通过半导体基板上的空间形成的热电转换部和红外线吸收层，形成在半导体基板上的第一布线部和支撑部，形成检测单元 通过半导体衬底上的空间并支持检测单元。 支撑部分包括多个支撑腿，其具有将第一布线部分与检测单元电连接的第二布线部分和覆盖第二布线部分的周围的绝缘部分，以及由绝缘材料制成的至少一个连接部 将多个支撑腿彼此连接。