公开(公告)号：US09966493B2

公开(公告)日：2018-05-08

申请号：US13553290

申请日：2012-07-19

申请人： Hartmut Rudmann ,  Markus Rossi

发明人： Hartmut Rudmann ,  Markus Rossi

IPC分类号： H01L31/16 ,  G02B13/00 ,  H01L27/146 ,  G02B3/00 ,  G01J1/02 ,  G01J5/04 ,  G01J5/02 ,  G01J5/08 ,  G01J5/20 ,  G01J5/00 ,  G01J1/42 ,  H01L31/0232 ,  H01L25/16 ,  B29D11/00 ,  G01J1/06 ,  H01L31/167 ,  G01J1/04

CPC分类号： H01L31/16 ,  B29D11/00298 ,  B29D11/00307 ,  G01J1/0209 ,  G01J1/0233 ,  G01J1/0271 ,  G01J1/0411 ,  G01J1/06 ,  G01J1/42 ,  G01J5/00 ,  G01J5/022 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/0265 ,  G01J5/045 ,  G01J5/0806 ,  G01J5/20 ,  G01J2001/061 ,  G02B3/0031 ,  G02B3/0056 ,  G02B13/0085 ,  H01L25/167 ,  H01L27/14618 ,  H01L27/14625 ,  H01L27/14627 ,  H01L27/14687 ,  H01L31/02325 ,  H01L31/167 ,  H01L2924/0002 ,  Y10T29/49002 ,  H01L2924/00

摘要： Manufacturing opto-electronic modules (1) includes providing a substrate wafer (PW) on which detecting members (D) are arranged; providing a spacer wafer (SW); providing an optics wafer (OW), the optics wafer comprising transparent portions (t) transparent for light generally detectable by the detecting members and at least one blocking portion (b) for substantially attenuating or blocking incident light generally detectable by the detecting members; and preparing a wafer stack (2) in which the spacer wafer (SW) is arranged between the substrate wafer (PW) and the optics wafer (OW) such that the detecting members (D) are arranged between the substrate wafer and the optics wafer. Emission members (E) for emitting light generally detectable by the detecting members (D) can be arranged on the substrate wafer (PW). Single modules (1) can be obtained by separating the wafer stack (2) into separate modules.

公开(公告)号：US20180011232A1

公开(公告)日：2018-01-11

申请号：US15633863

申请日：2017-06-27

申请人： HAMAMATSU PHOTONICS K.K.

发明人： Toshimitsu KAWAI ,  Katsumi SHIBAYAMA ,  Takashi KASAHARA ,  Masaki HIROSE ,  Hiroki OYAMA ,  Yumi TERAMACHI

IPC分类号： G02B5/28 ,  G01J1/04

CPC分类号： G02B5/285 ,  G01J1/0488 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/041 ,  G01J5/045 ,  G01J5/06 ,  G01J5/0862 ,  G02B5/288 ,  G02B26/001

摘要： A Fabry-Perot interference filter includes: a substrate having a first surface and a second surface facing each other; a first layer structure disposed on the first surface; and a second layer structure disposed on the second surface, wherein the first layer structure is provided with a first mirror portion and a second mirror portion facing each other with an air gap therebetween, and a distance between the first mirror portion and the second mirror portion is varied, and the second layer structure is formed with a separation region separating at least a part of the second layer structure into one side and another side in a direction along the second surface.

公开(公告)号：US20170299438A1

公开(公告)日：2017-10-19

申请号：US15399514

申请日：2017-01-05

申请人： Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung e.V.

发明人： Dirk WEILER ,  Kai-Marcel MUCKENSTURM ,  Frank HOCHSCHULZ

IPC分类号： G01J5/02 ,  G01J5/20 ,  G01J5/08 ,  G01J5/04 ,  G01J5/34

CPC分类号： G01J5/0235 ,  G01J5/0225 ,  G01J5/023 ,  G01J5/024 ,  G01J5/046 ,  G01J5/0809 ,  G01J5/20 ,  G01J5/28 ,  G01J5/34

摘要： A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.

公开(公告)号：US20170191874A1

公开(公告)日：2017-07-06

申请号：US15352196

申请日：2016-11-15

申请人： ROHM CO., LTD.

发明人： Tatsuya SUZUKI ,  Yoshikazu FUJIMORI

IPC分类号： G01J5/02 ,  C23C14/08 ,  C23C14/34 ,  C23C14/18

CPC分类号： G01J5/0235 ,  C23C14/081 ,  C23C14/083 ,  C23C14/185 ,  C23C14/34 ,  G01J5/024 ,  G01J5/34

摘要： A resist mask 40, having penetrating holes 41, is formed on a rear surface of a silicon substrate 2. A planar shape of each penetrating hole 41 is formed to a shape with which its respective sides are curved to inwardly convex arcuate shapes with respect to a regular quadrilateral that is a target shape of a transverse section at a processing ending end side of a corresponding cavity 3. Next, dry etching is applied to the silicon substrate 2. The cavities 3 are thereby formed in the silicon substrate 2. As the etching progresses, a transverse sectional shape of each cavity 3 decreases in inward projection amounts of the respective arcuate shaped sides in the transverse sectional shape of the corresponding penetrating hole 41 of the resist mask 40. At a processing ending end side of the cavity 3, its planar shape is substantially the same shape as the regular quadrilateral that is the target shape.

公开(公告)号：US09040912B2

公开(公告)日：2015-05-26

申请号：US13095441

申请日：2011-04-27

申请人： Hidetoshi Kabasawa ,  Minoru Wakabayashi

发明人： Hidetoshi Kabasawa ,  Minoru Wakabayashi

IPC分类号： G01J5/00 ,  H01L37/02 ,  G01J5/02 ,  G01J5/04 ,  G01J5/34

CPC分类号： H01L37/025 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/046 ,  G01J5/34

摘要： An infrared sensing element is provided and includes a substrate, a supporting electrical insulating layer formed on the substrate; a first electrode formed on the supporting electrical insulating layer, a pyroelectric layer formed on the first electrode, and a second electrode formed on the pyroelectric layer. The pyroelectric layer has a light receiving area of 1×102 to 1×104 μm2, has a thickness of 0.8 to 10 μm, and contains therein a compound expressed as Pb(ZrxTi1-x)O3, where 0.57

摘要翻译： 提供一种红外感测元件，包括：基板，形成在基板上的支撑电绝缘层; 形成在支撑电绝缘层上的第一电极，形成在第一电极上的热电层和形成在热电层上的第二电极。 热电层的光接收面积为1×102〜1×104μm2，厚度为0.8〜10μm，其中含有表示为Pb（Zr x Ti 1-x）O 3的化合物，其中0.57

公开(公告)号：US07741604B2

公开(公告)日：2010-06-22

申请号：US12056569

申请日：2008-03-27

申请人： Naoki Oda ,  Susumu Komiyama ,  Iwao Hosako

发明人： Naoki Oda ,  Susumu Komiyama ,  Iwao Hosako

IPC分类号： G01J5/00

CPC分类号： G01J5/02 ,  G01J5/0215 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/046 ,  G01J5/08 ,  G01J5/0809 ,  G01J5/0815 ,  G01J5/0837 ,  G01J5/20

摘要： In a micro-bridge structure in which a temperature detecting portion 14 (diaphragm) including a bolometer thin film 7 is supported by a supporting portion 13 in a state floated from a circuit substrate 2, a reflective film 3 reflecting a THz wave is formed on the circuit substrate 2, an absorbing film 11 absorbing the THz wave is formed on the temperature detecting portion 14, and an optical resonance structure is formed by the reflective film 3 and the temperature detecting portion 14. And a gap between the reflective film 3 and the temperature detecting portion 14 is set approximately ¼ of a wavelength of an infrared ray on the basis of the wavelength of the infrared ray (in a range of approximately 1.5 to 2.5 μm, for example), and a sheet resistance of the temperature detecting portion 14 is set in a range in which an absorptance of the THz wave becomes a predetermined value or above on the basis of the THz wave (in a range of approximately 10 to 100 Ω/sq.). By this arrangement, the absorptance of the THz wave is drastically improved while using the structure and manufacturing technique of a bolometer-type infrared detector.

摘要翻译： 在从电路基板2浮起的状态下，由支撑部13支撑包括测辐射热计薄膜7的温度检测部14（隔膜）的微桥结构中，形成反射太赫兹波的反射膜3， 电路基板2，吸收THz波的吸收膜11形成在温度检测部分14上，并且由反射膜3和温度检测部分14形成光学共振结构。反射膜3和 基于红外线的波长（例如约1.5〜2.5μm的范围），将温度检测部14设定为红外线的波长的近似1/4，并且温度检测部14的薄层电阻 14设定在THz波的吸收率基于THz波（约10〜100Ω·平方）的范围内成为规定值以上的范围。 通过这种布置，在使用测辐射热计型红外探测器的结构和制造技术的同时，太赫兹波的吸收率得到显着提高。

公开(公告)号：US5929441A

公开(公告)日：1999-07-27

申请号：US883736

申请日：1997-06-27

申请人： Howard R. Beratan ,  Chih-Chen Cho

发明人： Howard R. Beratan ,  Chih-Chen Cho

IPC分类号： G01J5/08 ,  G01J5/10 ,  G01J5/22

CPC分类号： G01J5/10 ,  G01J5/023 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/08 ,  G01J5/0853 ,  G01J5/046

摘要： A thermal detector having an optical coating comprising a porous film 64. The porous film preferably comprises a xerogel or aerogel and is greater than 80% porous. An optional optical impedance matching layer 66 may be deposited over the porous film 64. Advantages include decreased thickness of the thermal sensor, improved acuity of the image produced by the system, lower manufacturing temperatures, and the ability to use electrodes that are opaque to infrared energy.

摘要翻译： 具有包括多孔膜64的光学涂层的热检测器。多孔膜优选包含干凝胶或气凝胶，并且大于80％多孔。 可选的光阻抗匹配层66可以沉积在多孔膜64上。优点包括减小热传感器的厚度，改善系统产生的图像的锐度，降低制造温度，以及使用对红外线不透明的电极的能力 能源。

公开(公告)号：US5920418A

公开(公告)日：1999-07-06

申请号：US492894

申请日：1995-06-20

申请人： Teruhiro Shiono ,  Michihito Ueda ,  Tatsuo Ito ,  Kazuo Yokoyama ,  Shinichi Mizuguchi

发明人： Teruhiro Shiono ,  Michihito Ueda ,  Tatsuo Ito ,  Kazuo Yokoyama ,  Shinichi Mizuguchi

IPC分类号： G03B9/36 ,  G01J5/08 ,  G02B5/18 ,  G02B26/08 ,  G03B9/18 ,  H04N5/74 ,  G02F1/13

CPC分类号： G01J5/02 ,  G01J5/0205 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/04 ,  G01J5/045 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0831 ,  G01J5/084 ,  G01J5/0893 ,  G02B26/0808 ,  G02B5/1828 ,  G03B9/18 ,  H04N5/7416

摘要： The diffractive optical modulator of the invention includes: a plate having a portion functioning as a first electrode; a spacer layer formed on the plate; and a grating consisting of a plurality of beams having a portion functioning as a second electrode, both ends of the beams being supported on the spacer layer. In the diffractive optical modulator, by adjusting a voltage applied between the first electrode and the second electrode, a distance between the beams and the plate is varied, thereby controlling the diffraction efficiency. An insulating layer is further provided between the plate and the plurality of beams.

公开(公告)号：US20190051787A1

公开(公告)日：2019-02-14

申请号：US16052279

申请日：2018-08-01

申请人： COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES

发明人： Patrick Leduc

IPC分类号： H01L31/113 ,  H01L31/18 ,  H01L27/146

CPC分类号： H01L31/1136 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/045 ,  H01L21/00 ,  H01L27/1467 ,  H01L31/1868 ,  H01L31/1892

摘要： A method for manufacturing a device (1) for detecting electromagnetic radiation. The method comprises the steps of: supplying a first substrate (400) comprising a reading circuit (340), at least two first contact plugs (343, 344) and at least one first annular bonding element (345) surrounding the first contact plugs (343, 344); supplying a second substrate comprising a cap (210), an annular side wall forming with the cap (210) a cavity filled with a sacrificial material and a detection structure (100) housed in the cavity. The method further comprising the steps of bonding the second substrate (200) on the first substrate (400); arranging at least one opening (212) in the second substrate (200); selective elimination of the sacrificial material; and closing the opening (212) under at least a primary vacuum.

公开(公告)号：US09761740B2

公开(公告)日：2017-09-12

申请号：US14384318

申请日：2012-03-23

申请人： Wolfgang Reinert

发明人： Wolfgang Reinert

IPC分类号： G01J5/08 ,  H01L31/0216 ,  G01J5/04 ,  G01J5/02 ,  G01J5/20 ,  G02B1/115 ,  H01L31/18

CPC分类号： H01L31/02165 ,  G01J5/0215 ,  G01J5/0235 ,  G01J5/024 ,  G01J5/045 ,  G01J5/046 ,  G01J5/0803 ,  G01J5/0806 ,  G01J5/0862 ,  G01J5/0875 ,  G01J5/20 ,  G02B1/115 ,  H01L31/18 ,  H01L2924/16235

摘要： The invention refers to an electromagnetic radiation sensor micro device for detecting electromagnetic radiation, which device comprises a substrate and a cover at least in part consisting of an electromagnetic radiation transparent material, and comprising a reflection reducing coating and providing a hermetic sealed cavity and an electromagnetic radiation detecting unit arranged within the cavity. The reflection reducing coating is arranged in form of a multi-layer thin film stack, which comprises a first layer and a second layer arranged one upon the other. The first layer has a first refractive index and the second layer has a second refractive index different from the one of said first layer. First and second layer are of such layer thickness that for a certain wavelength there is destructive interference. The invention also refers to a wafer element as well as method for manufacturing such a device.