公开(公告)号：US20200325888A1

公开(公告)日：2020-10-15

申请号：US16847521

申请日：2020-04-13

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Lorenzo BALDO ,  Enri DUQI

IPC: F04B43/04 ,  H01L41/09 ,  H01L41/047 ,  H01L27/20 ,  H01L41/31

Abstract: A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.

公开(公告)号：US20190350260A1

公开(公告)日：2019-11-21

申请号：US16408362

申请日：2019-05-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Oriana Rita Antonia DI MARCO ,  Domenico GIUSTI

IPC: A24F47/00 ,  A61M15/06 ,  H05B3/42

Abstract: A microfluidic dispenser device of inhalable substances includes a casing, housed in which are a driving circuit and a microfluidic cartridge having a tank that contains a liquid to be delivered. The microfluidic cartridge is provided with at least one nebulizer controlled by the driving device. The nebulizer includes: a substrate; a plurality of chambers formed on the substrate and fluidically coupled to the tank for receiving the liquid to be delivered; and a plurality of heaters, which are formed on the substrate in positions corresponding to respective chambers, are thermally coupled to the respective chambers and are separated from the respective chambers by an insulating layer, and are controlled by the driving device. Each chamber is fluidically connected with the outside by at least one respective nozzle.

公开(公告)号：US20190240844A1

公开(公告)日：2019-08-08

申请号：US16265650

申请日：2019-02-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Lorenzo TENTORI

IPC: B25J15/00 ,  B25J9/12

CPC classification number: B25J15/00 ,  B25J7/00 ,  B25J9/0015 ,  B25J9/12 ,  B25J15/08

Abstract: A MEMS manipulation device has first and second manipulation arms carrying respective mutually facing gripping elements. At least the first manipulation arm is formed by a driving arm and by an articulated arm hinged together through an articulation structure. The first driving arm includes a first beam element and a first piezoelectric region on the first beam element. The first articulation structure includes a first connecting element not deformable in the thickness direction, as well as a first hinge structure interposed between the first driving arm, the first articulated arm, and the first connecting element.

公开(公告)号：US20190023014A1

公开(公告)日：2019-01-24

申请号：US16030630

申请日：2018-07-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Mauro CATTANEO ,  Carlo Luigi PRELINI

IPC: B41J2/14 ,  B41J2/16

CPC classification number: B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1642 ,  B41J2002/1437

Abstract: The microfluidic device has a plurality of ejector elements. Each ejector element includes a first region, accommodating a first fluid flow channel and an actuator chamber; a second region, accommodating a fluid containment chamber; and a third region, accommodating a second fluid flow channel. The fluid containment chamber is fluidically coupled to the first and to the second fluid flow channels. The second region is formed from a membrane layer, from a membrane definition layer, mechanically coupled to the membrane layer and having a membrane definition opening, and a fluid chamber defining body, mechanically coupled to the membrane definition layer and having a chamber defining opening, with a width greater than the width of the membrane definition opening. The width of the membrane is thus defined by the width of the chamber defining opening.

公开(公告)号：US20180141074A1

公开(公告)日：2018-05-24

申请号：US15601623

申请日：2017-05-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Domenico GIUSTI ,  Andrea Nicola COLECCHIA ,  Claudio CRIPPA

IPC: B05B17/00 ,  B05B9/00 ,  B05B9/03 ,  B05B1/14

CPC classification number: B05B17/0646 ,  B05B1/14 ,  B05B9/002 ,  B05B9/03 ,  B41J2/1433

Abstract: A microfluidic device provided in a body accommodating a fluid containment chamber. A fluidic access channel and a drop emission channel are formed in the body and are in fluidic connection with the fluid containment chamber to form a fluidic path towards the body outside through a nozzle having an outlet section. An actuator is operatively coupled to the fluid containment chamber and is configured to cause ejection of fluid drops through the drop emission channel in an operating condition of the microfluidic device. The drop emission channel comprises a portion of reduced section having a smaller area than the outlet section of the nozzle.