公开(公告)号：US20150376787A1

公开(公告)日：2015-12-31

申请号：US14643887

申请日：2015-03-10

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth HARIKRISHNA MOHAN

IPC: C23C16/455 ,  B05B15/04 ,  B05B1/14 ,  B05B1/00 ,  B05B1/28

Abstract: Embodiments of the disclosed subject matter provide a device including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, and a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel.

Abstract translation: 所公开的主题的实施例提供了一种装置，其包括喷嘴，待沉积在与喷嘴流体连通的基板上的材料源，与要与喷嘴沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道和与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源。