公开(公告)号：US20050184351A1

公开(公告)日：2005-08-25

申请号：US10779952

申请日：2004-02-13

Applicant: Yee-Chung Fu

Inventor： Yee-Chung Fu

IPC: G02B26/08 ,  G02B26/10 ,  H01L27/14

CPC classification number: G02B26/0841

Abstract: A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.

Abstract translation: 微电子机械系统（MEMS）装置包括具有沟槽的顶表面的反射镜，连接到反射镜的光束，连接到光束的旋转梳齿，以及将光束连接到接合焊盘的一个或多个弹簧。 镜子可以具有用于反射光的底面。 固定梳齿可以与旋转梳齿在平面内或平面外相互交错。 旋转和固定梳齿之间的稳定或振荡电压差可用于振荡或调谐镜子。 梳齿可以具有锥形形状。

公开(公告)号：US06914710B1

公开(公告)日：2005-07-05

申请号：US10032198

申请日：2001-12-20

Applicant: Vlad J. Novotny ,  Yee-Chung Fu

Inventor： Vlad J. Novotny ,  Yee-Chung Fu

IPC: G02B6/32 ,  G02B6/35 ,  G02B26/00 ,  G01C19/00 ,  G02B26/08

CPC classification number: G02B6/359 ,  G02B6/32 ,  G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584

Abstract: A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb electrodes to position optical elements along multiple axes. In one embodiment, an actuator assembly includes an actuator support, typically a silicon wafer, supporting a fixed comb with a plurality of teeth. A frame flexibly connected to the actuator support includes a complementary set of movable comb electrodes, the teeth of which are arranged interdigitally with the teeth of the fixed combs. The frame can be tilted with respect to the actuator support along a first fulcrum axis by applying a potential difference between the fixed and movable combs. Each actuator assembly also includes an actuated member, a mirror mount in one embodiment, flexibly connected to the frame. The actuated member and the frame include electrical isolated, interdigitated, combs. The actuated member can be moved relative to the frame along a second fulcrum axis by applying a potential between these interdigitated combs. A bonding process for fabrication of an array of actuators is described.

Abstract translation: 微机电系统（MEMS）致动器采用静电梳电极来沿着多个轴定位光学元件。 在一个实施例中，致动器组件包括致动器支撑件，通常为硅晶片，其支撑具有多个齿的固定梳齿。 柔性地连接到致动器支撑件的框架包括互补的一组可移动梳状电极，其齿与固定梳齿的齿指叉配置。 通过施加固定和可动梳子之间的电位差，框架可以相对于致动器支撑件沿着第一支点轴线倾斜。 每个致动器组件还包括致动构件，在一个实施例中的反射镜安装件，柔性地连接到框架。 致动构件和框架包括电隔离的叉指梳状物。 致动构件可以通过在这些叉指梳之间施加电位而沿着第二支点轴相对于框架移动。 描述了用于制造致动器阵列的接合工艺。

公开(公告)号：US06751395B1

公开(公告)日：2004-06-15

申请号：US10010786

申请日：2001-11-09

Applicant: Vlad Novotny ,  Yee-Chung Fu ,  Zuo Wang

Inventor： Vlad Novotny ,  Yee-Chung Fu ,  Zuo Wang

IPC: G02B626

CPC classification number: G02B6/353 ,  G02B6/266 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594

Abstract: Variable optical attenuators that use a blade in a gap between two fibers to control the optical attenuation without having coupling optics in the gap, where the blade has at least one blade surface at an angle with respect to an end facet of one fiber.

Abstract translation: 可变光衰减器，其在两个光纤之间的间隙中使用叶片来控制光学衰减，而不在间隙中具有耦合光学器件，其中刀片具有相对于一个光纤的端面具有一角度的至少一个叶片表面。