Absorption current image apparatus in electron microscope
    61.
    发明授权
    Absorption current image apparatus in electron microscope 有权
    吸收电流图像设备在电子显微镜下

    公开(公告)号:US06888138B2

    公开(公告)日:2005-05-03

    申请号:US10868907

    申请日:2004-06-17

    CPC classification number: H01J37/244 H01J37/28 H01J2237/2605

    Abstract: It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.

    Abstract translation: 传统的扫描电镜很难在高速下进行测量,并且当物体与探针和检测器之间存在绝缘体时进行精确的测量,因为传统的扫描电镜使用连续的电子束。 此外,在测量电流期间不可能对样品施加电压。 通过脉冲调制电子束并从样品中提取高频信号分量,本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。 可以实现精确和高速吸收电流测量。 可以提供高功能检查装置。

    ABSORPTION CURRENT IMAGE APPARATUS IN ELECTRON MICROSCOPE
    62.
    发明申请
    ABSORPTION CURRENT IMAGE APPARATUS IN ELECTRON MICROSCOPE 有权
    电子显微镜中的吸收电流图像装置

    公开(公告)号:US20050045820A1

    公开(公告)日:2005-03-03

    申请号:US10868907

    申请日:2004-06-17

    CPC classification number: H01J37/244 H01J37/28 H01J2237/2605

    Abstract: It was hard for conventional SEMs to take measurements at a high speed and take accurate measurements when an insulator exists between an object to probe and the detector, because the conventional SEMs used a continuous electron beam. Also, it was impossible to apply voltage to the sample during the measurement of current. By pulse-modulating the electron beam and extracting a high-frequency signal component from the sample, new SEM equipment disclosed herein detects electrons absorbed in the sample at a high speed and with precision. Precise and high-speed absorption current measurements can be achieved. High-functionality inspection apparatus can be provided.

    Abstract translation: 传统的扫描电镜很难在高速下进行测量,并且当物体与探针和检测器之间存在绝缘体时进行精确的测量,因为传统的扫描电镜使用连续的电子束。 此外,在测量电流期间不可能对样品施加电压。 通过脉冲调制电子束并从样品中提取高频信号分量,本文公开的新的SEM设备以高速和精确的方式检测样品中吸收的电子。 可以实现精确和高速吸收电流测量。 可以提供高功能检查装置。

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