Extreme ultra violet light source apparatus
    61.
    发明申请
    Extreme ultra violet light source apparatus 有权
    极紫外光源设备

    公开(公告)号:US20090261277A1

    公开(公告)日:2009-10-22

    申请号:US12385569

    申请日:2009-04-13

    IPC分类号: G01J3/10

    摘要: In an extreme ultra violet light source apparatus of a laser produced plasma type, charged particles such as ions emitted from plasma are promptly ejected to the outside of a chamber. The extreme ultra violet light source apparatus includes a chamber in which extreme ultra violet light is generated, a target supply unit for supplying a target material to a predetermined position within the chamber, a driver laser for applying a laser beam to the target material supplied by the target supply unit to generate plasma, a collector mirror for collecting the extreme ultra violet light radiated from the plasma to output the extreme ultra violet light, a magnetic field forming unit for forming an asymmetric magnetic field in a generation position of the plasma by using a coil, and a charged particle collection mechanism provided on at least one of two surfaces of the chamber to which lines of magnetic force generated by the coil extend.

    摘要翻译: 在激光产生的等离子体型的极紫外光源装置中,将从等离子体发射的离子等带电粒子迅速地排出到室外。 极紫外光源装置包括产生极紫外光的室,用于将目标材料供应到室内的预定位置的目标供应单元,用于将激光束施加到由 用于产生等离子体的目标供应单元,用于收集从等离子体辐射的极端紫外光以输出极紫外光的集光镜;用于在等离子体的产生位置形成非对称磁场的磁场形成单元,其通过使用 线圈和带电粒子收集机构,设置在腔室的两个表面中的至少一个上,线圈产生的磁力线延伸到该表面。

    Extreme ultra violet light source apparatus
    62.
    发明申请
    Extreme ultra violet light source apparatus 有权
    极紫外光源装置

    公开(公告)号:US20090250641A1

    公开(公告)日:2009-10-08

    申请号:US12385245

    申请日:2009-04-02

    IPC分类号: G01J3/10

    摘要: An extreme ultra violet light source apparatus in which debris moving within a chamber are prevented from reducing reflectance or transmittance of optical elements of an EUV collector mirror, etc, and extreme ultra violet light can stably be generated in a long period. The apparatus includes: a target supply unit for supplying a target to a predetermined position within a chamber; a driver laser for applying a laser beam to the target to generate first plasma; a collector mirror provided within the chamber, for collecting extreme ultra violet light radiated from the first plasma; a gas supply unit for supplying a gas into the chamber; an excitation unit for exciting the gas to generate second plasma around a region where the first plasma is generated; and an exhaust unit for exhausting the chamber and ejecting debris emitted from the first plasma to outside of the chamber.

    摘要翻译: 能够防止在室内移动的碎屑减少EUV收集镜等的光学元件的反射率或透射率的极端紫外线光源装置,能够长时间稳定地产生极紫外光。 该装置包括:目标供给单元,用于将目标供给到室内的预定位置; 用于将激光束施加到所述靶以产生第一等离子体的驱动器激光器; 设置在室内的收集器反射镜,用于收集从第一等离子体辐射的极紫外光; 气体供应单元,用于将气体供应到所述室中; 用于激发气体以在产生第一等离子体的区域周围产生第二等离子体的激励单元; 以及排气单元,用于排出室并将从第一等离子体发射的碎屑喷射到室外。

    DC-offset transient response cancel system
    63.
    发明授权
    DC-offset transient response cancel system 失效
    直流偏移瞬态响应取消系统

    公开(公告)号:US07109778B2

    公开(公告)日:2006-09-19

    申请号:US10973915

    申请日:2004-10-27

    IPC分类号: G01R25/00

    CPC分类号: H04B1/30

    摘要: A high pass filter is disposed to an output part of a gain control amplifier. A gain control signal change detector detects a change of a gain control signal from the gain control amplifier. Upon detection of a change of the gain control signal, a counter and a clock generator generate a cancel pulse which has a certain width, and using the cancel pulse, a first switch cuts an AC signal which is fed to the gain control amplifier. Further, using the same cancel pulse, a second switch reduces the time constant of the high pass filter. Through this operation, a transient response of a DC offset is eliminated.

    摘要翻译: 高通滤波器设置在增益控制放大器的输出部分。 增益控制信号变化检测器检测来自增益控制放大器的增益控制信号的变化。 在检测到增益控制信号的变化时,计数器和时钟发生器产生具有一定宽度的取消脉冲,并且使用取消脉冲,第一开关切断被馈送到增益控制放大器的AC信号。 此外,使用相同的消除脉冲,第二开关减小高通滤波器的时间常数。 通过该操作,消除了DC偏移的瞬态响应。

    DC offset calibration system
    64.
    发明申请
    DC offset calibration system 失效
    直流偏移校准系统

    公开(公告)号:US20060084386A1

    公开(公告)日:2006-04-20

    申请号:US11246258

    申请日:2005-10-11

    IPC分类号: H04B1/00 H04B1/10 H04L25/06

    摘要: A division ratio of a first frequency divider that generates a local signal and a division ratio of a second frequency divider that generates a RF interfering signal are different, and a first frequency synthesizer that generates the local signal and a second frequency synthesizer that generates the RF interfering signal employ an identical reference signal. The second frequency synthesizer that generates the RF interfering signal is not provided with a frequency switching function.

    摘要翻译: 产生本地信号的第一分频器和产生RF干扰信号的第二分频器的分频比的分频比不同,以及产生本地信号的第一频率合成器和产生RF干扰信号的第二频率合成器 干扰信号采用相同的参考信号。 产生RF干扰信号的第二频率合成器不具有频率切换功能。

    Method of preparing CRT funnel glass capable of effectively recycling another glass member
    65.
    发明授权
    Method of preparing CRT funnel glass capable of effectively recycling another glass member 失效
    制备能够有效回收另一玻璃构件的CRT漏斗玻璃的方法

    公开(公告)号:US06865909B2

    公开(公告)日:2005-03-15

    申请号:US10886354

    申请日:2004-07-07

    CPC分类号: H01J29/863 C03C3/105

    摘要: A method for producing CRT funnel glass having a glass composition containing MgO, CaO, SrO, BaO and ZnO as essential components. Further, the total content of MgO, CaO, SrO, BaO and ZnO falls within a range of 5 to 13 mass %. As a glass material of the CRT funnel glass, CRT panel glass or CRT neck glass may be used. The method comprises preparing the glass material so as to contain MgO, CaO, SrO, BaO, and ZnO as essential components and so that the total content of MgO+CaO+SrO+BaO+ZnO falls within a range of 5 to 13 mass %; and melting the glass material.

    摘要翻译: 一种制造具有含有MgO,CaO,SrO,BaO和ZnO作为必要成分的玻璃组合物的CRT漏斗玻璃的方法。 此外,MgO,CaO,SrO,BaO和ZnO的总含量在5〜13质量%的范围内。 作为CRT漏斗玻璃的玻璃材料,可以使用CRT面板玻璃或CRT颈部玻璃。 该方法包括制备玻璃材料以便含有MgO,CaO,SrO,BaO和ZnO作为必要成分,使MgO + CaO + SrO + BaO + ZnO的总含量在5〜13质量%的范围内 ; 并熔化玻璃材料。

    Cathode-ray-tube panel for projection tube
    67.
    发明申请
    Cathode-ray-tube panel for projection tube 审中-公开
    投影管用阴极射线管面板

    公开(公告)号:US20050043165A1

    公开(公告)日:2005-02-24

    申请号:US10922306

    申请日:2004-08-19

    申请人: Hiroshi Komori

    发明人: Hiroshi Komori

    CPC分类号: C03C3/095

    摘要: A cathode-ray-tube panel for a projection tube according to the present invention is made of glass containing not less than 4 ppm of Nd2O3 or not less than 15 ppm of Pr6O11 on a mass percentage basis.

    摘要翻译: 根据本发明的投影管用阴极射线管板由以质量%计含有不少于4ppm Nd2O3或不小于15ppm Pr6O11的玻璃制成。

    CRT panel glass containing SrO and BaO
    68.
    发明授权
    CRT panel glass containing SrO and BaO 失效
    含有SrO和BaO的CRT面板玻璃

    公开(公告)号:US06822383B2

    公开(公告)日:2004-11-23

    申请号:US09939897

    申请日:2001-08-27

    IPC分类号: H01J3100

    摘要: In order to suppress production of devitrifying stones such as barium disilicate and strontium silicate and to achieve a high X-ray absorbability, a CRT panel glass does not substantially contain PbO and contains, in mass percent, 9-9.5% SrO and 8.5-9% BaO. In addition, the value of SrO/(SrO+BaO) is set to 0.50-0.53. Therefore, the CRT panel glass has an X-ray absorption coefficient of 28.0 cm−1 or more at 0.6 Å.

    摘要翻译: 为了抑制二硅酸钡和硅酸锶等失透石的产生,并且为了获得高X射线吸收性,CRT面板玻璃基本上不含有PbO,以质量%计含有9-9.5%的SrO和8.5-9 %宝。 另外SrO /(SrO + BaO)的值设定为0.50-0.53。 因此,CRT面板玻璃在0.6A处的X射线吸收系数为28.0cm -1以上。

    Device for correcting teeth irregularities
    69.
    发明授权
    Device for correcting teeth irregularities 失效
    矫正牙齿不规则的装置

    公开(公告)号:US5271733A

    公开(公告)日:1993-12-21

    申请号:US886564

    申请日:1992-05-21

    IPC分类号: A61C7/12 A61C3/00

    CPC分类号: A61C7/12

    摘要: A supplementary device for use in a device for correcting teeth irregularities includes a bracket having a slit with a T-shaped section and a wire to be inserted into the slit and engaged with the bracket. The wire has an elongated projection, and the supplementary device includes a wire engaging slit having substantially the same shape as the slit in the bracket. At least one protrusion is adapted for engaging a resilient band, and the bracket is slidable along the wire.

    摘要翻译: 用于矫正牙齿不规则的装置中的补充装置包括具有T形截面的狭缝和插入狭缝中并与支架接合的线的托架。 线具有细长的突起,并且辅助装置包括具有与支架中的狭缝基本相同形状的线接合狭缝。 至少一个突出部适于接合弹性带,并且支架可沿导线滑动。