公开(公告)号：US5863379A

公开(公告)日：1999-01-26

申请号：US275273

申请日：1994-07-15

申请人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hideo Kurokawa ,  Akito Sawada

发明人： Shinji Uchida ,  Tsuguhiro Korenaga ,  Hideo Kurokawa ,  Akito Sawada

IPC分类号： C23C14/54 ,  G01B11/06 ,  B32B31/00

CPC分类号： C23C14/547 ,  G01B11/0683 ,  Y10T156/10

摘要： A multilayer film forming apparatus including a film forming chamber, a substrate on which a multilayer film is formed, an optical thickness monitoring substrate which controls an optical thickness of each layer of a multilayer film, a monitor exchange system which exchanges the optical thickness monitoring substrate for each layer and a multilayer film monitoring substrate which is disposed under the optical thickness monitoring substrate to observe spectral characteristics of the multilayer film. The invention also includes a light source which irradiates light to the optical thickness monitoring substrate and to the multilayer film monitoring substrate, an optical lens which reshapes the light radiated from the light source, an optical window which lets the light into and out of the film forming chamber, a detector which detects the light quantity reflected from the optical thickness monitoring substrate and a spectral characteristics evaluation device which measures spectral characteristics of the light reflected from the multilayer film monitoring substrate. The multilayer film monitoring substrate is fixed to a holding jig to prevent itself from inclining more than ten minutes against the disposed state.

摘要翻译： 一种多层膜形成装置，包括：成膜室，形成有多层膜的基板;控制多层膜的各层的光学厚度的光学厚度监视基板;交换光学厚度监视基板的监视器交换系统 并且设置在光学厚度监视基板下方以观察多层膜的光谱特性的多层膜监视基板。 本发明还包括将光照射到光学厚度监测基板和多层膜监视基板的光源，重新形成从光源照射的光的光学透镜，使光入射到膜的光学窗口 检测从光学厚度监测基板反射的光量的检测器和测量从多层膜监测基板反射的光的光谱特性的光谱特性评价装置。 多层膜监视基板固定在保持夹具上，以防止自身相对于处置状态倾斜超过十分钟。

公开(公告)号：US08995058B2

公开(公告)日：2015-03-31

申请号：US13395585

申请日：2011-08-12

申请人： Yuka Okada ,  Takamasa Ando ,  Tsuguhiro Korenaga

发明人： Yuka Okada ,  Takamasa Ando ,  Tsuguhiro Korenaga

IPC分类号： G02B5/18 ,  G02B3/08 ,  G02B13/18 ,  G02B27/42

CPC分类号： G02B5/1814 ,  G02B5/1871 ,  G02B5/1895 ,  G02B13/18 ,  G02B27/4211 ,  G02B27/4216 ,  G02B27/4277

摘要： A diffraction grating lens according to the present invention is a diffraction grating lens 11 including: a lens body 12; and a plurality of diffraction steps relative to a base shape and a plurality of diffraction gratings 13 interposed between the diffraction steps, provided on a surface of the lens body 12. The lens body 12 is made of a first material having a refractive index n1(λ) at a used wavelength λ; the diffraction grating 13 is in contact with air; and the relationship of an inequality below is satisfied, where d is a design step length of the diffraction steps, and m is an order of diffraction. Each of the plurality of annular zones includes an intermediate portion and a pair of end portions sandwiching the intermediate portion along a radial direction, and in at least one of the plurality of annular zones, either one of a recess 18 and a protrusion 19 is provided in at least a portion of one of the pair of end portions, and the other one of the recess 18 and the protrusion 19 is provided in at least a portion of the other of the pair of end portions. Between two kinds of diffraction steps 17A and 17B of the diffraction grating 13, one is provided at a position where the phase difference from the base shape given the design wavelength λ0 is not 2 nmπ. 0.9 ⁢ d ≤ m · λ n 1 ⁡ ( λ ) - 1 ≤ 1.1 ⁢ d

摘要翻译： 根据本发明的衍射光栅透镜是衍射光栅透镜11，包括：透镜体12; 以及设置在透镜主体12的表面上的相对于基部形状的多个衍射台和插入在衍射台之间的多个衍射光栅13.透镜体12由折射率为n1的第一材料 λ）; 衍射光栅13与空气接触; 并且满足以下不等式的关系，其中d是衍射级的设计步长，m是衍射级。 多个环状区域中的每一个包括中间部分和沿着径向方向夹住中间部分的一对端部，并且在多个环形区域中的至少一个中设置有凹部18和突起19中的任一个 在所述一对端部中的一个的至少一部分中，并且所述凹部18和所述突起19中的另一个设置在所述一对端部中的另一个的至少一部分中。 在衍射光栅13的两种衍射台阶17A和17B之间，在与设计波长λ0的基底相位差不是2nm＆pgr的位置处设置一个。 0.9d≤m·λn 1⁡（λ）-1≤1.1d

公开(公告)号：US20120300301A1

公开(公告)日：2012-11-29

申请号：US13575781

申请日：2011-12-09

申请人： Takamasa Ando ,  Tsuguhiro Korenaga

发明人： Takamasa Ando ,  Tsuguhiro Korenaga

IPC分类号： G02B27/44 ,  G02B5/18

CPC分类号： G02B5/1814 ,  G02B13/06 ,  G02B27/0018 ,  G02B27/4211 ,  G02B27/4277

摘要： An imaging optical system according to the present invention includes: at least one diffraction grating lens with a diffraction grating that is made up of q diffraction ring zones; and a stop. A surface of the at least one diffraction grating lens that has the diffraction grating is a lens surface that is located closest to the stop. Supposing the respective widths of diffraction ring zones that are located first, second, (m−1)th and mth closest to the optical axis of the optical system are identified by P1, P2, Pm-1 and Pm, at least one m that falls within the range 3 1.6 ( 3 )

摘要翻译： 根据本发明的成像光学系统包括：具有衍射光栅的至少一个衍射光栅透镜，其由q个衍射环区组成; 和一个停止。 具有衍射光栅的至少一个衍射光栅透镜的表面是位于最靠近挡块的透镜表面。 假设由P1，P2，Pm-1和Pm表示位于第一，第二，第（m-1）和第m最靠近光学系统的光轴的衍射环区的宽度，至少一米 落在3 1.6（3）

公开(公告)号：US20120243096A1

公开(公告)日：2012-09-27

申请号：US13143928

申请日：2010-12-28

申请人： Takamasa Ando ,  Tsuguhiro Korenaga

发明人： Takamasa Ando ,  Tsuguhiro Korenaga

IPC分类号： G02B5/18 ,  B29D11/00

CPC分类号： G02B5/1895 ,  G02B13/0055

摘要： A diffraction grating lens according to the present invention includes a lens body and a diffraction grating provided on the surface of the lens body, the diffraction grating including a plurality of annular zones having slopes inclined along a width direction and a plurality of step surfaces respectively located between the plurality of annular zones. At least one of the plurality of annular zones is light-transmissive across its entire area along the width direction, and in the at least one annular zone, a light transmittance near at least one of two ends along the width direction is smaller than a light transmittance near a central portion along the width direction.

摘要翻译： 根据本发明的衍射光栅透镜包括透镜体和设置在透镜体的表面上的衍射光栅，衍射光栅包括多个具有沿宽度方向倾斜的斜面的环形区域和分别位于多个台阶表面的多个台阶表面 在多个环形区域之间。 多个环形区域中的至少一个沿着宽度方向穿过其整个区域是透光的，并且在至少一个环形区域中，沿着宽度方向的两端中的至少一端附近的透光率小于光 沿着宽度方向的中心部附近的透射率。

公开(公告)号：US20120092769A1

公开(公告)日：2012-04-19

申请号：US13378386

申请日：2011-04-28

申请人： Seiji Nishiwaki ,  Takamasa Ando ,  Tsuguhiro Korenaga

发明人： Seiji Nishiwaki ,  Takamasa Ando ,  Tsuguhiro Korenaga

IPC分类号： G02B5/18

CPC分类号： G02B5/1876

摘要： A diffractive lens according to the present invention has the function of focusing light. The diffractive lens has a side on which a diffraction grating is arranged on either an aspheric surface or a spherical surface in its effective area. The diffraction grating has n0 phase steps, which are arranged concentrically around the optical axis of the diffractive lens. And the radius rn of the circle formed by an nth one (where n is an integer that falls within the range of 0 through n0) of the phase steps as counted from the optical axis of the diffractive lens satisfies rn=√{square root over (a{(n+c+dn)−b(n+c+dn)m})}{square root over (a{(n+c+dn)−b(n+c+dn)m})} where a, b, c and m are constants that satisfy a>0, 0≦c 1, and 0.05  b 0

摘要翻译： 根据本发明的衍射透镜具有聚焦光的功能。 衍射透镜在其有效区域中具有在非球面或球面上布置衍射光栅的一侧。 衍射光栅具有相对于衍射透镜的光轴同心设置的n0个相位。 并且由衍射透镜的光轴计数的由第n个（其中n是落入0到n0的范围内的整数）形成的圆的半径rn满足rn =√{平方根超过 （a {（n + c + dn）-b（n + c + dn）m}）} {（n + c + dn）-b（n + c + dn） 其中a，b，c和m是满足> 0,0和nlE; c <1，m> 1和0.05b的常数，b 0