摘要:
Even when areas delimited by delimiting points are not appropriate and area division has failed, success or failure of area division in such areas can easily be determined by applying a map determination condition in the map determining step (step S50). And since the areas delimited by the delimiting points are changed and the map determining step (step S50), including also steps S22 and S23 and steps S30 and S40, is repeated until the map determination condition is satisfied, the areas satisfying the map determination condition are determined appropriate and the area division in such areas can be carried out accurately. Even when there is distortion, a two-dimensional position map can be corrected accurately.
摘要:
A valve is closed while a cleaning liquid is fed into a tubular body of a cleaning nozzle, and a piezoelectric element applies vibrations to the cleaning liquid. This causes droplets of the cleaning liquid to be produced and discharged from a plurality of discharge holes. The droplet diameter of the discharged droplets is in the range from 15 to 200 μm, and the distribution of the droplet diameter is such that the value of where a value of 3σ does not exceed 10% of the average droplet diameter. The droplet speed is in the range from 20 to 100 meters per second, and the distribution of the droplet speed is such that the value of where a value of 3σ does not exceed 10% of the average droplet speed. The droplet flow rate is not less than 10 milliliters per minute. Discharging the droplets of the cleaning liquid from the cleaning nozzle toward a substrate while satisfying these discharge conditions improves cleaning efficiency without damages to the substrate.
摘要:
A radiation detecting apparatus of this invention includes an arithmetic processing device which carries out arithmetic processes for drawing boundaries based on peaks of signal strengths and separating respective positions by the boundaries, and for determining, by using spatial periodicity of the peaks, the number of peaks having failed to be separated, with a plurality of peaks connecting to each other. If the separation fails with a plurality of peaks connecting to each other, the number of peaks in error is determined using spatial periodicity of the peaks. Thus, by using spatial periodicity of the peaks, the number of peaks in error can be determined and boundaries can be set easily. As a result, incident positions can also be discriminated easily, and detecting positions of radiation can be determined easily.
摘要:
[Problem] It is an object to provide a composite container in which a shape and a profile of a resin hollow molding body can be discriminated with clarity in the case in which a visual contact is carried out to the inside resin hollow molding body via an outside transparent resin sheathing body, whereby a design property can be displayed to a satisfactory extent, and in which a design property can be displayed to a satisfactory extent even by a combination of the resin hollow molding body and the outside transparent resin sheathing body.[Means for Resolution] A composite container comprises a hollow molding body (a) made of a resin having a hollow inside and a highly transparent resin sheathing body (b) that has been integrated with an outside of the hollow molding body (a), wherein as a thickness of the highly transparent resin sheathing body (b) for a cross section in a horizontal direction getting across the hollow molding body (a) and the highly transparent resin sheathing body (b) at the major portion of the composite container, a minimum thickness (X) of the highly transparent resin sheathing body (b) is at least 0.1 mm and a difference of a maximum thickness (Y) and the minimum thickness (X) is at least 2 mm.
摘要:
A manufacturing method of a synthetic resin hollow body in which a molten resin is injected for an over-molding outside a hollow molding body made of a resin provided with a hollow body and at least an opening portion to form a resin sheathing body in an integrating manner with the hollow molding body. The method includes the step of injecting the molten resin for an over-molding under the state in which the hollow molding body is partially or wholly filled with a fluid substance. The manufacturing method of a synthetic resin hollow body is capable of suppressing resin cost and operation cost and can improve decorating property.
摘要:
The substrate processing apparatus is provided with a gas-liquid mixing nozzle for generating a process liquid mist by mixing a liquid and a pressurized gas, to discharge the process liquid mist to a substrate at high speeds. The liquid may be remover liquid, intermediate rinse liquid or deionized water. The reaction products which having been generated on the substrate in etching process is removed at high speeds with the flow of the mist, whereby the quality of the process is improved.
摘要:
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During cleaning, it follows that both nozzles discharge detergents while keeping relative layout relation. Therefore, the discharged cleaning mist and rinsing deionized water do not interfere with each other before reaching the substrate but the used detergents are entirely horizontally splashed and recovered in a cup. Thus, the cleaning mist is prevented from scattering and adhering to the periphery.
摘要:
There are provided an azimuth measurement device and its method for realizing an update of an offset calculated from the data acquired by azimuth measurement. A geomagnetism output measured by a 3-axis magnetic sensor is amplified and input to an A/D conversion section. A chopper section is arranged for switching the terminals for driving an X-axis, Y-axis and a Z-axis magnetic sensor and applies drive voltage output from a drive power source section to the X-axis, the Y-axis and the Z-axis magnetic sensor. The output amplified value amplified by the amplification section is converted from an analog signal to a digital signal by the ND conversion section and then is input to a sensitivity/offset correction calculation section. Output data from this sensitivity/offset correction calculation section is input to an azimuth calculation section and the corresponding azimuth information is output. A reliability information calculation section outputs reliability information.
摘要:
The substrate treatment method includes a deionized water supply step of supplying deionized water on a surface of a substrate; a resistivity reducing gas supply step of supplying a resistivity reducing gas so as to change ambient air to which the deionized water in contact with the surface of the substrate is exposed, into an ambient of the resistivity reducing gas capable of reducing the resistivity of deionized water; and a deionized water removal step of removing the deionized water from the surface of the substrate after the resistivity reducing gas supply step.
摘要:
A soft spray nozzle discharging a cleaning mist is vertically directed and fixed to an arm. A rinse nozzle discharging rinsing deionized water for suppressing obstruction is vertically fixed to the arm at a prescribed distance from the soft spray nozzle. During cleaning, it follows that both nozzles discharge detergents while keeping relative layout relation. Therefore, the discharged cleaning mist and rinsing deionized water do not interfere with each other before reaching the substrate but the used detergents are entirely horizontally splashed and recovered in a cup. Thus, the cleaning mist is prevented from scattering and adhering to the periphery.