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公开(公告)号：US11691268B2
公开(公告)日：2023-07-04
申请号：US15067684
申请日：2016-03-11
发明人： Martin Hosek , Leonard T. Lilliston , Jacob Lipcon
IPC分类号： B25J9/04 , H01L21/677 , B25J9/10
CPC分类号： B25J9/042 , B25J9/043 , B25J9/104 , H01L21/67742 , Y10S901/15 , Y10S901/21 , Y10S901/27 , Y10S901/28 , Y10S901/29
摘要： An apparatus having a drive unit having a first drive axis rotatable about a first axis of rotation and a second drive axis rotatable about a second axis of rotation, the second drive axis being coaxial with and partially within the first drive axis and axially rotatable within the first drive axis. A robot arm has an upper arm connected to the drive unit at the first drive axis, a forearm coupled to the upper arm, the forearm being coupled to the upper arm at a first rotary joint and rotatable about the first rotary joint, the first rotary joint being actuatable by a first band arrangement coupled to the second drive axis, and an end effector coupled to the forearm, the end effector being coupled to the forearm at a second rotary joint and rotatable about the second rotary joint, the second rotary joint being actuatable by a second band arrangement coupled to the first rotary joint. The second band arrangement is configured to provide a variable transmission ratio.
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公开(公告)号：US20230032442A1
公开(公告)日：2023-02-02
申请号：US17965907
申请日：2022-10-14
发明人： Scott Wilkas , Martin Hosek , Jacob Lipcon
IPC分类号： B25J9/04 , B25J9/10 , H01L21/677 , B25J11/00
摘要： A substrate transport arm including a first link; a second link rotatably connected to the first link; a third link rotatably connected to the second link at a wrist joint; and a mechanical transmission having a pulley. The third link includes an end effector configured to support a substrate thereon. The mechanical transmission is connected to the third link to control rotation of the third link on the second link. The mechanical transmission is configured to control rotation of the third link as a function of an angle between the first and second links such that, as the first and second links are rotated relative to each other, the wrist joint follows a wrist path which includes a curved portion, and where a center of the substrate supported on the end effector is moved along a substantially straight substrate path as the wrist joint follows the curved portion.
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公开(公告)号：US20220130711A1
公开(公告)日：2022-04-28
申请号：US17569696
申请日：2022-01-06
发明人： Martin HOSEK , Scott WILKAS
IPC分类号： H01L21/687 , B25J18/04 , B25J15/00 , B25J9/04 , B25J9/10 , H01L21/677
摘要： An apparatus including a controller; a robot drive; a robot arm connected to the robot drive, where the robot arm has links including an upper arm, a first forearm connected to a first end of the upper arm, a second forearm connected to a second opposite end of the upper arm, a first end effector connected to the first forearm and a second end effector connected to the second forearm; and a transmission connecting the robot drive to the first and second forearms and the first and second end effectors. The transmission is configured to rotate the first and second forearms relative to the upper arm and rotate the first and second end effectors on their respective first and second forearms. The upper arm is substantially rigid and movement of the upper arm by the robot drive moves both the first and second forearms in opposite directions.
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公开(公告)号：US11251065B2
公开(公告)日：2022-02-15
申请号：US16818408
申请日：2020-03-13
发明人： Martin Hosek , Scott Wilkas
IPC分类号： G06F7/00 , H01L21/687 , B25J18/04 , B25J15/00 , B25J9/04 , B25J9/10 , H01L21/677
摘要： An apparatus including a controller; a robot drive; a robot arm connected to the robot drive, where the robot arm has links including an upper arm, a first forearm connected to a first end of the upper arm, a second forearm connected to a second opposite end of the upper arm, a first end effector connected to the first forearm and a second end effector connected to the second forearm; and a transmission connecting the robot drive to the first and second forearms and the first and second end effectors. The transmission is configured to rotate the first and second forearms relative to the upper arm and rotate the first and second end effectors on their respective first and second forearms. The upper arm is substantially rigid and movement of the upper arm by the robot drive moves both the first and second forearms in opposite directions.
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公开(公告)号：US20210370528A1
公开(公告)日：2021-12-02
申请号：US17335561
申请日：2021-06-01
发明人： Martin HOSEK , Himanshu SHUKLA , Tuan HA
摘要： An apparatus including a robot drive; and a robot arm connected to the robot drive, where the robot arm includes a first link connected to the robot drive, a second link rotatably connected to the first link at a first rotatable connection, and an end effector rotatably connected to the second link at a second rotatable connection. The end effector includes a heat choke located between a substrate support area of the end effector and the second rotatable connection. At least one of the first rotatable connector or the second rotatable connection includes a rotary thermal coupling having interleaved members which are rotatable relative to each other.
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公开(公告)号：US20210308755A1
公开(公告)日：2021-10-07
申请号：US17221021
申请日：2021-04-02
摘要： A system for producing a soft magnetic material having a core-shell structure includes a gas supply configured to supply at least one gas; and a furnace configured to receive the at least one gas. A flow of the at least one gas is configured to be varied to provide a shell on a particle in the furnace.
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公开(公告)号：US20210296946A1
公开(公告)日：2021-09-23
申请号：US17330707
申请日：2021-05-26
摘要： An apparatus includes a motor having a rotor; and a stator, where the rotor is located at least partially in a rotor receiving area of the stator, where the stator includes at least one coil winding and teeth, where the at least one coil winding is located on at least some of the teeth, where the teeth include a first set of the teeth and a second set of the teeth, where the teeth of the first set of teeth are longer in a radial direction from the rotor receiving area than the teeth of the second set of teeth.
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公开(公告)号：US20210118719A1
公开(公告)日：2021-04-22
申请号：US17071486
申请日：2020-10-15
发明人： Scott Wilkas
IPC分类号： H01L21/687 , B25J11/00 , B25J15/00 , B25J9/04
摘要： An apparatus including a drive; and a movable arm assembly connected to the drive. The movable arm assembly includes a first arm and a second arm, where the first arm includes a first upper arm, a first forearm and a first end effector, and where the second arm includes a second upper arm, a second forearm and a second end effector. The first end effector includes at least two first substrate holding areas. The second end effector includes at least two second substrate holding areas. The drive and the movable arm assembly are configured to prevent the movable arm assembly from passing over top sides of substrates located on the first and second substrate holding areas.
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公开(公告)号：US10940594B2
公开(公告)日：2021-03-09
申请号：US14940192
申请日：2015-11-13
发明人： Martin Hosek , Tuan Thuc Ha
摘要： A robot arm includes a wrist, an end effector, and an adjustable joint coupling the end effector to the wrist. The adjustable joint includes a member received in a socket. In one example, the member is a ball. In another example, the member is a tang. In both examples, an upper flange and a lower flange can be used to couple the wrist to a forearm.
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公开(公告)号：US20200346281A1
公开(公告)日：2020-11-05
申请号：US16929558
申请日：2020-07-15
发明人： Martin Hosek
摘要： A system for forming a bulk material having insulated boundaries from a metal material and a source of an insulating material is provided. The system includes a heating device, a deposition device, a coating device, and a support configured to support the bulk material. The heating device heats the metal material to form particles having a softened or molten state and the coating device coats the metal material with the insulating material from the source and the deposition device deposits particles of the metal material in the softened or molten state on the support to form the bulk material having insulated boundaries.
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