公开(公告)号：US11787042B2

公开(公告)日：2023-10-17

申请号：US17115134

申请日：2020-12-08

申请人： Persimmon Technologies, Corp.

发明人： Martin Hosek ,  Christopher Hofmeister

IPC分类号： B25J9/04 ,  B25J18/04 ,  B25J15/00 ,  H01L21/677 ,  B25J9/10

CPC分类号： B25J9/043 ,  B25J9/042 ,  B25J9/105 ,  B25J15/0014 ,  B25J15/0052 ,  B25J18/04 ,  H01L21/67742 ,  B25J9/104 ,  Y10S901/14 ,  Y10S901/27

摘要： A transport apparatus including a drive with a drive axis and a first arm connected to the drive. The first arm includes a first link, a second link and an end effector connected in series with the drive. The end effector includes a substrate support section and a leg connecting the substrate support section to a wrist joint of the end effector with the second link. The leg has a first section connected to the wrist joint, a second section connected to the substrate support section, and a bend portion between the first and second sections such that the first and second sections are angled or offset relative to each other. Connection of the leg to the second link at the wrist joint is offset relative to a centerline of the substrate support section and offset relative to the drive axis.

公开(公告)号：US20180138066A1

公开(公告)日：2018-05-17

申请号：US15849002

申请日：2017-12-20

申请人： BROOKS AUTOMATION, INC.

发明人： Robert T. CAVENEY ,  Jayaraman KRISHNASAMY ,  Ulysses GILCHRIST ,  Mitchell DREW ,  Jairo T. MOURA

IPC分类号： H01L21/677 ,  B25J18/04 ,  B25J9/04 ,  B25J11/00

CPC分类号： H01L21/67706 ,  B25J9/042 ,  B25J9/043 ,  B25J11/0095 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305 ,  Y10T74/20329

摘要： A substrate processing apparatus including a frame, a first SCARA arm connected to the frame, including an end effector, configured to extend and retract along a first radial axis; a second SCARA arm connected to the frame, including an end effector, configured to extend and retract along a second radial axis, the SCARA arms having a common shoulder axis of rotation; and a drive section coupled to the SCARA arms is configured to independently extend each SCARA arm along a respective radial axis and rotate each SCARA arm about the common shoulder axis of rotation where the first radial axis is angled relative to the second radial axis and the end effector of a respective arm is aligned with a respective radial axis, wherein each end effector is configured to hold at least one substrate and the end effectors are located on a common transfer plane.

公开(公告)号：US20180108561A1

公开(公告)日：2018-04-19

申请号：US15846401

申请日：2017-12-19

申请人： Persimmon Technologies, Corp.

发明人： Martin Hosek

IPC分类号： H01L21/687 ,  H01L21/677 ,  B25J9/04 ,  B25J18/04

CPC分类号： H01L21/68735 ,  B25J9/042 ,  B25J9/043 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/14 ,  Y10S901/27

摘要： An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

公开(公告)号：US09840004B2

公开(公告)日：2017-12-12

申请号：US14827506

申请日：2015-08-17

申请人： Persimmon Technologies, Corp.

发明人： Martin Hosek ,  Christopher Hofmeister

IPC分类号： B25J9/04 ,  B25J18/04 ,  B25J15/00 ,  H01L21/677

CPC分类号： B25J9/043 ,  B25J9/042 ,  B25J9/104 ,  B25J9/105 ,  B25J15/0014 ,  B25J15/0052 ,  B25J18/04 ,  H01L21/67742 ,  Y10S901/14 ,  Y10S901/27

摘要： A transport apparatus including a drive; a first arm connected to the drive, where the first arm includes a first link, a second link and an end effector connected in series with the drive, where the first link and the second link have different effective lengths; and a system for limiting rotation of the end effector relative to the second link to provide substantially only straight movement of the end effector relative to the drive when the first arm is extended or retracted.

公开(公告)号：US20170294335A1

公开(公告)日：2017-10-12

申请号：US15517985

申请日：2014-10-10

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA

发明人： Isao KATO ,  Iori KURATA ,  Masayuki SAITO ,  Hirohiko GOTO

IPC分类号： H01L21/687

CPC分类号： H01L21/68707 ,  B25J9/043 ,  H01L21/67742 ,  H01L21/67766

摘要： A substrate conveying robot has left and right arms having a common pivot axis line, an arm drive unit for driving the left and right arms, and a control unit for controlling the arm drive unit. A pulley ratio between a turning pulley, a first pulley, a second pulley, and a third pulley is set so that a moving locus of the substrate holding members when the first link member is rotated about the pivot axis line by the first drive portion so as to extend and contract the arm in a state that the turning pulley is fixed is substantially linear. Thereby, the moving locus of the substrate holding member when extending and contracting the arm can be substantially linear.

公开(公告)号：US20170066127A2

公开(公告)日：2017-03-09

申请号：US15140575

申请日：2016-04-28

申请人： ULVAC, Inc.

发明人： Takahiro YOSHINO

IPC分类号： B25J9/06 ,  H01L21/677

CPC分类号： B25J9/06 ,  B25J9/043 ,  B25J9/1065 ,  H01L21/67742 ,  H01L21/67754

摘要： The present invention provides a system that facilitates positioning operations and also improves throughput in transferring a substrate in a transfer device that can transfer a pair of transfer objects simultaneously. The present invention includes first and second extension/contraction drive shafts disposed concentrically with a rotating axis as a center, each provided in an independently rotatable manner in a horizontal plane, and first and second turning drive shafts. First and second transfer mechanisms are disposed on both sides of a transfer object transfer direction with the rotating axis being disposed therebetween, are driven to extend and contract by the first and second extension/contraction drive shafts, and transfer a transfer object along the transfer object transfer direction. The first and second transfer mechanisms are configured to turn at a small angle with the rotating axis as a center by first and second turning drive members.

摘要翻译： 本发明提供了一种便于定位操作的系统，并且还提高了能够同时传送一对传送对象的传送设备中的传送基板的传送能力。 本发明包括以旋转轴为中心同心设置的第一和第二延伸/收缩驱动轴，每个旋转轴在水平面中以独立的方式设置，以及第一和第二转动驱动轴。 第一传送机构和第二传送机构设置在传送对象传送方向的两侧，其中旋转轴线位于它们之间，被驱动以由第一和第二延伸/收缩驱动轴延伸和收缩，并且沿传送对象传送传送对象 传送方向。 第一和第二传送机构被构造成通过第一和第二转向驱动构件以与旋转轴为中心的小角度转动。

公开(公告)号：US09566713B2

公开(公告)日：2017-02-14

申请号：US14990324

申请日：2016-01-07

申请人： DAIHEN CORPORATION

发明人： Masaru Shimada ,  Sayako Takarabe ,  Hideki Matsuo

IPC分类号： H01L21/677 ,  B25J11/00 ,  B25J9/04 ,  B25J9/10 ,  B25J19/00 ,  B65G49/06 ,  H01L21/67

CPC分类号： B25J9/043 ,  B25J9/106 ,  B25J9/1065 ,  B25J11/00 ,  B25J19/0054 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/02 ,  H01L21/67109 ,  H01L21/67742

摘要： There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.

摘要翻译： 提供了一种具有联动臂机构的承载装置，特别是冷却连杆臂机构并能够减少来自处于高温状态的工件的辐射热的冲击的载体装置。 载体装置是包括联动臂机构和枢轴的载体装置，并且连杆臂机构包括下臂和上臂，并且其一端分别连接到下臂;以及水平移动构件，其支撑 连接到上臂的另一端的工件和冷却板分别设置在上臂和水平移动构件之间。

公开(公告)号：US09259841B2

公开(公告)日：2016-02-16

申请号：US13884117

申请日：2011-11-02

申请人： Masaru Shimada ,  Sayako Takarabe ,  Hideki Matsuo

发明人： Masaru Shimada ,  Sayako Takarabe ,  Hideki Matsuo

IPC分类号： H01L21/677 ,  B25J11/00 ,  B25J9/04 ,  B25J9/10 ,  B25J19/00 ,  B65G49/06 ,  H01L21/67

CPC分类号： B25J9/043 ,  B25J9/106 ,  B25J9/1065 ,  B25J11/00 ,  B25J19/0054 ,  B65G49/061 ,  B65G49/067 ,  B65G2249/02 ,  H01L21/67109 ,  H01L21/67742

摘要： There is provided a carrier device that has a linkage arm mechanism, in particular, a carrier device that cools the linkage arm mechanism and can reduce the impact of radiation heat from a work that is in a high temperature state. A carrier device is a carrier device that includes a linkage arm mechanism and a pivot shaft, and the linkage arm mechanism includes lower arms and upper arms, and one ends of which are respectively connected to the lower arms, and horizontal movement members that support a work that is connected to the other ends of the upper arms, and cooling plates are respectively arranged between the upper arms, and the horizontal movement members.

摘要翻译： 提供了一种具有联动臂机构的承载装置，特别是冷却连杆臂机构并能够减少来自处于高温状态的工件的辐射热的冲击的载体装置。 载体装置是包括联动臂机构和枢轴的载体装置，并且连杆臂机构包括下臂和上臂，并且其一端分别连接到下臂;以及水平移动构件，其支撑 连接到上臂的另一端的工件和冷却板分别设置在上臂和水平移动构件之间。

公开(公告)号：US09245783B2

公开(公告)日：2016-01-26

申请号：US13902538

申请日：2013-05-24

申请人： Novellus Systems, Inc.

发明人： Richard M. Blank

IPC分类号： H01L21/677 ,  B25J9/04

CPC分类号： H01L21/67742 ,  B25J9/043

摘要： A robot for use in vacuum chambers is disclosed. The robot may be mounted within an oblong transfer chamber and may be translated within the transfer chamber by an umbilical arm operating in conjunction with a linear motion guide and carriage. Motors or drive systems for the robot may be housed in atmospheric conditions, and the transfer chamber may be kept at a vacuum. The robot may include one or more arms configured for wafer handling. The robot may include one or more motors or drive systems and a multi-axial seal to realize independent extension/retraction of each arm and overall simultaneous rotation of the arm assembly.

摘要翻译： 公开了一种用于真空室的机器人。 机器人可以安装在长方形传送室中，并且可以通过与直线运动引导件和托架一起操作的脐带臂在传送室内平移。 用于机器人的电机或驱动系统可以在大气条件下容纳，并且传送室可以保持在真空状态。 机器人可以包括配置用于晶片处理的一个或多个臂。 机器人可以包括一个或多个电动机或驱动系统和多轴向密封件，以实现每个臂的独立的延伸/缩回以及臂组件的整体同时旋转。

公开(公告)号：US09149928B2

公开(公告)日：2015-10-06

申请号：US13232198

申请日：2011-09-14

申请人： Yukihiro Yamaguchi ,  Kazuhiro Kosuge ,  Yasuhisa Hirata ,  Aya Kaisumi

发明人： Yukihiro Yamaguchi ,  Kazuhiro Kosuge ,  Yasuhisa Hirata ,  Aya Kaisumi

IPC分类号： B25J13/02 ,  B25J9/16 ,  B25J15/08 ,  B25J9/04

CPC分类号： B25J9/0093 ,  B23P19/007 ,  B25J9/0096 ,  B25J9/043 ,  B25J9/1612 ,  B25J15/08 ,  Y10S901/27 ,  Y10S901/50

摘要： A robot includes a gripping section adapted to grip an object by open and close a pair of finger sections, a moving device adapted to relatively move the object and the gripping section, and a control device adapted to control the moving device to move the gripping section relatively toward the object, and dispose the pair of finger sections in a periphery of the object, and then control the gripping section to open and close the pair of finger sections in a plane parallel to a mounting surface on which the object is mounted, pinch the object between the pair of finger sections from a lateral side of the object, and grip the object with the gripping section at least three contact points.

摘要翻译： 机器人包括：夹持部，其通过打开和闭合一对指部来夹持物体;移动装置，其适于相对移动所述物体和所述抓握部;以及控制装置，其适于控制所述移动装置以使所述抓握部 相对地朝向物体，并且将一对手指部分设置在物体的周边中，然后控制抓握部分在与安装对象的安装表面平行的平面中打开和关闭一对指部，夹紧 所述物体在所述一对手指部分之间从所述物体的侧面侧抓住所述物体与所述抓握部分至少三个接触点。