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公开(公告)号：US20140002929A1
公开(公告)日：2014-01-02
申请号：US13659749
申请日：2012-10-24
CPC分类号： G11B5/3163 , G11B5/3116 , G11B5/82 , G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes follows: forming a magnetic recording layer on a substrate; forming an under layer and a metal release layer that forms an alloy with the under layer on the magnetic recording layer in this order and forming an alloyed release layer by alloying the under layer and the metal release layer; forming a mask layer on the alloyed release layer; forming a resist layer on the mask layer; providing a protrusion-recess pattern by patterning the resist layer; transferring the protrusion-recess pattern to the mask layer; transferring the protrusion-recess pattern to the alloyed release layer; transferring the protrusion-recess pattern to the magnetic recording layer; dissolving the alloyed release layer by using a stripping solution and removing a layer formed on the alloyed release layer from an upper side of the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法如下：在基板上形成磁记录层; 形成下层和金属剥离层，其与磁性记录层上的下层依次形成合金，并通过使底层和金属剥离层合金化而形成合金剥离层; 在合金剥离层上形成掩模层; 在掩模层上形成抗蚀剂层; 通过图案化抗蚀剂层提供突起 - 凹陷图案; 将突起凹部图案转印到掩模层; 将所述突起凹部图案转印到所述合金剥离层; 将突起凹部图案转印到磁记录层; 通过使用剥离溶液溶解合金剥离层，并从磁记录层的上侧除去在合金剥离层上形成的层。
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公开(公告)号：US20130252029A1
公开(公告)日：2013-09-26
申请号：US13599569
申请日：2012-08-30
申请人： Kazutaka Takizawa , Akira Watanabe , Kaori Kimura , Akihiko Takeo
发明人： Kazutaka Takizawa , Akira Watanabe , Kaori Kimura , Akihiko Takeo
摘要： In a removing step, a phase-separated release solution including a first phase containing a first solvent capable of dissolving a release layer and a second phase containing a second solvent having a property of separating from the first solvent is prepared, and a patterned magnetic recording medium is dipped in the first phase together with a release layer, mask layer, and resist layer remaining on a magnetic recording layer, thereby removing the release layer. After that, the patterned magnetic recording medium is moved to the second phase, and separated from the first phase containing the release layer and the layers remaining on the release layer.
摘要翻译： 在去除步骤中，制备包括含有能够溶解脱模层的第一溶剂的第一相和含有具有与第一溶剂分离的性质的第二溶剂的第二相的相分离的脱模溶液，以及图案化磁记录 将介质与保留在磁记录层上的剥离层，掩模层和抗蚀剂层一起浸渍在第一相中，从而除去剥离层。 之后，图案化的磁记录介质移动到第二相，并且从包含剥离层的第一相和保留在剥离层上的层分离。
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公开(公告)号：US20130248485A1
公开(公告)日：2013-09-26
申请号：US13607134
申请日：2012-09-07
申请人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
发明人： Akira Watanabe , Kaori Kimura , Kazutaka Takizawa , Takeshi Iwasaki , Tsuyoshi Onitsuka , Akihiko Takeo
IPC分类号： G11B5/84
CPC分类号： G11B5/855
摘要： A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.
摘要翻译： 磁记录介质的制造方法包括以下步骤：形成磁记录层，第一掩模层，含硅作为主要成分的第二掩模层，带状层，第三掩模层和抗蚀剂层，图案化步骤 提供图案的抗蚀剂层，将图案转移到第三掩模层的步骤，到带状层和第二掩模层，通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层，将图案转印到第一掩模层和磁记录层的步骤，以及剥离残留在磁记录层上的第一掩模层的步骤。
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公开(公告)号：US08507116B2
公开(公告)日：2013-08-13
申请号：US13175485
申请日：2011-07-01
IPC分类号： G11B5/127
CPC分类号： G11B5/8404 , G11B5/746 , G11B5/82 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a magnetic recording medium includes a substrate, a soft magnetic layer, an underlayer, a magnetic recording layer, and a protective layer, wherein the magnetic recording layer is provided with a pattern including recording portions and non-recording portions, the non-recording portions have a composition that is equal to a composition obtained by demagnetizing the recording portions, the non-recording portions contain at least one metal element selected from the group consisting of vanadium and zirconium and at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen, and the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen is contained in the non-recording portions at a higher content than the content of the at least one element selected from the group consisting of nitrogen, carbon, boron and oxygen in the recording portions.
摘要翻译： 根据一个实施例，磁记录介质包括衬底，软磁层，底层，磁记录层和保护层，其中磁记录层设置有包括记录部分和非记录部分的图案， 非记录部分的组成等于通过使记录部分退磁获得的组合物，非记录部分含有至少一种选自钒和锆的金属元素和至少一种选自组中的元素 由氮，碳，硼和氧组成，并且所述至少一种选自氮，碳，硼和氧的元素以比所述至少一种元素的含量更高的含量包含在非记录部分中 在记录部分中选自氮，碳，硼和氧。
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公开(公告)号：US08440091B2
公开(公告)日：2013-05-14
申请号：US12638841
申请日：2009-12-15
CPC分类号： G11B5/855
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium comprises forming a protective film on a ferromagnetic recording layer containing Cobalt (Co) on a substrate and forming a recess in both the protective film and the ferromagnetic recording layer at a part where a nonmagnetic layer is to be formed. The method further comprises removing Co from a part of the recess of the ferromagnetic recording layer to form the nonmagnetic layer that separates magnetic patterns made of the ferromagnetic recording layer containing Co. The nonmagnetic layer has an identical chemical composition as the ferromagnetic recording layer, except for the nonmagnetic layer having a lower Co concentration than the magnetic patterns.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在包含钴（Co）的铁磁记录层上形成保护膜，并在保护膜和铁磁记录层中形成凹部， 将形成非磁性层。 该方法还包括从铁磁记录层的凹部的一部分去除Co以形成分离由含有Co的铁磁记录层制成的磁图案的非磁性层。非磁性层具有与铁磁记录层相同的化学成分， 对于具有比磁图案低的Co浓度的非磁性层。
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76.发明授权公开(公告)号：US08419952B2
公开(公告)日：2013-04-16
申请号：US13166718
申请日：2011-06-22
IPC分类号： B44C1/22
CPC分类号： B44C1/22 , G11B5/746 , G11B5/855 , Y10T428/11
摘要： According to one embodiment, a method of manufacturing a patterned medium includes forming an implantation depth-adjusting layer above a magnetic recording layer, the magnetic recording layer being made of a material that is deactivated when implanted with a chemical species, and the implantation depth-adjusting layer being made of a material that is etched when irradiated with an ion beam of the chemical species and irradiating the implantation depth-adjusting layer with the ion beam to implant the chemical species into a part of the magnetic recording layer through the implantation depth-adjusting layer while etching the implantation depth-adjusting layer by an action of the ion beam to decrease a thickness of the implantation depth-adjusting layer.
摘要翻译： 根据一个实施例，制造图案化介质的方法包括在磁记录层上形成注入深度调节层，所述磁记录层由在注入化学物质时失活的材料制成， 所述调整层由当被所述化学物质的离子束照射时被蚀刻的材料制成，并且用所述离子束照射所述注入深度调节层，以通过所述植入深度调制层将所述化学物质注入到所述磁记录层的一部分中， 同时通过离子束的作用蚀刻植入深度调节层，以减小注入深度调节层的厚度。
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公开(公告)号：US20120082800A1
公开(公告)日：2012-04-05
申请号：US13216555
申请日：2011-08-24
IPC分类号： C23C14/04
CPC分类号： C23C14/0605 , C23C14/0635 , C23C14/0658 , C23C14/5893 , G11B5/855
摘要： According to one embodiment, there is provided a method for manufacturing a magnetic recording medium, the method including: depositing a magnetic recording layer on a substrate; forming a mask on a region of the magnetic recording layer corresponding to a recording area; irradiating another region of the magnetic recording layer where the mask is not formed with an ion beam using a C-containing gas as a source gas to deactivate the another region and to thereby form a non-recording area; and forming a protective film over an entire surface of the substrate.
摘要翻译： 根据一个实施例，提供了一种用于制造磁记录介质的方法，所述方法包括：在基板上沉积磁记录层; 在对应于记录区域的磁记录层的区域上形成掩模; 使用含C气体作为源气体照射没有形成掩模的磁记录层的另一个区域，使离子束使其另一区域失活，从而形成非记录区域; 以及在所述基板的整个表面上形成保护膜。
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78.发明授权Substrate for magnetic recording medium, magnetic recording medium, and magnetic recording apparatus 有权用于磁记录介质的基板，磁记录介质和磁记录装置公开(公告)号：US08059368B2
公开(公告)日：2011-11-15
申请号：US12801299
申请日：2010-06-02
申请人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
发明人： Kaori Kimura , Masatoshi Sakurai , Akira Kikitsu , Yoshiyuki Kamata , Satoshi Shirotori , Hiroyuki Hieda
IPC分类号： G11B5/82
摘要： It is possible to improve the recording and reproducing S/N ratio, the reproduction signal intensity, and the degree of high density recording. There are provided a plurality of recording tracks formed on a substrate, each recording track being formed of a magnetic material, and non-recording sections formed on the substrate, each non-recording section separating adjacent recording tracks, each recording track including a plurality of recording sections and connecting sections for connecting the recording sections adjacent thereto in a track longitudinal direction, and each connecting section having a cross-sectional area in a track width direction that is smaller than a cross-sectional area in a track width direction of adjacent recording sections.
摘要翻译： 可以改善记录和再现S / N比，再现信号强度和高密度记录程度。 提供了形成在基板上的多个记录轨道，每个记录磁道由磁性材料形成，而非记录部分形成在基板上，每个非记录部分分隔相邻的记录磁道，每个记录磁道包括多个 记录部分和连接部分，用于在轨道纵向方向上连接与其相邻的记录部分，并且每个连接部分在轨道宽度方向上的横截面积小于相邻记录的轨道宽度方向上的横截面积 部分。
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公开(公告)号：US20110235212A1
公开(公告)日：2011-09-29
申请号：US13007395
申请日：2011-01-14
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/855 , Y10T428/12465
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming on a magnetic recording layer a first hard mask, a second hard mask, a third hard mask and a resist, imprinting the resist with a stamper, removing a residue left in the recesses of the patterned resist, etching the third hard mask by use of the patterned resist as a mask, etching the second hard mask by use of the third hard mask as a mask, etching the first hard mask by use of the second hard mask as a mask, forming a pattern of the magnetic recording layer with ion beam irradiation, and removing the first hard mask by use of a remover liquid with higher reactivity to the metal material of the first hard mask than to a constituent element of the magnetic recording layer.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模，第三硬掩模和抗蚀剂，用压模压印抗蚀剂，除去留在 图案化抗蚀剂的凹部，通过使用图案化的抗蚀剂作为掩模蚀刻第三硬掩模，通过使用第三硬掩模作为掩模蚀刻第二硬掩模，通过使用第二硬掩模蚀刻第一硬掩模 作为掩模，通过离子束照射形成磁记录层的图案，并且通过使用对第一硬掩模的金属材料具有较高反应性的去除剂液体除去第一硬掩模，而不是磁记录的构成元件 层。
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公开(公告)号：US07993536B2
公开(公告)日：2011-08-09
申请号：US12636610
申请日：2009-12-11
IPC分类号： B44C1/22
摘要： According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist film on a magnetic recording layer, imprinting a stamper on the resist film to transfer patterns of recesses and protrusions, removing residues remained in recess of the patterned resist film, etching the second hard mask using the patterned resist film as a mask to transfer patterns of recesses and protrusions, etching the first hard mask using the patterned second hard mask as a mask to transfer patterns of recesses and protrusions, and deactivating magnetism of the magnetic recording layer exposed in the recesses together with removing the second hard mask by ion-beam etching.
摘要翻译： 根据一个实施例，制造磁记录介质的方法包括在磁记录层上形成第一硬掩模，第二硬掩模和抗蚀剂膜，在抗蚀剂膜上压印印模以转印凹凸图案，去除 残留物保留在图案化抗蚀剂膜的凹部中，使用图案化的抗蚀剂膜作为掩模蚀刻第二硬掩模以转移凹凸和突起的图案，使用图案化的第二硬掩模作为掩模蚀刻第一硬掩模以转移凹槽的图案 和突起，并且通过离子束蚀刻去除第二硬掩模，使暴露于凹部中的磁记录层的磁性失活。
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