Method of manufacturing magnetic recording medium
    1.
    发明授权
    Method of manufacturing magnetic recording medium 有权
    磁记录介质的制造方法

    公开(公告)号:US08858809B2

    公开(公告)日:2014-10-14

    申请号:US13607134

    申请日:2012-09-07

    IPC分类号: B44C1/22 C03C15/00 G11B5/09

    CPC分类号: G11B5/855

    摘要: A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.

    摘要翻译: 磁记录介质的制造方法包括以下步骤:形成磁记录层,第一掩模层,含硅作为主要成分的第二掩模层,带状层,第三掩模层和抗蚀剂层,图案化步骤 提供图案的抗蚀剂层,将图案转移到第三掩模层的步骤,到带状层和第二掩模层,通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层,将图案转印到第一掩模层和磁记录层的步骤,以及剥离残留在磁记录层上的第一掩模层的步骤。

    METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM
    2.
    发明申请
    METHOD OF MANUFACTURING MAGNETIC RECORDING MEDIUM 有权
    制造磁记录介质的方法

    公开(公告)号:US20130248485A1

    公开(公告)日:2013-09-26

    申请号:US13607134

    申请日:2012-09-07

    IPC分类号: G11B5/84

    CPC分类号: G11B5/855

    摘要: A manufacturing method of a magnetic recording medium includes steps of forming a magnetic recording layer, a first mask layer, a second mask layer containing silicon as primary component, a strip layer, a third mask layer, and a resist layer, a step of patterning the resist layer to provide a pattern, steps of transferring the pattern to the third mask layer, to the strip layer, and to the second mask layer, a step of removing the strip layer by wet etching and of stripping the third mask layer and the resist layer above the magnetic recording layer, steps of transferring the pattern to the first mask layer and to the magnetic recording layer, and a step of stripping the first mask layer remaining on the magnetic recording layer.

    摘要翻译: 磁记录介质的制造方法包括以下步骤:形成磁记录层,第一掩模层,含硅作为主要成分的第二掩模层,带状层,第三掩模层和抗蚀剂层,图案化步骤 提供图案的抗蚀剂层,将图案转移到第三掩模层的步骤,到带状层和第二掩模层,通过湿法蚀刻去除剥离层并剥离第三掩模层的步骤和 抗蚀剂层,将图案转印到第一掩模层和磁记录层的步骤,以及剥离残留在磁记录层上的第一掩模层的步骤。

    Magnetic recording media, the manufacturing method for the same, and magnetic recording device
    8.
    发明授权
    Magnetic recording media, the manufacturing method for the same, and magnetic recording device 有权
    磁记录介质,其制造方法和磁记录装置

    公开(公告)号:US06667116B1

    公开(公告)日:2003-12-23

    申请号:US09559955

    申请日:2000-04-27

    IPC分类号: G11B566

    摘要: A magnetic recording medium which includes a non-magnetic base layer having layered upon it, in sequence, a non-magnetic middle layer and a magnetic layer. The magnetic layer has ferromagnetic crystal grains surrounded by non-magnetic grain boundaries. The non-magnetic middle layer is formed of a non-magnetic oxide or nitride, and is disposed between the non-magnetic base layer and the magnetic layer. The non-magnetic oxide or nitride in the middle layer forms a fine, island-like film. At the time of film formation of the granular magnetic layer on the middle layer, this island-like film performs stationing for the ferromagnetic crystal grains and the growth nucleus for the non-magnetic grain boundary. As a result, fine dispersion of the ferromagnetic crystal grains in the granular magnetic layer is hastened, and a high coercivity is obtained even with a small Pt composition ratio. The available reduction in Pt composition ratio reduces the cost of the magnetic recording medium. Controlling the film formation conditions to which the non-magnetic middle layer is exposed controls the dispersion structure and the like of the magnetic crystal grains in the magnetic layer. This, in turn, controls the magnetic properties and the electromagnetic conversion properties of the magnetic recording medium.

    摘要翻译: 一种磁记录介质,包括依次层叠有非磁性基层的非磁性中间层和磁性层。 磁性层具有由非磁性晶界包围的铁磁性晶粒。 非磁性中间层由非磁性氧化物或氮化物形成,并且设置在非磁性基底层和磁性层之间。 中间层中的非磁性氧化物或氮化物形成细的岛状膜。 在中间层上形成粒状磁性层时,该岛状膜对铁磁性晶粒和非磁性晶界的生长核进行固定。 结果,加速了粒状磁性层中铁磁性晶粒的微细分散,即使Pt组成比小,也能获得高的矫顽力。 Pt组成比的有效降低降低了磁记录介质的成本。 控制非磁性中间层露出的成膜条件控制磁性层中磁性晶粒的分散结构等。 这又控制磁记录介质的磁特性和电磁转换特性。