Facet optical coupler
    72.
    发明授权

    公开(公告)号:US09703038B1

    公开(公告)日:2017-07-11

    申请号:US14796678

    申请日:2015-07-10

    Inventor: Long Chen

    CPC classification number: G02B6/1228 G02B6/14 G02B6/24 G02B2006/12097

    Abstract: Techniques for forming a facet optical coupler to couple light at an edge of silicon substrate are described. The facet optical coupler includes a silicon substrate, a layer of second material disposed on the silicon substrate and in direct contact with the edge of the silicon substrate, and an undercut region disposed between a portion of the silicon substrate and the layer of second material. The undercut region is offset from the edge to provide mechanical integrity of the facet optical coupler to improve production of photonic integrated circuits having the facet optical coupler from a wafer.

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