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    Super-resolution scanning optical system by incoherently superimposing two beams
    71.
    发明授权
    Super-resolution scanning optical system by incoherently superimposing two beams 失效
    超分辨率扫描光学系统通过不连续地叠加两个光束

    公开(公告)号：US5625613A

    公开(公告)日：1997-04-29

    申请号：US394273

    申请日：1995-02-24

    申请人： Makoto Kato ,  Kenichi Kasazumi

    发明人： Makoto Kato ,  Kenichi Kasazumi

    IPC分类号： G02B26/10 ,  G02B21/00 ,  G02B27/58 ,  G11B7/005 ,  G11B7/125 ,  G11B7/135 ,  H04N1/113 ,  G11B7/00

    CPC分类号： G11B7/1353 ,  G11B7/005 ,  G11B7/127 ,  G11B7/1365 ,  G11B7/1395

    摘要： A linearly polarized light beam emitted from a first coherent light source is focused, as a primary beam, onto a preparation via an objective lens. A subsidiary beam emitted from a second coherent light source is a linearly polarized light beam having a plane of polarization perpendicular to that of the primary beam. The subsidiary beam is focused onto the above preparation as a double-humped beam having a center in the same position as that of the primary beam. The principal portion of the subsidiary beam is equal in size to that of the primary beam. The preparation is scanned with the two beams being superimposed on each other. After transmitted by the preparation, the two beams are separated into the primary beam and the subsidiary beam again upon passing through a second polarizing beam splitter so that they are detected individually by first and second optical detectors. Output signals from the first and second optical detectors are calculated by a differential calculator and displayed on a display unit via a second control means.

    摘要翻译： 从第一相干光源发射的线偏振光束作为主光束经由物镜聚焦到制剂上。 从第二相干光源发射的辅助光束是具有与主光束垂直的偏振平面的线偏振光束。 辅助光束聚焦在上述准备上，作为具有与主光束相同位置的中心的双峰波束。 辅助光束的主要部分的大小与主光束的主要部分相同。 扫描准备工作，将两个光束叠加在一起。 在通过准备物传送之后，两个光束在通过第二偏振分束器时再次分离成主光束和辅助光束，使得它们由第一和第二光学检测器单独检测。 来自第一和第二光学检测器的输出信号由差分计算器计算并通过第二控制装置显示在显示单元上。