摘要:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses, and partially etching the magnetic recording layer in areas not covered with patterns of the resist used as masks by ion beam etching using a mixed gas of He and N2 as well as modifying a remainder of the magnetic recording layer to leave behind a nonmagnetic layer having a reduced thickness.
摘要:
A patterned media has a substrate, and a magnetic recording layer on the substrate including protruded magnetic patterns and a nonmagnetic material filled in between the protruded magnetic patterns. In the patterned media, a depth Db and a depth Da, which are defined that Db is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a first central part between the magnetic patterns adjacent to each other in a cross-track direction or a down-track direction, and Da is a depth from a surface of the magnetic patterns to a surface of the nonmagnetic material filled in a second central part in a portion surrounded by the magnetic patterns, have a relationship that the depth Da is greater than the depth Db.
摘要:
According to one embodiment, pattern transfer is performed using a combination of an ultraviolet-curable resin having a surface tension of 31 to 39 mN/m and a stamper having a critical surface tension of 31 mN/m or less.
摘要:
According to one embodiment, a method of manufacturing a magnetic recording medium includes forming a first hard mask, a second hard mask and a resist on a magnetic recording layer, imprinting a stamper to the resist to transfer patterns of protrusions and recesses to the resist, removing residues remaining in the recesses of the patterned resist by means of a first etching gas, etching the second hard mask by means of the first etching gas using the patterned resist as a mask to transfer the patterns to the second hard mask, etching the first hard mask by means of a second etching gas different from the first etching gas using the second hard mask as a mask to transfer the patterns to the first hard mask, and performing ion beam etching in order to deactivate the magnetic recording layer exposed in the recesses and to remove the second hard mask.
摘要:
According to one embodiment, a magnetic recording media includes a magnetic recording layer formed on a substrate, in which recording tracks and servo areas are prescribed as patterns of protrusions and recesses formed on the magnetic recording layer so that thin film portions of the magnetic recording layer are formed under the recesses, a thickness of magnetic recording layer at the thin film portion is smaller than a thickness of magnetic recording layer at the protrusion in the servo area, and a magnetization direction of the protrusion is antiparallel to a magnetization direction of the thin film in the servo area.
摘要:
According to one embodiment, a stamper has a data area and servo area, and has concentric or spiral grooves formed in the data area. Phases αE and αH at which differential signal levels of the E- and H-polarized light are maximum when the data area is irradiated with a laser beam have a relationship represented by (αE+αH)≦270°
摘要:
According to one embodiment, a stamper has three-dimensional patterns in a dummy region. The three-dimensional patterns have a repeatable run out of 1 nm or less between the 15th and 40th orders when the rotational frequency is the first order as a reference.
摘要:
A method for producing a magnetic recording medium, includes: forming an SOG film on a surface of a magnetic layer; forming a concavo-convex structure in the SOG film comprising one selected from a group consisting of silica glass, alkylsiloxane polymer, methyl silsesquioxane polymer, hydrogen silsesquioxane polymer and hydro alkylsiloxane polymer; etching the SOG film to expose the surface of the magnetic layer; etching the exposed surface of the magnetic layer by ion milling; and forming a filling layer on the surface of the magnetic layer while leaving a portion of the magnetic layer having been subjected to the ion milling.
摘要:
An imprint stamper for manufacturing a recording medium includes a first transfer region which corresponds to a servo region of a recording medium using a sector servo system and has a pattern with a plurality of quadrilateral recess or protrusion portions formed in a surface thereof, and a second transfer region which corresponds to a data region of the recording medium and has a pattern with a plurality of dots of recess or protrusion portions arrayed in a form of a hexagonal lattice in a surface thereof.
摘要:
According to one embodiment, a magnetic recording medium includes magnetic patterns made of a ferromagnetic recording layer containing Co, and a nonmagnetic layer which separates the magnetic patterns and has a lower Co concentration than the magnetic patterns.