Abstract:
A magnetic field generating apparatus has a hollow permanent magnet formed of a plurality of permanent magnet elements arranged to have a polygonal section. Magnetization directions of the end portions of the hollow permanent magnet in its longitudinal direction are made different from those of the central portion thereof so that the magnetic field generated in a predetermined region in the hollow space of the permanent magnet is increased as compared with a case where the magnetizations of the hollow permanent magnet are all directed in the same direction.
Abstract:
An alignment apparatus for use in an exposure system for exposing fine patterns on a wafer, the alignment apparatus comprising a light source optical system for emitting coherent alignment light, a positional deviation detecting optical system for receiving the alignment light reflected from the wafer, and a light-receiving optical system for detecting a positional deviation of the wafer on the basis of the alignment light received by the positional deviation detecting optical system. These three optical systems are arranged to be coupled through flexible optical fibers to each other. This coupling arrangement using the flexible optical fiber can reduce the size of the positional deviation detecting optical system whereby the positional deviation detecting optical system can be disposed directly under a projection lens of the exposure system, thereby accurately effecting the alignment of the wafer with respect to the projection lens.
Abstract:
A position signal producing apparatus, for an apparatus for project-printing a pattern on a reticle onto a wafer through a project lens system with exposure light, for producing a position signal indicative of the position of the wafer is disclosed, wherein two different frequency components of alignment light whose frequencies are different from that of the exposure light are interfered with each other at a position alignment blank to form interference fringes having a given pitch. The interference fringes are projected onto a diffraction grating through an achromatizing optical system and the project lens system. Diffracted light returning from the diffraction grating is received by a photodetector which provides a light beat signal. A position deviation signal obtained by phase comparison of the light beat signal provides position alignment by controlling relative positions between the position alignment blank and the diffraction grating. Two light beams of the two different frequency components split by a polarized beam splitter are equalized in image converting condition, or image aspect, by a mirror, so that an accurate mixing of the two frequency components of light beams is performed at the position alignment blank.
Abstract:
In an imaging apparatus using the nuclear magnetic resonance, a solenoid coil and a slot-resonator coil are combined with each other so as to constitute a quadrature-phase detection probe. In order to operate the slot-resonator coil at low frequency, inductance is added to the slot-resonator coil. Further in order to cut the coupling between a transmitting coil and a receiving coil in a cross coil system, a capacitor together with the added inductance to form a resonant circuit is connected in parallel to the inductance. A favorable probe can be obtained in a vertical-magnetic field type imaging apparatus.
Abstract:
A heat exchanger having a plurality of tubes extending between front and rear tubesheets, baffles arranged inside the shell along a longitudinal direction of the tubes and 2 types of weld structures on respective tubesheets. Each of the tubes has an outer diameter in the range of 25.4 to 50.8 mm and the front tubesheet has a thickness less then 50 mm. The 2 types of welds comprise:(a) a structure (Type A) in which the tubesheet is provided with a hole having an inner diameter substantially equal to that of the tube, a protruded peripheral portion formed around an outside opening of the hole and an inside stepped cutout into which the end of the tube is inserted and a weld formed; and(b) a structure (Type B) in which the tube sheet is provided with an inner tapered hole and an adjacent communicating linear small diameter hole, a tube having an end portion provided with an inside stepped cutout which is inserted into the small diameter hole, and a weld formed.
Abstract:
Forming a shaped article of polysilazane, contacting this shaped article with dry ammonia at a temperature of 20.degree.-200.degree. C. to thereby effect infusibilization, and finally subjecting the ammonia-treated product to further heat treatment at a higher temperature in a nitrogen atmosphere to thereby produce a shaped ceramic article.
Abstract:
Before beginning a prior art imaging sequence, at first parts producing artifact are excited by applying a high frequency magnetic field thereto in a frequency band, which includes the parts emitting artifact and doesn't include a desired slice plane. Next, the phase of the excited spin is extremely rotated by applying at least one of gradient magnetic fields G.sub.x, G.sub.y, G.sub.z. When the prior art imaging sequence is effected thereafter, the produced artifact is imaged as a high spatial frequency component of an object body to be examined. Since a usual object body to be examined contains many low spatial frequency components and the power of high spatial frequency components is extremely small, it becomes possible to reduce the artifact in such an extent that it cannot be practically recognized.
Abstract:
A CT scanner including a scanning device including (a) device for rotating an x-ray source around an object to be examined, the x-ray source radiating x-rays, while the x-ray source is being rotated, in the form of fan beams covering a region of the object to be examined, and (b) a multielement x-ray detector for detecting x-ray fan beams transmitted through the object to thus collect data around the irradiated object; an arithmetic device for arithmetically reconstructing the distribution of the x-ray absorption coefficients of the object across a measured cross-section from the data; and a display for displaying the distribution where the arithmetic device includes a device for producing data equivalent to data derived from parallel beams not regularly spaced apart from each other from the collected data around the irradiated object, a device for subjecting the produced data to filtering, and a device for correcting inhomogeneity in the data equivalent to data derived from parallel beams not regularly spaced and for back-projecting the image of the distribution.
Abstract:
Systems and methods for magnetic resonance imaging, including adjusting spatial distribution of a rotating magnetic field. By minimizing imaging time, the B1 nonuniformity reducing effect of RF shimming is maximized for an imaging section of an arbitrary axis direction and an arbitrary position. B1 distributions are measured for only several sections of one predetermined direction, and a radio frequency magnetic field condition that maximizes the B1 non-uniformity reducing effect for an imaging section of an arbitrary direction and an arbitrary position is calculated from the B1 distribution data.
Abstract:
A technique is provided to reserve large examination space in the tunnel type MRI apparatus, without increasing production cost nor reducing significantly irradiation efficiency and homogeneity in an irradiation distribution within an imaging region. The present invention provides an RF coil unit in which four partial cylindrical coils are placed with a gap therebetween in the circumferential direction inside a cylindrical RF shield, in such a manner that two pairs of the partial cylindrical coils are opposed to each other, and magnetic fields produced by the individual partial cylindrical coils are combined, thereby producing a circularly polarized wave field or an elliptically polarized wave field. The partial cylindrical coil is provided with a partial cylindrical conductor, multiple first conductors substantially parallel with the central axis of the RF shield, multiple capacitors connecting both ends of the first conductors with the partial cylindrical conductor, and a second conductor adjacent to at least one of the ends of the first conductor. The partial cylindrical coils are respectively provided with high frequency signals having a desired amplitude ratio and phase difference, while a reference frequency thereof being identical.