公开(公告)号：US20150092168A1

公开(公告)日：2015-04-02

申请号：US14563792

申请日：2014-12-08

Applicant: ASML NETHERLANDS B.V.

Inventor： Siegfried Alexander Tromp ,  Nicolaas Ten Kate ,  Raymond Wilhelmus Louis Lafarre

IPC: G03F7/20

CPC classification number: G03F7/70716 ,  G03F7/70341 ,  G03F7/707 ,  G03F7/7085 ,  G03F7/70875 ,  G03F7/7095 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6838 ,  H01L22/26 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A substrate holder for use in a lithographic apparatus. The substrate holder comprises a main body, a plurality of burls and a heater and/or a temperature sensor. The main body has a surface. The plurality of burls project from the surface and have end surfaces to support a substrate. The heater and/or temperature sensor is provided on the main body surface. The substrate holder is configured such that when a substrate is supported on the end surfaces, a thermal conductance between the heater and/or temperature sensor and the substrate is greater than a thermal conductance between the heater and/or temperature sensor and the main body surface.

Abstract translation: 用于光刻设备的衬底保持器。 衬底保持器包括主体，多个毛刺和加热器和/或温度传感器。 主体有一个表面。 多个毛刺从表面突出并具有端面以支撑基底。 加热器和/或温度传感器设置在主体表面上。 衬底保持器构造成使得当衬底被支撑在端表面上时，加热器和/或温度传感器和衬底之间的热导率大于加热器和/或温度传感器与主体表面之间的热导率 。

公开(公告)号：US20140368804A1

公开(公告)日：2014-12-18

申请号：US14374197

申请日：2013-01-17

Applicant: ASML Netherlands B.V.

Inventor： Raymond Wilhelmus Louis Lafarre ,  Sjoerd Nicolaas Lambertus Donders ,  Nicolaas Ten Kate ,  Nina Vladimirovna Dziomkina ,  Yogesh Pramod Karade ,  Elisabeth Corinne Rodenburg

IPC: G03F7/20 ,  B23Q3/18

CPC classification number: B22F7/062 ,  B05D3/06 ,  B05D5/00 ,  B22F3/1055 ,  B23K26/342 ,  B23K26/354 ,  B23Q3/18 ,  B33Y10/00 ,  B33Y80/00 ,  G03F7/20 ,  G03F7/70341 ,  G03F7/70416 ,  G03F7/707 ,  G03F7/70708 ,  G03F7/70716 ,  G03F7/70733 ,  G03F7/708

Abstract: A substrate holder for a lithographic apparatus has a main body having a thin-film stack provided on a surface thereof. The thin-film stack forms an electronic or electric component such as an electrode, a sensor, a heater, a transistor or a logic device, and has a top isolation layer. A plurality of burls to support a substrate are formed on the thin-film stack or in apertures of the thin-film stack.

Abstract translation: 用于光刻设备的衬底保持器具有设置在其表面上的薄膜堆叠的主体。 薄膜堆叠形成诸如电极，传感器，加热器，晶体管或逻辑器件的电子或电气部件，并且具有顶部隔离层。 在薄膜叠层或薄膜叠层的孔中形成有用于支撑衬底的多个毛刺。