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公开(公告)号:US4985310A
公开(公告)日:1991-01-15
申请号:US405418
申请日:1989-09-05
申请人: Birendra N. Agarwala , Keith F. Beckman , Alice H. Cooper-Joselow , Chandrasekhar Narayan , Sampath Purushothaman , Sudipta K. Ray
发明人: Birendra N. Agarwala , Keith F. Beckman , Alice H. Cooper-Joselow , Chandrasekhar Narayan , Sampath Purushothaman , Sudipta K. Ray
IPC分类号: H01L23/498 , H01L23/532 , H05K3/24
CPC分类号: H05K3/24 , H01L23/49866 , H01L23/53233 , H01L23/53238 , H01L2924/0002 , Y10T428/12528 , Y10T428/12535 , Y10T428/12743 , Y10T428/12806 , Y10T428/12854 , Y10T428/12889 , Y10T428/1291
摘要: Disclosed is a multilayered metallurgical structure for an electronic component. The structure includes a base metallurgy which includes one or more layers of chromium, titanium, zirconium, hafnium, niobium, molybdenum, tantalum, cooper and/or aluminum. Directly on the base metallurgy is a layer of cobalt. The structure may also include a layer of noble or relatively noble metal such as gold, platinum, palladium and/or tin directly on the cobalt.
摘要翻译: 公开了一种用于电子部件的多层冶金结构。 该结构包括基本冶金,其包括一层或多层铬,钛,锆,铪,铌,钼,钽,铜和/或铝。 直接在基础冶金上是一层钴。 该结构还可以包括贵金属或相对贵重的金属层,例如直接在钴上的金,铂,钯和/或锡。