Sputtering target for forming protective film and laminated wiring film
    5.
    发明授权
    Sputtering target for forming protective film and laminated wiring film 有权
    用于形成保护膜和层压布线膜的溅射靶

    公开(公告)号:US09543128B2

    公开(公告)日:2017-01-10

    申请号:US14090203

    申请日:2013-11-26

    摘要: A sputtering target for forming protective film according to the invention is used to form protective film on one surface or both surfaces of a Cu wiring film, and includes 8.0 to 11.0% by mass of Al, 3.0 to 5.0% by mass of Fe, 0.5 to 2.0% by mass of Ni and 0.5 to 2.0% by mass of Mn with a remainder of Cu and inevitable impurities. In addition, a laminated wiring film includes a Cu wiring film and protective film formed on one surface or both surfaces of the Cu wiring film, and the protective film is formed by using the above sputtering target.

    摘要翻译: 根据本发明的用于形成保护膜的溅射靶用于在Cu布线膜的一个表面或两个表面上形成保护膜,并且包括8.0至11.0质量%的Al,3.0至5.0质量%的Fe,0.5 至2.0质量%的Ni和0.5〜2.0质量%的Mn,余量为Cu和不可避免的杂质。 此外,层叠布线膜包括Cu布线膜和形成在Cu布线膜的一个表面或两个表面上的保护膜,并且通过使用上述溅射靶形成保护膜。

    COPPER FOIL WITH CARRIER
    7.
    发明申请
    COPPER FOIL WITH CARRIER 有权
    铜箔与承运人

    公开(公告)号:US20160242281A1

    公开(公告)日:2016-08-18

    申请号:US15139482

    申请日:2016-04-27

    IPC分类号: H05K1/09

    摘要: Provided is a copper foil for a printed wiring board including a roughened layer on at least one surface thereof. In the roughened layer, the average diameter D1 at the particle bottom being apart from the bottom of each particle by 10% of the particle length is 0.2 to 1.0 μm, and the ratio L1/D1 of the particle length L1 to the average diameter D1 at the particle bottom is 15 or less. In the copper foil for printed wiring board, when a copper foil for printed wiring having a roughened layer is laminated to a resin and then the copper layer is removed by etching, the sum of areas of holes accounting for the resin roughened surface having unevenness is 20% or more. The present invention involves the development of a copper foil for a semiconductor package substrate that can avoid circuit erosion without causing deterioration in other properties of the copper foil. In particular, an object of the present invention is to provide a copper foil for a printed wiring board and a method of producing the copper foil, in which the adhesion strength between the copper foil and the resin can be enhanced by improvement of the roughened layer of the copper foil.

    摘要翻译: 提供一种用于印刷电路板的铜箔,其在其至少一个表面上包括粗糙层。 在粗糙层中,粒子底部的平均粒径D1与粒子的底部相隔10%的粒子长度为0.2〜1.0μm,粒子长度L1与平均直径D1的比L1 / D1 在颗粒底部为15或更小。 在印刷电路板用铜箔中,当将具有粗糙层的印刷布线用铜箔层压到树脂上,然后通过蚀刻除去铜层时,占据具有凹凸的树脂粗糙面的孔面积之和为 20%以上。 本发明涉及开发用于半导体封装基板的铜箔,其可以避免电路侵蚀而不会导致铜箔的其它性能的劣化。 特别地,本发明的目的是提供一种用于印刷线路板的铜箔和铜箔的制造方法,其中可以通过改善粗糙层来提高铜箔和树脂之间的粘附强度 的铜箔。