公开(公告)号：US20080291583A1

公开(公告)日：2008-11-27

申请号：US11802220

申请日：2007-05-21

申请人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

发明人： Kosuke Tanaka ,  Kazuki Sato ,  Eiji Komura

IPC分类号： G11B5/11

CPC分类号： G11B5/3967 ,  B82Y25/00 ,  G01R33/093 ,  G11B5/3912 ,  G11B5/3932 ,  H01L43/08 ,  H01L43/12

摘要： A method of producing a thin film magnetic head includes the steps of: forming a pair of openings in a predetermined region of a TMR layer formed on a lower magnetic shield layer; forming a pair of bias-applying layers in the pair of Openings so that an upper surface thereof may be located above an upper surface of the TMR layer; laminating a metal layer that covers the upper surface of a portion located between the pair of bias-applying layers in the TMR layer and the upper surface of the pair of bias-applying layers; forming a resist layer across the upper surface of a portion located above the pair of bias-applying layers in the metal layer and the upper surface of a portion located above the TMR layer in the metal layer; and etching a part of the TMR layer and a part of the pair of bias-applying layers with the resist layer being as a mask. Here, the reflectivity R for the incident light having a wavelength of 248 nm at an interface between the metal layer and the resist layer is set so as to satisfy the condition represented by the following formula (1), and also the magnitude D of a step is set so as to satisfy the condition represented by the following formula (2). R≧0.2   (1) D≧210 exp(−7.6R) [nm]   (2)

摘要翻译： 制造薄膜磁头的方法包括以下步骤：在形成在下磁屏蔽层上的TMR层的预定区域中形成一对开口; 在所述一对开口中形成一对偏置施加层，使得其上表面可以位于所述TMR层的上表面之上; 层叠覆盖位于所述TMR层中的所述一对偏置施加层之间的部分的上表面的金属层和所述一对偏置施加层的上表面; 在位于所述金属层中的所述一对偏置施加层上方的部分的上表面和位于所述金属层中的所述TMR层上方的部分的上表面上形成抗蚀剂层; 并且将抗蚀剂层作为掩模蚀刻TMR层的一部分和一对偏置施加层的一部分。 这里，在金属层和抗蚀剂层之间的界面处的波长为248nm的入射光的反射率R被设定为满足由下式（1）表示的条件，也设定为 设定步骤以满足由下式（2）表示的条件。 <？in-line-formula description =“In-line Formulas”end =“lead”？> R> = 0.2（1）<？in-line-formula description =“In-line Formulas”end =“tail”？ > <？in-line-formula description =“在线公式”end =“lead”？> D> = 210 exp（-7.6R）[nm]（2）<？in-line-formula description =“In “公式”end =“tail”？>

公开(公告)号：US08432773B2

公开(公告)日：2013-04-30

申请号：US12962878

申请日：2010-12-08

申请人： Shinji Hara ,  Kosuke Tanaka ,  Keita Kawamori ,  Daisuke Miyauchi ,  Takahiko Izawa ,  Eiji Komura

发明人： Shinji Hara ,  Kosuke Tanaka ,  Keita Kawamori ,  Daisuke Miyauchi ,  Takahiko Izawa ,  Eiji Komura

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  B82Y10/00 ,  B82Y25/00 ,  G11B2005/0021

摘要： A thermally-assisted magnetic head that has an air bearing surface (ABS) facing a recording medium and that performs magnetic recording while heating the recording medium includes: a magnetic recording element that includes a pole of which an edge part is positioned on the ABS and which generates magnetic flux traveling to the recording medium; a waveguide that is configured with a core through which light propagates and a cladding, surrounding a periphery of the core, at least one part of which extends to the ABS; a plasmon generator that faces a part of the core and that extends toward the ABS side; and a bank layer that is positioned between the plasmon generator and the pole, and of which an edge part on the ABS side protrudes relative to the plasmon generator.

摘要翻译： 具有面向记录介质的空气轴承表面（ABS）并且在加热记录介质的同时执行磁记录的热辅助磁头包括：磁记录元件，其包括边缘部分位于ABS上的极点和 其产生传播到记录介质的磁通量; 波导，其配置有光传播的芯和包围芯，围绕芯的周边，其至少一部分延伸到ABS; 等离子体发生器，其面向所述芯的一部分并朝向ABS侧延伸; 以及位于等离子体发生器和极之间的堤层，并且ABS侧上的边缘部分相对于等离子体发生器突出。

公开(公告)号：US08374059B2

公开(公告)日：2013-02-12

申请号：US13045992

申请日：2011-03-11

申请人： Takahiko Izawa ,  Tsutomu Chuo ,  Eiji Komura ,  Kosuke Tanaka

发明人： Takahiko Izawa ,  Tsutomu Chuo ,  Eiji Komura ,  Kosuke Tanaka

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G02B6/10 ,  G11B5/3106 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/0021

摘要： A heat-assisted magnetic write head includes a magnetic pole having an end surface exposed at an air bearing surface, a waveguide extending toward the air bearing surface to propagate light, a first pair of clads made of a first dielectric material having a refractive index lower than that of the waveguide, and sandwiching the waveguide in a track width direction, and a second pair of clads made of a second dielectric material having a refractive index lower than that of the first dielectric material, and sandwiching the waveguide in a thickness direction orthogonal to the track width direction. Further, the heat-assisted magnetic write head may include, between the magnetic pole and the waveguide, a plasmon generator generating near-field light from the air bearing surface, based on light propagating through the waveguide.

摘要翻译： 一种热辅助磁性写头包括：具有在空气轴承表面露出的端面的磁极;向空气轴承表面延伸以传播光的波导;由折射率较低的第一介电材料制成的第一对包层 和波导夹着波导宽度方向的第二对夹层，以及折射率低于第一介电体的折射率的第二介电材料构成的第二对夹层，并将波导夹在厚度方向正交 到轨道宽度方向。 此外，热辅助磁写头可以包括在磁极和波导之间的等离子体发生器，其基于通过波导传播的光产生从空气轴承表面产生近场光。

公开(公告)号：US08264920B1

公开(公告)日：2012-09-11

申请号：US13191913

申请日：2011-07-27

申请人： Tsutomu Chou ,  Eiji Komura ,  Shinji Hara ,  Daisuke Miyauchi ,  Kosuke Tanaka

发明人： Tsutomu Chou ,  Eiji Komura ,  Shinji Hara ,  Daisuke Miyauchi ,  Kosuke Tanaka

IPC分类号： G11B11/00 ,  G11B7/135

CPC分类号： G11B5/314 ,  B82Y20/00 ,  G02B6/1226 ,  G11B5/3116 ,  G11B5/6088 ,  G11B2005/0021

摘要： A near-field light generator includes a waveguide, a plasmon generator, and a metal layer. The waveguide includes a core having an evanescent light generating surface. The plasmon generator includes a base part, and a protruding part that protrudes from the base part toward the evanescent light generating surface. The protruding part has: a front end face located at an end in a direction parallel to the evanescent light generating surface; a band-shaped flat surface facing toward the evanescent light generating surface; and two side surfaces connected to the flat surface. In at least a portion of the protruding part, the distance between the two side surfaces increases with increasing distance from the evanescent light generating surface. The flat surface includes a first portion contiguous with the front end face, and a second portion that is located farther from the front end face than is the first portion. The metal layer has an end face facing the first portion. The evanescent light generating surface faces the second portion.

摘要翻译： 近场光发生器包括波导管，等离子体激元发生器和金属层。 波导包括具有ev逝光产生表面的芯。 等离子体发生器包括基部和从基部朝向渐逝光产生表面突出的突出部分。 所述突出部具有：前端面，其位于与所述ev逝光生成面平行的方向的端部; 面向渐逝光产生表面的带状平坦表面; 以及连接到平坦表面的两个侧表面。 在突出部分的至少一部分中，两个侧表面之间的距离随着与渐消光产生表面的距离的增加而增加。 平坦表面包括与前端面相邻的第一部分，以及比第一部分更远离前端面的第二部分。 金属层具有面向第一部分的端面。 渐逝光产生表面面向第二部分。

公开(公告)号：US08125857B2

公开(公告)日：2012-02-28

申请号：US12728600

申请日：2010-03-22

申请人： Kosuke Tanaka ,  Daisuke Miyauchi ,  Susumu Aoki ,  Tetsuya Roppongi ,  Tsutomu Chou ,  Shinji Hara ,  Eiji Komura

发明人： Kosuke Tanaka ,  Daisuke Miyauchi ,  Susumu Aoki ,  Tetsuya Roppongi ,  Tsutomu Chou ,  Shinji Hara ,  Eiji Komura

IPC分类号： G11B11/00

CPC分类号： G11B5/314 ,  G11B5/3163 ,  G11B5/6088 ,  G11B2005/001 ,  G11B2005/0021

摘要： A plasmon generator has an outer surface including a propagation edge, and has a near-field light generating part lying at an end of the propagation edge and located in a medium facing surface. The propagation edge faces an evanescent light generating surface of a waveguide's core with a predetermined distance therebetween and extends in a direction perpendicular to the medium facing surface. The propagation edge is arc-shaped in a cross section parallel to the medium facing surface. The plasmon generator includes a shape changing portion in which a radius of curvature of the propagation edge in the cross section parallel to the medium facing surface continuously decreases with decreasing distance to the medium facing surface.

摘要翻译： 等离子体发生器具有包括传播边缘的外表面，并且具有位于传播边缘的末端并位于面向介质的表面中的近场光产生部分。 传播边缘面向波导芯的ev逝光产生表面，其间具有预定距离，并且在垂直于介质面向表面的方向上延伸。 传播边缘在平行于面向介质的表面的横截面中是弧形的。 等离子体发生器包括形状改变部分，其中平面于介质面向表面的横截面中的传播边缘的曲率半径随着到面向介质的表面的距离的减小而连续地减小。

公开(公告)号：US20130033972A1

公开(公告)日：2013-02-07

申请号：US13204026

申请日：2011-08-05

申请人： Shinji Hara ,  Tsutomu Chou ,  Eiji Komura

发明人： Shinji Hara ,  Tsutomu Chou ,  Eiji Komura

IPC分类号： G11B7/1387 ,  G11B13/04

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： A thermally-assisted magnetic recording head that includes a pole that generates a writing magnetic field, a waveguide through which light propagates, a plasmon generator that surface-evanescent-couples with the light propagating through the waveguide, wherein the plasmon generator includes a portion where a cross-sectional area gradually decreases as going toward a depth side from an air bearing surface when being observed from a cross section parallel to the air bearing surface. The volume of the plasmon generator can be decreased and an exposed area of a front surface on the air bearing surface can be increased. When a thermal expansion from the temperature increase occurs in the plasmon generator, a rate that the plasmon generator projects from the air bearing surface is suppressed to extremely low levels. Accordingly, a chronological degradation of output can be suppressed and thermally-assisted recording having a high and long-term reliability is achieved.

摘要翻译： 一种热辅助磁记录头，其包括产生写入磁场的极，光传播的波导，与通过波导传播的光表面衰减耦合的等离子体发生器，其中等离子体激元发生器包括 当从平行于空气轴承表面的横截面观察时，横截面积随着从空气轴承表面的深度侧逐渐减小。 可以减小等离子体发生器的体积，并且可以增加空气轴承表面上的前表面的暴露面积。 当在等离子体发生器中发生温度升高的热膨胀时，等离子体发生器从空气轴承表面突出的速率被抑制到极低的水平。 因此，可以抑制输出的时间性降低，并且实现具有高和长期可靠性的热辅助记录。

公开(公告)号：US08400886B2

公开(公告)日：2013-03-19

申请号：US13204026

申请日：2011-08-05

申请人： Shinji Hara ,  Tsutomu Chou ,  Eiji Komura

发明人： Shinji Hara ,  Tsutomu Chou ,  Eiji Komura

IPC分类号： G11B11/00

CPC分类号： G11B5/6088 ,  G11B5/314 ,  G11B2005/0021

摘要： A thermally-assisted magnetic recording head that includes a pole that generates a writing magnetic field, a waveguide through which light propagates, a plasmon generator that surface-evanescent-couples with the light propagating through the waveguide, wherein the plasmon generator includes a portion where a cross-sectional area gradually decreases as going toward a depth side from an air bearing surface when being observed from a cross section parallel to the air bearing surface. The volume of the plasmon generator can be decreased and an exposed area of a front surface on the air bearing surface can be increased. When a thermal expansion from the temperature increase occurs in the plasmon generator, a rate that the plasmon generator projects from the air bearing surface is suppressed to extremely low levels. Accordingly, a chronological degradation of output can be suppressed and thermally-assisted recording having a high and long-term reliability is achieved.

摘要翻译： 一种热辅助磁记录头，其包括产生写入磁场的极，光传播的波导，与通过波导传播的光表面衰减耦合的等离子体发生器，其中等离子体激元发生器包括 当从平行于空气轴承表面的横截面观察时，横截面积随着从空气轴承表面的深度侧逐渐减小。 可以减小等离子体发生器的体积，并且可以增加空气轴承表面上的前表面的暴露面积。 当在等离子体发生器中发生温度升高的热膨胀时，等离子体发生器从空气轴承表面突出的速率被抑制到极低的水平。 因此，可以抑制输出的时间性降低，并且实现具有高和长期可靠性的热辅助记录。

公开(公告)号：US08270791B2

公开(公告)日：2012-09-18

申请号：US12898063

申请日：2010-10-05

申请人： Eiji Komura ,  Tsutomu Chou

发明人： Eiji Komura ,  Tsutomu Chou

IPC分类号： G11B7/135 ,  G02B6/34 ,  G02B6/42

CPC分类号： G02B6/1226 ,  B82Y20/00 ,  G02B6/1228 ,  G02B6/4214 ,  G11B5/3116 ,  G11B5/314 ,  G11B5/6088 ,  G11B2005/0021

摘要： An optical waveguide of the invention includes a core that is a waveguide through which light propagates; and a cladding that surrounds the core. The core has a plate shape and includes a wide core base part onto which the light is incident, a taper part that is connected to the core base part and of which a width is gradually tapered along a propagation direction, and a narrow front end core part that is connected to the taper part and that extends along the propagation direction. A grating is provided on one of planar surfaces of the wide core base part, the grating is formed by engraving a number of concave grooves having a rectangular cross section on the planar surface along a width direction thereof, the grating is formed to be optically coupled with laser light that is incident perpendicularly onto the grating formation surface, a frequency (grating pitch: pitch of the concave grooves) of the grating is smaller than a wavelength (defined as a wavelength in the cladding) of the perpendicularly incident laser light, and a groove depth H1 of the grating is formed with respect to a thickness H2 of the core base part so that a relationship H1=(0.33 to 0.67)×H2 is satisfied.

摘要翻译： 本发明的光波导包括：芯，其是光传播的波导; 以及围绕芯的包层。 芯具有板状，并且包括光入射的宽核心基部，与芯基部连接并且宽度沿着传播方向逐渐变细的锥形部，并且窄前端芯 连接到锥形部分并且沿着传播方向延伸的部分。 光栅设置在宽核心基部的一个平面表面上，光栅通过沿平面的宽度方向雕刻多个具有矩形横截面的凹槽而形成，光栅形成为光耦合 利用垂直于光栅形成面入射的激光，光栅的频率（光栅间距：凹槽的间距）小于垂直入射的激光的波长（被定义为包层的波长）），并且 相对于芯基部的厚度H2形成光栅的槽深H1，使得满足关系H1 =（0.33〜0.67）×H2。

公开(公告)号：US08170389B1

公开(公告)日：2012-05-01

申请号：US13016085

申请日：2011-01-28

申请人： Eiji Komura ,  Tsutomu Chou

发明人： Eiji Komura ,  Tsutomu Chou

IPC分类号： G02B6/10

CPC分类号： G02B6/1228 ,  B82Y20/00 ,  G02B6/1226 ,  G02B6/4203 ,  G11B5/314 ,  G11B5/4866 ,  G11B2005/0021

摘要： An optical waveguide includes a core and a clad. The core includes first to third propagation parts, and a coupling part that couples the first to third propagation parts together. The first propagation part has a first incidence end face on which part of incident light is incident, and a first emission part that emits first propagation light. The second propagation part has a second incidence end face on which another part of the incident light is incident, and a second emission part that emits second propagation light. In the coupling part, a first light wave resulting from the first propagation light and a second light wave resulting from the second propagation light occur, and the first and second light waves interfere with each other to generate third propagation light to be emitted from a third emission part. The third propagation part propagates the third propagation light.

摘要翻译： 光波导包括芯和包层。 芯部包括第一至第三传播部分，以及将第一至第三传播部分耦合在一起的耦合部分。 第一传播部分具有入射光的一部分入射的第一入射端面和发射第一传播光的第一发射部分。 第二传播部分具有入射光的另一部分入射的第二入射端面和发射第二传播光的第二发射部分。 在耦合部分中，产生由第一传播光产生的第一光波和由第二传播光产生的第二光波，并且第一和第二光波彼此干涉以产生将从第三传播光发射的第三传播光 排放部分。 第三传播部分传播第三传播光。

公开(公告)号：US08040761B2

公开(公告)日：2011-10-18

申请号：US12457886

申请日：2009-06-24

申请人： Keita Kawamori ,  Makoto Isogai ,  Susumu Aoki ,  Daisuke Miyauchi ,  Eiji Komura

发明人： Keita Kawamori ,  Makoto Isogai ,  Susumu Aoki ,  Daisuke Miyauchi ,  Eiji Komura

IPC分类号： G11B11/00

CPC分类号： G11B5/3116 ,  G11B5/314 ,  G11B5/3166 ,  G11B5/6088 ,  G11B7/1387 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A near-field light generating device includes: a waveguide; a buffer layer disposed on the top surface of the waveguide; an adhesion layer that is formed by incompletely oxidizing a metal layer and disposed on the buffer layer; and a near-field light generating element disposed on the adhesion layer. The adhesion layer has a resistance-area product higher than that of the metal layer unoxidized and lower than that of a layer that is formed by completely oxidizing the metal layer. A layered structure consisting of the buffer layer, the adhesion layer and the near-field light generating element has a peel-test adhesive strength higher than that of a layered structure consisting of the buffer layer and the near-field light generating element.

摘要翻译： 近场光产生装置包括：波导管; 设置在所述波导的顶面上的缓冲层; 通过不完全氧化金属层而形成并设置在缓冲层上的粘附层; 以及设置在粘附层上的近场光产生元件。 粘合层的电阻面积比未氧化的金属层的电阻面积乘积低于通过完全氧化金属层而形成的层的电阻率积。 由缓冲层，粘附层和近场光产生元件组成的分层结构的剥离测试粘合强度高于由缓冲层和近场光产生元件组成的层状结构的剥离测试粘合强度。