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81.发明授权公开(公告)号：US08287748B2
公开(公告)日：2012-10-16
申请号：US12654548
申请日：2009-12-23
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Jianing Zhou , Min Li
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Jianing Zhou , Min Li
IPC分类号： B44C1/22
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an accommodation layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes the steps of: forming a groove defining layer on a nonmagnetic layer that is intended to later become the accommodation layer; forming a mask that covers an area of the nonmagnetic layer where to form the first portion of the groove; etching the nonmagnetic layer so that the second portion of the groove is formed in the nonmagnetic layer; removing the mask; and taper-etching the nonmagnetic layer so that the first portion of the groove is formed in the nonmagnetic layer and the groove is thereby completed.
摘要翻译： 磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及容纳层，其设置在底部形成层上并具有容纳极层的槽。 凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。 磁头的制造方法包括以下步骤：在旨在稍后成为调节层的非磁性层上形成凹槽限定层; 形成覆盖形成所述槽的第一部分的非磁性层的区域的掩模; 蚀刻非磁性层，使得凹槽的第二部分形成在非磁性层中; 去除面膜; 并且对非磁性层进行锥形蚀刻，使得凹槽的第一部分形成在非磁性层中，从而完成凹槽。
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82.发明授权公开(公告)号：US08194511B2
公开(公告)日：2012-06-05
申请号：US12727666
申请日：2010-03-19
IPC分类号： G11B11/00
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A near-field light generating element has an outer surface including a bottom surface that lies at an end closer to a top surface of a substrate, a waveguide facing surface that lies at an end farther from the top surface of the substrate and faces a waveguide, a front end face located in a medium facing surface, and a side surface that connects the bottom surface, the waveguide facing surface and the front end face to each other. The front end face includes a first side that lies at an end of the bottom surface, a tip that lies at an end farther from the top surface of the substrate and forms a near-field light generating part, a second side that connects an end of the first side to the tip, and a third side that connects the other end of the first side to the tip. The waveguide facing surface includes a width changing portion that has a width in a direction parallel to the bottom surface and the front end face, the width decreasing with decreasing distance to the front end face.
摘要翻译： 近场光产生元件具有外表面，该外表面包括位于更靠近基板顶表面的一端的底表面，位于远离基板顶表面的一端的波导对面的表面 ，位于介质相对表面中的前端面以及将所述底表面，所述波导对向表面和所述前端面彼此连接的侧表面。 所述前端面包括位于所述底面的端部的第一侧，位于距离所述基板的上表面更远的一端并形成近场光产生部的端部，所述第二侧将端部 并且将第一侧的另一端连接到尖端的第三侧。 面向波导的表面包括宽度改变部分，该宽度改变部分在平行于底面和前端面的方向上具有宽度，宽度随着与前端面的距离的减小而减小。
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83.发明授权公开(公告)号：US08107192B2
公开(公告)日：2012-01-31
申请号：US12588686
申请日：2009-10-23
IPC分类号： G11B5/127
CPC分类号： G11B5/314 , G11B5/1278 , G11B2005/001 , G11B2005/0021
摘要： A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror fixed to the laser diode. The laser diode has: an emitting end face that includes an emission part for emitting laser light; a mounting surface that lies at an end in a direction perpendicular to the plane of an active layer and faces the slider; and a rear surface opposite to the mounting surface. The external mirror includes: a first to-be-fixed part disposed along the emitting end face; a second to-be-fixed part disposed along the rear surface; and a coupling part that couples the first and second to-be-fixed parts to each other. The first to-be-fixed part has a reflecting surface that reflects the laser light emitted from the emission part toward the waveguide.
摘要翻译： 热辅助磁记录头包括滑块，固定到滑块的边缘发射激光二极管和固定到激光二极管的外反射镜。 激光二极管具有：发射端面，其包括用于发射激光的发射部分; 安装表面位于垂直于有源层的平面的方向上的端部并且面向滑块; 以及与安装表面相对的后表面。 外部反射镜包括：沿着发射端面设置的第一待固定部分; 沿着后表面设置的第二待固定部分; 以及将第一和第二固定部件彼此连接的联接部。 第一待固定部分具有将从发射部分发射的激光朝向波导反射的反射表面。
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84.发明授权公开(公告)号：US08056214B2
公开(公告)日：2011-11-15
申请号：US12461644
申请日：2009-08-19
申请人： Yoshitaka Sasaki , Kazuo Ishizaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Atsushi Iljima
发明人： Yoshitaka Sasaki , Kazuo Ishizaki , Hironori Araki , Hiroyuki Ito , Shigeki Tanemura , Atsushi Iljima
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A magnetic head includes a pole layer, first and second side shields, and an encasing layer having a pole groove that accommodates the pole layer and first and second side shield grooves that accommodate the first and second side shields. In a manufacturing method for the magnetic head, the pole groove and first and second initial side shield grooves are formed in a nonmagnetic layer using an etching mask layer having first to third openings. In the manufacturing method, a wall face of the first initial side shield groove that is closer to the pole groove and a wall face of the second initial side shield groove that is closer to the pole groove are etched by dry etching to thereby complete the first and second side shield grooves.
摘要翻译： 磁头包括极层，第一和第二侧面屏蔽以及具有容纳磁极层的磁极槽和容纳第一和第二侧面屏蔽件的第一和第二侧面屏蔽槽的封装层。 在磁头的制造方法中，使用具有第一至第三开口的蚀刻掩模层，将磁极槽和第一和第二初始侧屏蔽槽形成为非磁性层。 在制造方法中，通过干蚀刻来蚀刻靠近极槽的第一初始侧屏蔽槽的壁面和靠近极槽的第二初始侧屏蔽槽的壁面，从而完成第一 和第二侧屏蔽槽。
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85.发明申请公开(公告)号：US20110228417A1
公开(公告)日：2011-09-22
申请号：US12727620
申请日：2010-03-19
IPC分类号： G11B5/02
CPC分类号： G11B5/314 , G11B5/3163 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A near-field light generating element has an outer surface. The outer surface includes a bottom surface, first and second inclined surfaces, an edge part that connects the first and second inclined surfaces to each other, and a front end face located in a medium facing surface. The front end face includes a first side that lies at an end of the first inclined surface, a second side that lies at an end of the second inclined surface, and a tip that is formed by contact of the first and second sides with each other and forms a near-field light generating part. Each of the first side and the second side has a lower part and an upper part that are continuous with each other. An angle formed between the upper part of the first side and the upper part of the second side is smaller than that formed between the lower part of the first side and the lower part of the second side.
摘要翻译： 近场光产生元件具有外表面。 外表面包括底面，第一和第二倾斜表面，将第一和第二倾斜表面彼此连接的边缘部分和位于介质面向表面中的前端面。 前端面包括位于第一倾斜面的端部的第一侧，位于第二倾斜面的端部的第二侧和通过第一和第二侧面彼此接触形成的前端部 并形成近场光产生部。 第一侧和第二侧中的每一个具有彼此连续的下部和上部。 形成在第一侧的上部和第二侧的上部之间的角度小于在第一侧的下部和第二侧的下部之间形成的角度。
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86.发明申请公开(公告)号：US20110210095A1
公开(公告)日：2011-09-01
申请号：US12714998
申请日：2010-03-01
CPC分类号： G11B5/314 , B24B37/048 , G11B5/3163 , G11B2005/0021
摘要： A near-field light generating element has an outer surface including first and second inclined surfaces and an edge part that connects the first and second inclined surfaces to each other. In a method of manufacturing the near-field light generating element, a polishing stopper layer is initially formed on a metal layer, and the polishing stopper layer and the metal layer are etched so that the metal layer is provided with the first inclined surface. Next, a coating layer is formed to cover the metal layer and the polishing stopper layer. The coating layer is made of a non-metallic inorganic material that has an etching rate lower than that of the metal layer in a second etching step to be performed later. Next, the coating layer is polished until the polishing stopper layer is exposed. Next, the second etching step is performed to etch the polishing stopper layer and the metal layer using the coating layer as the etching mask. This provides the metal layer with the second inclined surface and the edge part, and thereby makes the metal layer into the near-field light generating element.
摘要翻译： 近场光产生元件具有包括第一和第二倾斜表面的外表面和将第一和第二倾斜表面彼此连接的边缘部分。 在制造近场光产生元件的方法中，最初在金属层上形成抛光阻挡层，并且蚀刻抛光阻挡层和金属层，使得金属层设置有第一倾斜表面。 接下来，形成涂覆层以覆盖金属层和抛光阻挡层。 在稍后执行的第二蚀刻步骤中，涂层由非金属无机材料制成，其蚀刻速率低于金属层的蚀刻速率。 接下来，抛光涂层直到抛光停止层露出。 接下来，进行第二蚀刻步骤，使用涂层作为蚀刻掩模来蚀刻抛光停止层和金属层。 由此，使金属层具有第二倾斜面和边缘部，由此使金属层成为近场光产生元件。
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87.发明申请公开(公告)号：US20110147343A1
公开(公告)日：2011-06-23
申请号：US12654548
申请日：2009-12-23
申请人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Jianing Zhou , Min Li
发明人： Hironori Araki , Yoshitaka Sasaki , Hiroyuki Ito , Shigeki Tanemura , Jianing Zhou , Min Li
IPC分类号： G11B5/127
CPC分类号： G11B5/1278 , G11B5/3116 , G11B5/3163
摘要： A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an accommodation layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes the steps of; forming a groove defining layer on a nonmagnetic layer that is intended to later become the accommodation layer; forming a mask that covers an area of the nonmagnetic layer where to form the first portion of the groove; etching the nonmagnetic layer so that the second portion of the groove is formed in the nonmagnetic layer; removing the mask; and taper-etching the nonmagnetic layer so that the first portion of the groove is formed in the nonmagnetic layer and the groove is thereby completed.
摘要翻译： 磁头包括：包括轨道宽度限定部分和宽部分的极层; 以及容纳层，其设置在底部形成层上并具有容纳极层的槽。 凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。 磁头的制造方法包括以下步骤： 在非磁性层上形成凹槽限定层，所述非磁性层旨在稍后成为所述容纳层; 形成覆盖形成所述槽的第一部分的非磁性层的区域的掩模; 蚀刻非磁性层，使得凹槽的第二部分形成在非磁性层中; 去除面膜; 并且对非磁性层进行锥形蚀刻，使得凹槽的第一部分形成在非磁性层中，从而完成凹槽。
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88.发明授权公开(公告)号：US07943288B2
公开(公告)日：2011-05-17
申请号：US12232722
申请日：2008-09-23
申请人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
发明人： Yoshitaka Sasaki , Hiroyuki Ito , Takehiro Kamigama , Tatsushi Shimizu , Hironori Araki , Shigeki Tanemura , Kazuo Ishizaki
IPC分类号： G11B5/31
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , Y10T29/49032
摘要： A method of manufacturing a thin-film magnetic head structure comprises the steps of preparing an insulating layer 10; forming a first resist layer 51 provided with a first slit pattern 51a corresponding to a very narrow groove part and a second slit pattern 51b corresponding to a temporary groove part integrally extending from the very narrow groove part along outer edges of a main depression onto the insulating layer 10; etching the insulating layer 10 while using the first resist layer 51 as a mask; eliminating the first resist layer 51; forming a second resist layer having an opening pattern corresponding to the main depression onto the insulating layer 10; and etching the insulating layer 10 while using the second resist layer as a mask.
摘要翻译： 制造薄膜磁头结构的方法包括制备绝缘层10的步骤; 形成第一抗蚀剂层51，该第一抗蚀剂层51具有对应于非常窄的槽部分的第一狭缝图案51a和对应于从非常窄的槽部分沿着主凹陷的外边缘整体延伸到绝缘体上的临时槽部分的第二狭缝图案51b 第10层; 在使用第一抗蚀剂层51作为掩模的同时蚀刻绝缘层10; 消除第一抗蚀剂层51; 在所述绝缘层10上形成具有与所述主凹部对应的开口图案的第二抗蚀剂层; 并且在使用第二抗蚀剂层作为掩模的同时蚀刻绝缘层10。
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89.发明申请公开(公告)号：US20110013497A1
公开(公告)日：2011-01-20
申请号：US12458546
申请日：2009-07-15
CPC分类号： G11B5/314 , G11B5/4866 , G11B2005/001 , G11B2005/0021
摘要： A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The substrate has a top surface facing toward the magnetic pole, the near-field light generating element and the waveguide. The slider has a top surface that lies above the top surface of the substrate, at an end of the slider farther from the top surface of the substrate. The laser diode includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface of the slider. The external mirror reflects the laser light emitted from the emission part toward the waveguide.
摘要翻译： 热辅助磁记录头包括滑块，固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极，波导，近场光产生元件和基板。 基板具有面向磁极的顶表面，近场光产生元件和波导。 滑块具有位于基板顶表面上方的顶表面，在滑块的距基板顶表面更远的一端。 激光二极管包括：有源层; 位于与有源层的平面平行的方向上的端部的发射端面，并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。 激光二极管被布置成使得底表面面向滑块的顶表面。 外部反射镜将从发射部分发射的激光朝向波导反射。
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90.发明申请Near-field light generating device that includes near-field light generating element accommodated in a groove of an encasing layer 有权近场光产生装置，其包括容纳在封装层的凹槽中的近场光产生元件公开(公告)号：US20100328806A1
公开(公告)日：2010-12-30
申请号：US12457984
申请日：2009-06-26
CPC分类号： G11B5/314 , G11B5/3116 , G11B5/3163 , G11B5/6088 , G11B7/1387 , G11B2005/0002 , G11B2005/0021
摘要： A near-field light generating element accommodated in a groove of an encasing layer has an outer surface that includes a first end face including a near-field light generating part, a second end face opposite to the first end face, and a coupling portion that couples the first and second end faces. The coupling portion includes a top surface, and first and second side surfaces that decrease in distance from each other with increasing distance from the top surface. The first end face includes a first side located at an end of the first side surface, and a second side located at an end of the second side surface. Each of the first and second sides includes an upper part and a lower part continuous with each other. An angle formed between the respective lower parts of the first and second sides is smaller than that formed between the respective upper parts of the first and second sides.
摘要翻译： 容纳在包装层的槽中的近场光产生元件具有外表面，该外表面包括包括近场光产生部分的第一端面，与第一端面相对的第二端面和耦合部分， 耦合第一和第二个端面。 联接部分包括顶表面，以及随着与顶表面的距离增加而彼此间隔距离减小的第一和第二侧表面。 第一端面包括位于第一侧表面的端部的第一侧和位于第二侧表面的端部的第二侧。 第一和第二侧中的每一个包括彼此连续的上部和下部。 在第一和第二侧的相应下部之间形成的角度小于在第一和第二侧的相应上部之间形成的角度。
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