公开(公告)号：US20050155358A1

公开(公告)日：2005-07-21

申请号：US10763056

申请日：2004-01-21

申请人： Gary Ash ,  Allen Bartlett ,  James O'Neil ,  Bruce Andeen

发明人： Gary Ash ,  Allen Bartlett ,  James O'Neil ,  Bruce Andeen

IPC分类号： B01D8/00 ,  F04B37/08

CPC分类号： F04B37/08

摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.

摘要翻译： 本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。 离子计或其他总压力表与泵的冷凝或吸附面板接触。 例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。 在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。 通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。