公开(公告)号：US20050155358A1

公开(公告)日：2005-07-21

申请号：US10763056

申请日：2004-01-21

申请人： Gary Ash ,  Allen Bartlett ,  James O'Neil ,  Bruce Andeen

发明人： Gary Ash ,  Allen Bartlett ,  James O'Neil ,  Bruce Andeen

IPC分类号： B01D8/00 ,  F04B37/08

CPC分类号： F04B37/08

摘要： The present system and method provides a mechanism for monitoring the level of fullness of a cryopump by measuring the cryopump adsorption capacity. An ion gauge or other total pressure gauge is in contact with the condensing or adsorbing panels of the pump. The gauge sensor, for example, can be connected to a tube or duct leading to the central core of the pump where the adsorbing charcoal is located. At this location in the pump, the gauge is exposed to low-boiling-point gases, such as hydrogen, neon and helium, while being substantially shielded from other gases such as nitrogen, argon, oxygen, or water vapor. By connecting a gauge to this location of the pump, the gauge can be used to monitor the absorption capacity of the pump.

摘要翻译： 本系统和方法提供了通过测量低温泵吸附能力来监测低温泵的饱和度的机制。 离子计或其他总压力表与泵的冷凝或吸附面板接触。 例如，量规传感器可以连接到通向吸附木炭所在的泵的中心芯的管或管道。 在泵的这个位置，仪表暴露于低沸点气体，如氢气，氖气和氦气，同时基本上与其他气体如氮气，氩气，氧气或水蒸气相隔离。 通过将量规连接到泵的该位置，该量规可用于监测泵的吸收能力。

公开(公告)号：US20070107448A1

公开(公告)日：2007-05-17

申请号：US11590673

申请日：2006-10-31

申请人： Paul Dresens ,  Gary Ash ,  Allen Bartlett ,  Bruce Andeen ,  Y. Than ,  Joseph Chopy

发明人： Paul Dresens ,  Gary Ash ,  Allen Bartlett ,  Bruce Andeen ,  Y. Than ,  Joseph Chopy

IPC分类号： B01D8/00 ,  F25B45/00

CPC分类号： F04B37/08 ,  B01D8/00 ,  F17D1/04 ,  F17D3/01 ,  F17D3/18 ,  F24F11/30 ,  F24F2110/50 ,  F25B9/002 ,  F25B9/14 ,  F25B45/00 ,  F25B2309/001 ,  F25B2309/002 ,  F25B2309/1428 ,  F25B2345/001 ,  F25B2345/003 ,  F25J1/0007

摘要： A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly. Similarly, if the total refrigeration demand exceeds the total refrigeration supply, the refrigerant supply to some or all of the cryogenic refrigerators will be reduced accordingly so that detrimental or slowing effects are minimized based upon the current cooling function.

摘要翻译： 用于控制来自公共歧管的氦制冷剂供应的氦管理控制系统为多个低温冰箱供应适当的氦气供应。 该系统采用多个传感器来监视和调节整个制冷剂供应，以根据所计算的所有低温冰箱的总体冷却需求向每个低温冰箱输送适当的制冷剂供应。 通过检测过量稀疏氦制冷剂并相应地重新分配制冷剂，将适当的氦气供应分配给每个低温泵。 如果总制冷供应超过总制冷剂需求或消耗量，则过量的制冷剂被引导到可以利用过量氦气来更快地完成当前冷却功能的低温冰箱。 类似地，如果总制冷需求超过总制冷供应，则对一些或所有低温冰箱的制冷剂供应将相应地减小，从而基于当前的冷却功能来最小化有害或减速效果。

公开(公告)号：US20050204753A1

公开(公告)日：2005-09-22

申请号：US10804842

申请日：2004-03-19

申请人： Allen Bartlett ,  Gary Ash ,  Brian Thompson ,  Mark Stira

发明人： Allen Bartlett ,  Gary Ash ,  Brian Thompson ,  Mark Stira

IPC分类号： F04B37/08 ,  B01D8/00

CPC分类号： F04B37/08

摘要： A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.

摘要翻译： 单个管道阀组件提供集成的低温泵，其具有将组件连接到具有内部管道和外部管道的同轴连接的低温泵的净化阀口。 加压气体界面通过内部管道将加压气体源连接到低温泵。 一个粗糙的阀口可以将组件的外部管道连接到一个粗糙的真空泵上; 并且安全阀端口可以将组件的外部管道连接到排气叠层。

公开(公告)号：US20050126186A1

公开(公告)日：2005-06-16

申请号：US10734079

申请日：2003-12-11

申请人： Russell Sylvia ,  Allen Bartlett ,  Mark Housman

发明人： Russell Sylvia ,  Allen Bartlett ,  Mark Housman

IPC分类号： F25B9/14 ,  F16J15/16 ,  F16J15/18 ,  F16J15/20 ,  F16J15/56 ,  F25B9/00 ,  B23P15/10 ,  F01B29/10 ,  F02G1/04

CPC分类号： F16J15/164 ,  F02G2253/02 ,  F16J15/186 ,  F16J15/20 ,  F16J15/56 ,  F25B9/00 ,  Y10T29/536

摘要： A piston includes a circumferential groove having a dynamic split seal ring having a flat axially facing surface, a static seal ring having a flat axially facing surface abutting the flat surface of the dynamic seal ring, and a spring mounted within the groove. The spring exerts an axial force on the static seal ring that serves to distribute the axial load with a static seal over the dynamic split seal, thereby preventing shuttling of the split seal within the groove and restricting the leak path of the seal. Preferably, the static seal ring is a polymer and can be an L-ring, a load ring with a flange that abuts the piston body, or flanged designs. In addition, a load ring can be fitted between the L-ring and the spring. The split seal ring has at least one radial spring mounted within the seal ring to create a radial force on the split seal ring. The piston can also include a sleeve that mounts to the piston body, the sleeve forming a wall of the groove. The piston can be a displacer mounted within a cylinder of a refrigerator.

摘要翻译： 活塞包括具有动态分割密封环的周向凹槽，所述动态分隔密封环具有平坦的轴向相对表面，静密封环具有邻接动态密封环的平坦表面的平坦的轴向面对表面，以及安装在凹槽内的弹簧。 弹簧在静密封环上施加轴向力，其用于将动态分隔密封件上的静态密封件分布轴向载荷，从而防止分隔密封件在凹槽内穿梭并限制密封件的泄漏路径。 优选地，静密封环是聚合物，并且可以是L形环，具有与活塞体邻接的凸缘的负载环或法兰的设计。 另外，可以在L形环和弹簧之间安装一个负载环。 分离密封环具有安装在密封环内的至少一个径向弹簧，以在分离密封环上产生径向力。 活塞还可以包括安装到活塞体的套筒，套筒形成凹槽的壁。 活塞可以是安装在冰箱的气缸内的置换器。

公开(公告)号：US20060064990A1

公开(公告)日：2006-03-30

申请号：US10948955

申请日：2004-09-24

申请人： Allen Bartlett ,  John Nordborg ,  Brian Thompson

发明人： Allen Bartlett ,  John Nordborg ,  Brian Thompson

IPC分类号： B01D8/00

CPC分类号： F04B37/08 ,  F04B37/02 ,  F04B37/04

摘要： A cryopump provides for high pumping speed of Type III gases. An open configuration of a frontal array provides high conductance of gases into a radiation shield which is shaped to focus gases toward a second stage array. The second stage array has an open configuration of baffles coated with adsorbent. Substantially all of the adsorbent has a direct line of sight to the radiation shield or to the opening in the radiation shield, and substantially all of the baffles are coated with adsorbent. In one form, the second stage cryopump array comprises an array of discs fanned to define a generally ball shaped envelope.

摘要翻译： 低温泵提供III型气体的高泵送速度。 正面阵列的开放结构使得气体进入辐射屏蔽体的高电导率，辐射屏蔽被成形为将气体聚焦到第二级阵列。 第二级阵列具有涂覆有吸附剂的挡板的开放构型。 基本上所有的吸附剂具有与辐射屏蔽件或辐射屏蔽件中的开口的直接视线，并且基本上所有的挡板都涂覆有吸附剂。 在一种形式中，第二级低温泵阵列包括扇形盘阵列，以形成大致球形的外壳。