公开(公告)号：US5381016A

公开(公告)日：1995-01-10

申请号：US37994

申请日：1993-03-25

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G01N21/64 ,  G01N21/95

CPC分类号： G01N21/9505 ,  G01N21/6489 ,  G01N21/6408

摘要： Provided are a method and an apparatus for measuring photoluminescence, which can measure the inside of crystal such as silicon. A lifetime of fluorescence-generating carrier may be evaluated in a mathematical technique without using an expensive pulse laser source. Also, an incident beam wavelength dependency and a polarization dependency of fluorescence may be evaluated by a simple method. A laser having a wavelength which can go into a crystal is projected into an object crystal, fluorescence in generated light inside the crystal is separated through a filter having a frequency band for transmission of fluorescence. An intensity and a spread of fluorescence are obtained as a function of depth from a surface of the crystal to evaluate the lifetime of luminescent center in a mathematical manner. The projection light wavelength dependency of fluorescence may be evaluated by rotating a narrow-band filter, and a polarization dependency by suitably inserting a polarizing filter into an optical patch.

摘要翻译： 提供了可以测量诸如硅的晶体内部的光致发光的方法和装置。 荧光发生载体的寿命可以在数学技术中进行评估，而不使用昂贵的脉冲激光源。 此外，可以通过简单的方法评估入射光束波长依赖性和荧光的偏振依赖性。 具有能够进入晶体的波长的激光投射到物体中，通过具有用于荧光透射的频带的滤波器分离晶体内的生成光的荧光。 从晶体的表面获得作为深度的函数的荧光的强度和扩散，以数学方式评估发光中心的寿命。 荧光的投射光波长依赖性可以通过旋转窄带滤光片和通过将偏振滤光片适当地插入到光学贴片中来进行极化依赖性来评估。

公开(公告)号：US5471298A

公开(公告)日：1995-11-28

申请号：US36986

申请日：1993-03-25

申请人： Kazuo Moriya

发明人： Kazuo Moriya

IPC分类号： G01N15/02 ,  G01N15/14 ,  G01N21/47 ,  G01N21/84 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  H01L21/66 ,  G01N21/53

CPC分类号： G01N15/0205 ,  G01N2015/0238 ,  G01N2021/1772 ,  G01N2021/4726 ,  G01N2021/4792 ,  G01N2021/8477 ,  G01N21/95

摘要： A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.

摘要翻译： 测量物体中的颗粒或缺陷的尺寸。 将激光束通过光学系统引导到物体中。 光接收元件从物体中的颗粒或缺陷接收散射光。 散射图像由图像处理器从这样接收的散射光形成。 颗粒或缺陷的大小通过对散射光的散射强度进行积分而获得。 此外，可以通过检测每个颗粒或缺陷的最大散射强度来获得物体中的颗粒或缺陷的尺寸分布。 也可以检查散射的极化依赖性。