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公开(公告)号：US10338096B2
公开(公告)日：2019-07-02
申请号：US15798941
申请日：2017-10-31
IPC分类号： G01Q20/02
摘要： This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号：US09841436B2
公开(公告)日：2017-12-12
申请号：US15275770
申请日：2016-09-26
发明人： Roger Proksch , Jason Bemis , Aleksander Labuda
摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
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公开(公告)号：USRE49997E1
公开(公告)日：2024-06-04
申请号：US17365671
申请日：2021-07-01
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02
摘要： This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号：US20240012021A1
公开(公告)日：2024-01-11
申请号：US18021286
申请日：2021-08-18
申请人： Oxford Instruments Asylum Research, Inc. , Centre National de la Recherche Scientifique , École Normale Supérieure de Lyon , Université Claude Bernard Lyon 1 (UCBL)
发明人： Aleks Labuda , Basile Pottier , Ludovic Bellon
IPC分类号： G01Q20/02
CPC分类号： G01Q20/02
摘要： An atomic force microscope (“AFM”) based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.
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公开(公告)号：US11644478B2
公开(公告)日：2023-05-09
申请号：US17591402
申请日：2022-02-02
发明人： Jason Bemis , David Aue , Aleksander Labuda
CPC分类号： G01Q20/02 , G01Q10/065 , G01Q30/025 , G01Q30/04 , G01Q60/42
摘要： An atomic force microscope is provided having a controller configured to store one or more positional parameters output by a sensor assembly when a light spot is located at a first preset position on the surface of the cantilever. The controller is further configured to operate an actuator assembly so as to induce movement of the spot away from the first preset position, to detect said movement of the first spot based on a change in the one or more positional parameters output by the sensor assembly, and to operate an optical assembly in response to the detected movement of the first spot to return the first spot to the first preset position.
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公开(公告)号：US09604846B2
公开(公告)日：2017-03-28
申请号：US14224268
申请日：2014-03-25
发明人： Roger Proksch , Anil Gannepalli
摘要： Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information from piezoelectric, polymer and other materials using contact resonance with multiple excitation signals are also described.
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公开(公告)号：US09581616B2
公开(公告)日：2017-02-28
申请号：US14817517
申请日：2015-08-04
发明人： Mario Viani , Roger Proksch , Maarten Rutgers , Jason Cleveland , Jim Hodgson
摘要： A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
摘要翻译： 描述了在各种环境条件下允许超高分辨率成像和测量的模块化原子力显微镜。 该仪器允许在环境到液体或气体或极高或极低温度的环境中进行这种成像和测量。
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公开(公告)号：US20150150163A1
公开(公告)日：2015-05-28
申请号：US13998691
申请日：2013-11-25
发明人： Mario Viani , Roger Proksch , Maarten Rutgers , Jason Cleveland , Jim Hodgeson
IPC分类号： G01Q10/00
摘要： A modular Atomic Force Microscope that allows ultra-high resolution imaging and measurements in a wide variety of environmental conditions is described. The instrument permits such imaging and measurements in environments ranging from ambient to liquid or gas or extremely high or extremely low temperatures.
摘要翻译： 描述了在各种环境条件下允许超高分辨率成像和测量的模块化原子力显微镜。 该仪器允许在环境到液体或气体或极高或极低温度的环境中进行这种成像和测量。
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公开(公告)号：US10705114B2
公开(公告)日：2020-07-07
申请号：US16460470
申请日：2019-07-02
IPC分类号： G01Q20/02
摘要： This invention relates to a metrological scanning probe microscope system combining an SPM which employs an optical lever arrangement to measure displacement of the probe indirectly with another SPM which measures the displacement of the probe directly through the use of an interferometric detection scheme.
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公开(公告)号：US10444258B2
公开(公告)日：2019-10-15
申请号：US15837852
申请日：2017-12-11
发明人： Roger Proksch , Jason Bemis , Aleksander Labuda
摘要： Apparatus and techniques presented combine the features and benefits of amplitude modulated (AM) atomic force microscopy (AFM), sometimes called AC mode AFM, with frequency modulated (FM) AFM. In AM-FM imaging, the topographic feedback from the first resonant drive frequency operates in AM mode while the phase feedback from second resonant drive frequency operates in FM mode. In particular the first or second frequency may be used to measure the loss tangent, a dimensionless parameter which measures the ratio of energy dissipated to energy stored in a cycle of deformation.
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