公开(公告)号：US09478470B2

公开(公告)日：2016-10-25

申请号：US13855321

申请日：2013-04-02

Applicant: STMicroelectronics S.r.l.

Inventor： Alberto Pagani

IPC: H01L23/58 ,  H01L21/66 ,  H01L21/768 ,  H01L21/74

CPC classification number: H01L22/34 ,  H01L21/743 ,  H01L21/76898 ,  H01L22/14

Abstract: An embodiment of a process for manufacturing a system for electrical testing of a through via extending in a vertical direction through a substrate of semiconductor material envisages integrating an electrical testing circuit in the body to enable detection of at least one electrical parameter of the through via through a microelectronic buried structure defining an electrical path between electrical-connection elements towards the outside and a buried end of the through via; the integration step envisages providing a trench and forming a doped buried region at the bottom of the trench, having a doping opposite to that of the substrate so as to form a semiconductor junction, defining the electrical path when it is forward biased; in particular, the semiconductor junction has a junction area smaller than the area of a surface of the conductive region in a horizontal plane transverse to the vertical direction, in such a way as to have a reduced reverse saturation current.

Abstract translation: 用于制造用于沿垂直方向延伸穿过半导体材料的基底的通孔的电测试的系统的实施例设想将身体中的电测试电路集成以使得能够检测穿通通孔的至少一个电参数 微电子掩埋结构，其限定朝向外部的电连接元件和通孔的埋入端之间的电路径; 集成步骤设想提供沟槽并在沟槽的底部形成掺杂的掩埋区域，其具有与衬底的掺杂相反的掺杂，以便形成半导体结，当正向偏置时限定电路径; 特别地，半导体结具有比横向于垂直方向的水平面中的导电区域的表面的面积小的结面积，使得具有减小的反向饱和电流。

公开(公告)号：US20150114112A1

公开(公告)日：2015-04-30

申请号：US14067051

申请日：2013-10-30

Applicant: STMicroelectronics S.r.l

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5712

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。

公开(公告)号：US09404747B2

公开(公告)日：2016-08-02

申请号：US14067051

申请日：2013-10-30

Applicant: STMicroelectronics S.r.l.

Inventor： Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/56 ,  G01C19/5747 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/574

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574 ,  G01C19/5747

Abstract: A microelectromechanical gyroscope, includes: a supporting body; a first movable mass and a second movable mass, which are oscillatable according to a first driving axis and tiltable about respective a first and second sensing axes and are symmetrically arranged with respect to a center of symmetry; first sensing electrodes and a second sensing electrodes associated with the first and second movable masses and arranged on the supporting body symmetrically with respect to the first and second sensing axis, the first and second movable masses being capacitively coupled to the respective first sensing electrode and to the respective second sensing electrode, a bridge element elastically coupled to respective inner ends of the first movable mass and of the second movable mass and coupled to the supporting body so as to be tiltable about an axis transverse to the first driving axis.

Abstract translation: 一种微机电陀螺仪，包括：支撑体; 第一可移动质量块和第二可移动质量块，它们可根据第一驱动轴线振荡并围绕相应的第一和第二感测轴线可倾斜，并且相对于对称中心对称布置; 第一感测电极和与第一和第二可移动质量相关联并且相对于第一和第二感测轴对称地布置在支撑体上的第二感测电极，第一和第二可移动质量体电容耦合到相应的第一感测电极，并且 相应的第二感测电极，桥接元件，其弹性地联接到第一可移动质量块的相应内端和第二可移动质量块，并且联接到支撑体，以便能够围绕横向于第一驱动轴线的轴线倾斜。