公开(公告)号：US09773967B2

公开(公告)日：2017-09-26

申请号：US14068687

申请日：2013-10-31

申请人： Virginia Tech Intellectual Properties, Inc.

发明人： Deepam Maurya ,  Shashank Priya

IPC分类号： H01L41/20 ,  H01L41/047 ,  H01L41/16 ,  H01L41/187 ,  C04B35/462 ,  C04B35/475 ,  H01L41/43 ,  H01L41/083

CPC分类号： H01L41/16 ,  C04B35/462 ,  C04B35/475 ,  C04B2235/3201 ,  C04B2235/3215 ,  C04B2235/3234 ,  C04B2235/3236 ,  C04B2235/3298 ,  C04B2235/5276 ,  C04B2235/5296 ,  C04B2235/787 ,  C04B2235/80 ,  H01L41/083 ,  H01L41/187 ,  H01L41/43 ,  Y10T428/325

摘要： Textured ceramic compositions having improved piezoelectric characteristics as compared with their random counterparts are provided. Methods of making the compositions and devices using them are also included. More particularly, compositions comprising textured ceramic Na0.5Bi0.5TiO3—BaTiO3(NBT-BT) materials synthesized from high aspect ratio NBT seeds exhibit improved characteristics, including an increased longitudinal piezoelectric constant (d33) and magnetoelectric coupling coefficient over randomly oriented NBT-BT. Additionally provided are compositions comprising of nanostructured Na0.5B0.5TiO3—BaTiO3 ferroelectric whiskers having a high aspect ratio. Nanostructured whiskers can be used to improve the piezoelectric properties of the bulk ceramics. The inventive materials are useful in microelectronic devices, with some finding particular application as multilayer actuators and transducers.