公开(公告)号：US5475268A

公开(公告)日：1995-12-12

申请号：US357282

申请日：1994-12-13

申请人： Tomoya Kawagoe ,  Akihisa Oishi ,  Mitsutaka Niiro ,  Katsumi Dosaka

发明人： Tomoya Kawagoe ,  Akihisa Oishi ,  Mitsutaka Niiro ,  Katsumi Dosaka

IPC分类号： H01L21/68 ,  H01L21/027 ,  H01L21/822 ,  H01L23/544 ,  H01L27/04 ,  H01L23/48 ,  H01L23/522

CPC分类号： H01L23/544 ,  H01L2223/54453 ,  H01L2924/0002

摘要： A semiconductor device having an alignment mark which is improved to enable accurate recognition of the alignment mark is provided. A first interconnection layer is provided on a semiconductor substrate. A second interconnection layer is provided on an interlayer insulating film so that first and second interconnection layers cross each other with interlayer insulating film therebetween. A surface of second interconnection layer includes, in a region where first and second interconnection layers cross each other, a flat portion which reflects laser beam vertically and upwardly and a portion including concaves and convexes which reflects laser beam irregularly, which together form an alignment mark.

摘要翻译： 提供了具有对准标记的半导体器件，其被改进以能够准确地识别对准标记。 第一互连层设置在半导体衬底上。 第二互连层设置在层间绝缘膜上，使得第一互连层和第二互连层之间具有层间绝缘膜彼此交叉。 第二互连层的表面在第一和第二互连层彼此交叉的区域中包括反射激光束垂直和向上的平坦部分和包括不规则地反射激光束的凹凸部分，这些部分一起形成对准标记 。